DE69231953T2 - Verfahren zum Herstellen eines optischen Modulationselements - Google Patents

Verfahren zum Herstellen eines optischen Modulationselements

Info

Publication number
DE69231953T2
DE69231953T2 DE69231953T DE69231953T DE69231953T2 DE 69231953 T2 DE69231953 T2 DE 69231953T2 DE 69231953 T DE69231953 T DE 69231953T DE 69231953 T DE69231953 T DE 69231953T DE 69231953 T2 DE69231953 T2 DE 69231953T2
Authority
DE
Germany
Prior art keywords
modulation element
optical modulation
manufacturing
layer
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69231953T
Other languages
English (en)
Other versions
DE69231953D1 (de
Inventor
Ryoji Fujiwara
Shuzo Kaneko
Akio Maruyama
Tomoko Maruyama
Tomoko Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6320091A external-priority patent/JP3176079B2/ja
Priority claimed from JP20893091A external-priority patent/JPH0534666A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69231953D1 publication Critical patent/DE69231953D1/de
Application granted granted Critical
Publication of DE69231953T2 publication Critical patent/DE69231953T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20—Conductive material dispersed in non-conductive organic material
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K19/00—Liquid crystal materials
    • C09K19/52—Liquid crystal materials characterised by components which are not liquid crystals, e.g. additives with special physical aspect: solvents, solid particles
    • C09K19/58—Dopants or charge transfer agents
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133784—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133796—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers having conducting property
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/139—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
    • G02F1/141—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent using ferroelectric liquid crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/30—Gray scale

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
DE69231953T 1991-03-27 1992-03-26 Verfahren zum Herstellen eines optischen Modulationselements Expired - Fee Related DE69231953T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6320091A JP3176079B2 (ja) 1991-03-27 1991-03-27 光学変調素子
JP20893091A JPH0534666A (ja) 1991-07-26 1991-07-26 光学変調素子

Publications (2)

Publication Number Publication Date
DE69231953D1 DE69231953D1 (de) 2001-08-23
DE69231953T2 true DE69231953T2 (de) 2001-11-22

Family

ID=26404289

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69213291T Expired - Fee Related DE69213291T2 (de) 1991-03-27 1992-03-26 Optisches Modulationselement
DE69231981T Expired - Fee Related DE69231981T2 (de) 1991-03-27 1992-03-26 Optisches Modulationselement
DE69231953T Expired - Fee Related DE69231953T2 (de) 1991-03-27 1992-03-26 Verfahren zum Herstellen eines optischen Modulationselements

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69213291T Expired - Fee Related DE69213291T2 (de) 1991-03-27 1992-03-26 Optisches Modulationselement
DE69231981T Expired - Fee Related DE69231981T2 (de) 1991-03-27 1992-03-26 Optisches Modulationselement

Country Status (4)

Country Link
US (2) US5327272A (de)
EP (3) EP0688022B1 (de)
AT (3) ATE142354T1 (de)
DE (3) DE69213291T2 (de)

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US5327272A (en) * 1991-03-27 1994-07-05 Canon Kabushiki Kaisha Optical modulation element
ATE206532T1 (de) * 1992-07-30 2001-10-15 Canon Kk Flüssigkristall-anzeigevorrichtung
US5465169A (en) * 1992-08-25 1995-11-07 Canon Kabushiki Kaisha Ferroelectric liquid crystal device with electroconductive protective film and electroconductive alignment film
JP3456493B2 (ja) * 1992-10-24 2003-10-14 ソニー株式会社 液晶素子
US6388649B1 (en) 1993-03-26 2002-05-14 Matsushita Electric Industrial Co., Ltd. Spatial light modulator and a method for driving the same
US5592190A (en) * 1993-04-28 1997-01-07 Canon Kabushiki Kaisha Liquid crystal display apparatus and drive method
JPH07318962A (ja) * 1994-03-30 1995-12-08 Seiko Instr Inc 電気装置の電極基板、電極形成方法及び実装方法
JP3297777B2 (ja) * 1994-04-27 2002-07-02 ソニー株式会社 電気光学表示装置
EP0695965B1 (de) * 1994-08-04 2002-04-10 Canon Kabushiki Kaisha Flüssigkristallvorrichtung
US5808676A (en) * 1995-01-03 1998-09-15 Xerox Corporation Pixel cells having integrated analog memories and arrays thereof
EP0782039A3 (de) * 1995-12-27 1998-06-17 Canon Kabushiki Kaisha Anzeigevorrichtung und ihr Herstellungsverfahren
US5893622A (en) * 1996-04-22 1999-04-13 Raytheon Company Optical aperture with predetermined attenuation patterns having polarizers that are black guest host liquid crystal or multilayer, thinfilm, polarizing, beamsplitting prism
US6236440B1 (en) * 1998-07-22 2001-05-22 U.S. Philips Corporation Display device in which one of the two electrodes of a pixel is coated with a dipole material to equalize the electrode work functions
EP1066544A2 (de) * 1999-01-13 2001-01-10 Koninklijke Philips Electronics N.V. Flüssigkristallanzeigevorrichtung
US6128064A (en) * 1999-07-14 2000-10-03 Canon Kabushiki Kaisha Liquid crystal device and liquid crystal display apparatus
TWI246197B (en) * 2001-09-27 2005-12-21 Prime View Int Corp Ltd TFT LCD structure containing conductive balls and the manufacturing method thereof
CN103881430B (zh) * 2014-03-20 2015-11-18 南京倍立达新材料系统工程股份有限公司 一种防尘抗静电无机复合涂料及其制备方法
CN112230461A (zh) * 2019-07-15 2021-01-15 群创光电股份有限公司 辐射装置

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US4005928A (en) * 1971-06-01 1977-02-01 Texas Instruments Incorporated Nematic liquid crystal displays for low voltage direct current operation
US4367924A (en) * 1980-01-08 1983-01-11 Clark Noel A Chiral smectic C or H liquid crystal electro-optical device
JPS5893915U (ja) * 1981-12-18 1983-06-25 シャープ株式会社 液晶表示装置
JPS6031119A (ja) * 1983-07-29 1985-02-16 Sharp Corp 液晶表示素子
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Also Published As

Publication number Publication date
EP0508227B1 (de) 1996-09-04
EP0688022A3 (de) 1996-07-17
EP0688022A2 (de) 1995-12-20
EP0508227A2 (de) 1992-10-14
ATE203352T1 (de) 2001-08-15
DE69231981T2 (de) 2001-12-20
EP0688022B1 (de) 2001-07-18
US5327272A (en) 1994-07-05
EP0701160A1 (de) 1996-03-13
US5838410A (en) 1998-11-17
ATE203837T1 (de) 2001-08-15
ATE142354T1 (de) 1996-09-15
DE69231981D1 (de) 2001-09-06
DE69231953D1 (de) 2001-08-23
DE69213291D1 (de) 1996-10-10
EP0508227A3 (en) 1993-02-17
EP0701160B1 (de) 2001-08-01
DE69213291T2 (de) 1997-02-20

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Legal Events

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8339 Ceased/non-payment of the annual fee