DE69318957D1 - Herstellungsverfahren für Druckwandler mittels der Silicium auf Isolation Technologie sowie derart hergestellte Wandler - Google Patents
Herstellungsverfahren für Druckwandler mittels der Silicium auf Isolation Technologie sowie derart hergestellte WandlerInfo
- Publication number
- DE69318957D1 DE69318957D1 DE69318957T DE69318957T DE69318957D1 DE 69318957 D1 DE69318957 D1 DE 69318957D1 DE 69318957 T DE69318957 T DE 69318957T DE 69318957 T DE69318957 T DE 69318957T DE 69318957 D1 DE69318957 D1 DE 69318957D1
- Authority
- DE
- Germany
- Prior art keywords
- transducers
- silicon
- way
- manufacturing process
- manufactured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00158—Diaphragms, membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/135—Removal of substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/159—Strain gauges
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9215772A FR2700003B1 (fr) | 1992-12-28 | 1992-12-28 | Procédé de fabrication d'un capteur de pression utilisant la technologie silicium sur isolant et capteur obtenu. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69318957D1 true DE69318957D1 (de) | 1998-07-09 |
DE69318957T2 DE69318957T2 (de) | 1998-12-17 |
Family
ID=9437154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69318957T Expired - Lifetime DE69318957T2 (de) | 1992-12-28 | 1993-12-23 | Herstellungsverfahren für Druckwandler mittels der Silicium auf Isolation Technologie sowie derart hergestellte Wandler |
Country Status (5)
Country | Link |
---|---|
US (2) | US5510276A (de) |
EP (1) | EP0605302B1 (de) |
JP (1) | JP3444639B2 (de) |
DE (1) | DE69318957T2 (de) |
FR (1) | FR2700003B1 (de) |
Families Citing this family (99)
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US5332469A (en) * | 1992-11-12 | 1994-07-26 | Ford Motor Company | Capacitive surface micromachined differential pressure sensor |
US5316619A (en) * | 1993-02-05 | 1994-05-31 | Ford Motor Company | Capacitive surface micromachine absolute pressure sensor and method for processing |
US5369544A (en) * | 1993-04-05 | 1994-11-29 | Ford Motor Company | Silicon-on-insulator capacitive surface micromachined absolute pressure sensor |
-
1992
- 1992-12-28 FR FR9215772A patent/FR2700003B1/fr not_active Expired - Fee Related
-
1993
- 1993-12-15 US US08/167,503 patent/US5510276A/en not_active Expired - Lifetime
- 1993-12-23 DE DE69318957T patent/DE69318957T2/de not_active Expired - Lifetime
- 1993-12-23 EP EP93403156A patent/EP0605302B1/de not_active Expired - Lifetime
- 1993-12-28 JP JP33603993A patent/JP3444639B2/ja not_active Expired - Lifetime
-
1995
- 1995-12-22 US US08/579,063 patent/US5912499A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2700003A1 (fr) | 1994-07-01 |
US5912499A (en) | 1999-06-15 |
JPH077160A (ja) | 1995-01-10 |
US5510276A (en) | 1996-04-23 |
DE69318957T2 (de) | 1998-12-17 |
EP0605302A3 (en) | 1994-09-28 |
FR2700003B1 (fr) | 1995-02-10 |
EP0605302A2 (de) | 1994-07-06 |
JP3444639B2 (ja) | 2003-09-08 |
EP0605302B1 (de) | 1998-06-03 |
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