DE69309515D1 - Siliziumnitridpulver und Verfahren zu dessen Herstellung - Google Patents

Siliziumnitridpulver und Verfahren zu dessen Herstellung

Info

Publication number
DE69309515D1
DE69309515D1 DE69309515T DE69309515T DE69309515D1 DE 69309515 D1 DE69309515 D1 DE 69309515D1 DE 69309515 T DE69309515 T DE 69309515T DE 69309515 T DE69309515 T DE 69309515T DE 69309515 D1 DE69309515 D1 DE 69309515D1
Authority
DE
Germany
Prior art keywords
production
silicon nitride
nitride powder
powder
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69309515T
Other languages
English (en)
Other versions
DE69309515T2 (de
Inventor
Yasushi Tsuzuki
Tomoyuki Awazu
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4034186A external-priority patent/JP2946916B2/ja
Priority claimed from JP4076302A external-priority patent/JPH05238710A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69309515D1 publication Critical patent/DE69309515D1/de
Publication of DE69309515T2 publication Critical patent/DE69309515T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0687—After-treatment, e.g. grinding, purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C01P2004/32—Spheres
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/22—Rheological behaviour as dispersion, e.g. viscosity, sedimentation stability

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69309515T 1992-01-24 1993-01-22 Siliziumnitridpulver und Verfahren zu dessen Herstellung Expired - Fee Related DE69309515T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4034186A JP2946916B2 (ja) 1992-01-24 1992-01-24 窒化ケイ素粉末およびその製造方法
JP4076302A JPH05238710A (ja) 1992-02-26 1992-02-26 窒化ケイ素粉末

Publications (2)

Publication Number Publication Date
DE69309515D1 true DE69309515D1 (de) 1997-05-15
DE69309515T2 DE69309515T2 (de) 1997-11-06

Family

ID=26372977

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69309515T Expired - Fee Related DE69309515T2 (de) 1992-01-24 1993-01-22 Siliziumnitridpulver und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (1) US5538927A (de)
EP (1) EP0554020B1 (de)
DE (1) DE69309515T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001080967A (ja) * 1999-09-06 2001-03-27 Sumitomo Electric Ind Ltd Ｓｉ３Ｎ４セラミックスとその製造用Ｓｉ基組成物及びこれらの製造方法
JP3265364B2 (ja) 2000-06-27 2002-03-11 静岡大学長 銅薄膜直接接合ポリイミドフィルムおよびその製造方法
US20060014624A1 (en) * 2004-07-15 2006-01-19 Biljana Mikijelj High dielectric strength monolithic Si3N4
JP5454580B2 (ja) * 2009-08-28 2014-03-26 旭硝子株式会社 造粒体の製造方法およびガラス製品の製造方法
US20160159648A1 (en) * 2013-07-11 2016-06-09 Ube Industries, Ltd. Silicon nitride powder for mold release agent of casting mold for casting polycrystalline silicon ingot and method for manufacturing said silicon nitride powder, slurry containing said silicon nitride powder, casting mold for casting polycrystalline silicon ingot and method for manufacturing same, and method for manufacturing polycrystalline silicon ingot using said casting mold

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724131A (en) * 1984-06-07 1988-02-09 Sumitomo Chemical Company, Limited Method for producing α-form silicon nitride
JPH01313308A (ja) * 1988-06-09 1989-12-18 Denki Kagaku Kogyo Kk 易焼結性アルフア窒化ケイ素粉末
DE3829502A1 (de) * 1988-08-31 1990-03-01 Bayer Ag Siliciumnitridpulver mit niedrigem isoelektrischen punkt sowie verfahren zu deren herstellung
DE3829503A1 (de) * 1988-08-31 1990-03-01 Bayer Ag Siliciumnitridpulver mit geringem sauerstoffgehalt
DE3829504A1 (de) * 1988-08-31 1990-03-01 Bayer Ag Siliciumnitridpulver mit verbesserten oberflaecheneigenschaften sowie verfahren zu deren herstellung
JPH0383865A (ja) * 1989-08-25 1991-04-09 Toyota Central Res & Dev Lab Inc 窒化珪素質焼結体およびその製造方法
JPH03159907A (ja) * 1989-11-16 1991-07-09 Denki Kagaku Kogyo Kk 窒化ケイ素粉末
DE4031070A1 (de) * 1990-10-02 1992-04-09 Bayer Ag Siliciumdiimid, verfahren zu dessen herstellung sowie daraus erhaltenes siliciumnitrid

Also Published As

Publication number Publication date
US5538927A (en) 1996-07-23
DE69309515T2 (de) 1997-11-06
EP0554020A1 (de) 1993-08-04
EP0554020B1 (de) 1997-04-09

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee