DE69304130D1 - Verfahren zur Abscheidung eines ohmischen Kontaktes auf einer ZnSe-Schicht - Google Patents
Verfahren zur Abscheidung eines ohmischen Kontaktes auf einer ZnSe-SchichtInfo
- Publication number
- DE69304130D1 DE69304130D1 DE69304130T DE69304130T DE69304130D1 DE 69304130 D1 DE69304130 D1 DE 69304130D1 DE 69304130 T DE69304130 T DE 69304130T DE 69304130 T DE69304130 T DE 69304130T DE 69304130 D1 DE69304130 D1 DE 69304130D1
- Authority
- DE
- Germany
- Prior art keywords
- deposition
- ohmic contact
- znse layer
- znse
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008021 deposition Effects 0.000 title 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
- H01L21/441—Deposition of conductive or insulating materials for electrodes
- H01L21/445—Deposition of conductive or insulating materials for electrodes from a liquid, e.g. electrolytic deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/28—Materials of the light emitting region containing only elements of Group II and Group VI of the Periodic Table
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electrodes Of Semiconductors (AREA)
- Led Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/878,657 US5293074A (en) | 1992-05-05 | 1992-05-05 | Ohmic contact to p-type ZnSe |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69304130D1 true DE69304130D1 (de) | 1996-09-26 |
DE69304130T2 DE69304130T2 (de) | 1997-02-20 |
Family
ID=25372523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69304130T Expired - Fee Related DE69304130T2 (de) | 1992-05-05 | 1993-05-04 | Verfahren zur Abscheidung eines ohmischen Kontaktes auf einer ZnSe-Schicht |
Country Status (4)
Country | Link |
---|---|
US (2) | US5293074A (de) |
EP (1) | EP0569094B1 (de) |
JP (1) | JP2522892B2 (de) |
DE (1) | DE69304130T2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0552023B1 (de) * | 1992-01-14 | 1997-04-02 | Mitsubishi Chemical Corporation | Elektroden-Struktur für Halbleiteranordnung |
US5557146A (en) * | 1993-07-14 | 1996-09-17 | University Of South Florida | Ohmic contact using binder paste with semiconductor material dispersed therein |
JPH07263372A (ja) * | 1994-03-24 | 1995-10-13 | Sharp Corp | Ii−vi族化合物半導体装置およびその製造方法 |
US5909632A (en) * | 1997-09-25 | 1999-06-01 | Midwest Research Institute | Use of separate ZnTe interface layers to form OHMIC contacts to p-CdTe films |
US6087725A (en) * | 1997-09-29 | 2000-07-11 | Matsushita Electric Industrial Co., Ltd. | Low barrier ohmic contact for semiconductor light emitting device |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4123295A (en) * | 1977-01-14 | 1978-10-31 | California Institute Of Technology | Mercury chalcogenide contact for semiconductor devices |
JPS5824149A (ja) * | 1981-08-06 | 1983-02-14 | Fuji Photo Film Co Ltd | 平版印刷用感光材料 |
JPS63185077A (ja) * | 1987-01-27 | 1988-07-30 | Matsushita Electric Ind Co Ltd | 青色発光ダイオ−ド |
JPH01140663A (ja) * | 1987-11-27 | 1989-06-01 | Toshiba Corp | 半導体装置の電極 |
JPH01187884A (ja) * | 1988-01-22 | 1989-07-27 | Toshiba Corp | 電極形成法 |
JPH01313932A (ja) * | 1988-06-14 | 1989-12-19 | Toshiba Corp | 電極形成法 |
JP2632975B2 (ja) * | 1988-10-31 | 1997-07-23 | 日本電信電話株式会社 | p型ZnSeに対するオーミック電極形成法 |
US5150191A (en) * | 1989-11-21 | 1992-09-22 | Kabushiki Kaisha Toshiba | P-type II-VI compound semiconductor doped |
US5045897A (en) * | 1990-03-14 | 1991-09-03 | Santa Barbara Research Center | Quaternary II-VI materials for photonics |
US5274269A (en) * | 1991-05-15 | 1993-12-28 | Minnesota Mining And Manufacturing Company | Ohmic contact for p-type group II-IV compound semiconductors |
-
1992
- 1992-05-05 US US07/878,657 patent/US5293074A/en not_active Expired - Fee Related
-
1993
- 1993-05-04 EP EP93201261A patent/EP0569094B1/de not_active Expired - Lifetime
- 1993-05-04 DE DE69304130T patent/DE69304130T2/de not_active Expired - Fee Related
- 1993-05-06 JP JP5105567A patent/JP2522892B2/ja not_active Expired - Lifetime
- 1993-10-07 US US08/133,545 patent/US5399524A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2522892B2 (ja) | 1996-08-07 |
US5399524A (en) | 1995-03-21 |
DE69304130T2 (de) | 1997-02-20 |
EP0569094A1 (de) | 1993-11-10 |
US5293074A (en) | 1994-03-08 |
JPH07283165A (ja) | 1995-10-27 |
EP0569094B1 (de) | 1996-08-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8339 | Ceased/non-payment of the annual fee |