DE69228906T2 - Verfahren zur Ausrichtung von Masken bei der photolithographischen Bearbeitung von gedruckten Leiterplatten - Google Patents
Verfahren zur Ausrichtung von Masken bei der photolithographischen Bearbeitung von gedruckten LeiterplattenInfo
- Publication number
- DE69228906T2 DE69228906T2 DE69228906T DE69228906T DE69228906T2 DE 69228906 T2 DE69228906 T2 DE 69228906T2 DE 69228906 T DE69228906 T DE 69228906T DE 69228906 T DE69228906 T DE 69228906T DE 69228906 T2 DE69228906 T2 DE 69228906T2
- Authority
- DE
- Germany
- Prior art keywords
- masks
- mask
- corners
- circuit board
- applying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 18
- 239000000853 adhesive Substances 0.000 claims description 14
- 230000001070 adhesive effect Effects 0.000 claims description 14
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000004026 adhesive bonding Methods 0.000 claims 1
- 230000007246 mechanism Effects 0.000 description 20
- 239000012190 activator Substances 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49764—Method of mechanical manufacture with testing or indicating
- Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
- Y10T29/4978—Assisting assembly or disassembly
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
- Y10T29/49901—Sequentially associating parts on stationary aligning means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
- Y10T29/49904—Assembling a subassembly, then assembling with a second subassembly
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49998—Work holding
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Screen Printers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75147291A | 1991-08-29 | 1991-08-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69228906D1 DE69228906D1 (de) | 1999-05-20 |
| DE69228906T2 true DE69228906T2 (de) | 1999-12-23 |
Family
ID=25022128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69228906T Expired - Fee Related DE69228906T2 (de) | 1991-08-29 | 1992-08-20 | Verfahren zur Ausrichtung von Masken bei der photolithographischen Bearbeitung von gedruckten Leiterplatten |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5335405A (enExample) |
| EP (1) | EP0529944B1 (enExample) |
| JP (1) | JPH05232709A (enExample) |
| KR (1) | KR930005513A (enExample) |
| DE (1) | DE69228906T2 (enExample) |
| TW (1) | TW201378B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5862583A (en) * | 1995-12-28 | 1999-01-26 | Lucent Technologies Inc. | Panel positioning method and apparatus |
| DE102010026338A1 (de) * | 2010-07-07 | 2012-01-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fixiervorrichtung für Solarzellen sowie Verfahren zur Fixierung von Solarzellen |
| JP5900461B2 (ja) * | 2013-10-28 | 2016-04-06 | トヨタ自動車株式会社 | 成形装置及び樹脂部材の製造方法 |
| JP2017532227A (ja) * | 2014-10-15 | 2017-11-02 | オセ−テクノロジーズ ビーブイ | 整合アンカー |
| CN109664152B (zh) * | 2019-01-22 | 2020-10-02 | 湖南信息职业技术学院 | 一种数控机床 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3536555A (en) * | 1967-12-11 | 1970-10-27 | Harold J Thompson Jr | Apparatus and method for mounting films |
| JPS53129586A (en) * | 1977-04-18 | 1978-11-11 | Toshiba Corp | Semiconductor production unit |
| US4821078A (en) * | 1986-02-28 | 1989-04-11 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for composing a plurality of original films on a base sheet |
| US4721383A (en) * | 1987-01-21 | 1988-01-26 | Simon Michael J | Proofing machine |
| US4793052A (en) * | 1987-11-13 | 1988-12-27 | American Telephone And Telegraph Company, At&T Laboratories | Method for positioning a panel |
| US5014413A (en) * | 1989-05-15 | 1991-05-14 | At&T Bell Laboratories | Method and apparatus for facilitating loading of a panel processing machine and positioning of artwork on a work surface thereon |
-
1992
- 1992-06-20 TW TW081104838A patent/TW201378B/zh active
- 1992-08-18 KR KR1019920014828A patent/KR930005513A/ko not_active Ceased
- 1992-08-20 EP EP92307613A patent/EP0529944B1/en not_active Expired - Lifetime
- 1992-08-20 DE DE69228906T patent/DE69228906T2/de not_active Expired - Fee Related
- 1992-08-27 JP JP4227670A patent/JPH05232709A/ja not_active Withdrawn
-
1993
- 1993-06-01 US US08/069,657 patent/US5335405A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0529944A1 (en) | 1993-03-03 |
| DE69228906D1 (de) | 1999-05-20 |
| KR930005513A (ko) | 1993-03-23 |
| EP0529944B1 (en) | 1999-04-14 |
| US5335405A (en) | 1994-08-09 |
| TW201378B (enExample) | 1993-03-01 |
| JPH05232709A (ja) | 1993-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8332 | No legal effect for de | ||
| 8370 | Indication related to discontinuation of the patent is to be deleted | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |