DE69227920T3 - Verfahren und anordnung zur kontrollierten sprühätzung - Google Patents

Verfahren und anordnung zur kontrollierten sprühätzung

Info

Publication number
DE69227920T3
DE69227920T3 DE69227920T DE69227920T DE69227920T3 DE 69227920 T3 DE69227920 T3 DE 69227920T3 DE 69227920 T DE69227920 T DE 69227920T DE 69227920 T DE69227920 T DE 69227920T DE 69227920 T3 DE69227920 T3 DE 69227920T3
Authority
DE
Germany
Prior art keywords
arrangement
controlled spraying
spraying
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69227920T
Other languages
English (en)
Other versions
DE69227920T2 (de
DE69227920D1 (de
Inventor
Karl F G Ketelhohn
Donald F Ball
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech USA LLC
Original Assignee
Atotech USA LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25146033&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69227920(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Atotech USA LLC filed Critical Atotech USA LLC
Application granted granted Critical
Publication of DE69227920D1 publication Critical patent/DE69227920D1/de
Publication of DE69227920T2 publication Critical patent/DE69227920T2/de
Publication of DE69227920T3 publication Critical patent/DE69227920T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/068—Apparatus for etching printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
DE69227920T 1991-11-07 1992-10-30 Verfahren und anordnung zur kontrollierten sprühätzung Expired - Fee Related DE69227920T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/788,929 US5228949A (en) 1991-11-07 1991-11-07 Method and apparatus for controlled spray etching
PCT/US1992/009313 WO1993009563A1 (en) 1991-11-07 1992-10-30 Method and apparatus for controlled spray etching

Publications (3)

Publication Number Publication Date
DE69227920D1 DE69227920D1 (de) 1999-01-28
DE69227920T2 DE69227920T2 (de) 1999-05-12
DE69227920T3 true DE69227920T3 (de) 2002-10-31

Family

ID=25146033

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69227920T Expired - Fee Related DE69227920T3 (de) 1991-11-07 1992-10-30 Verfahren und anordnung zur kontrollierten sprühätzung

Country Status (7)

Country Link
US (2) US5228949A (de)
EP (1) EP0611483B2 (de)
JP (1) JP3124549B2 (de)
KR (1) KR100251034B1 (de)
CA (1) CA2123115A1 (de)
DE (1) DE69227920T3 (de)
WO (1) WO1993009563A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228949A (en) * 1991-11-07 1993-07-20 Chemcut Corporation Method and apparatus for controlled spray etching
US5387313A (en) * 1992-11-09 1995-02-07 Bmc Industries, Inc. Etchant control system
JPH07231155A (ja) 1994-02-16 1995-08-29 Fujitsu Ltd プリント配線板のエッチング装置及びエッチング方法
US5536388A (en) * 1995-06-02 1996-07-16 International Business Machines Corporation Vertical electroetch tool nozzle and method
US6187214B1 (en) 1996-05-13 2001-02-13 Universidad De Seville Method and device for production of components for microfabrication
TW579664B (en) * 2000-01-11 2004-03-11 Matsushita Electric Ind Co Ltd Apparatus and method for manufacturing printed circuit board
US6429385B1 (en) * 2000-08-08 2002-08-06 Micron Technology, Inc. Non-continuous conductive layer for laminated substrates
DE10154885A1 (de) * 2001-11-05 2003-05-15 Schmid Gmbh & Co Geb Verfahren zur Behandlung von Gegenständen mittels einer Flüssigkeit
KR100443373B1 (ko) * 2001-12-28 2004-08-09 삼성전기주식회사 커버를 구비한 인쇄회로기판 분사용 노즐
US8402889B2 (en) * 2004-02-03 2013-03-26 Spellbinders Paper Arts Company, Llc Apertured media embellishing template and system and method using same
US7884028B2 (en) * 2007-04-10 2011-02-08 United Microelectronics Corp. Method of removing material layer and remnant metal
US8557328B2 (en) * 2009-10-02 2013-10-15 Ppg Industries Ohio, Inc. Non-orthogonal coater geometry for improved coatings on a substrate
CN102453915B (zh) * 2010-10-27 2014-03-12 富葵精密组件(深圳)有限公司 蚀刻装置及使用该蚀刻装置蚀刻基板的方法
JP4975169B1 (ja) * 2011-02-10 2012-07-11 株式会社Ｎｓｃ ガラス基板の製造方法及びその装置
US8951802B2 (en) * 2011-09-19 2015-02-10 The Singleton Corporation Corrosion testing using an automated oscillating solution spray manifold
JP5383769B2 (ja) * 2011-10-13 2014-01-08 株式会社Ｎｓｃ 枚葉式化学研磨装置
JP5334216B2 (ja) * 2011-10-28 2013-11-06 株式会社Ｎｓｃ ガラス基板の製造方法
JP5317304B2 (ja) * 2012-01-31 2013-10-16 株式会社Ｎｓｃ 化学研磨装置
KR101386677B1 (ko) * 2012-10-30 2014-04-29 삼성전기주식회사 미세회로 제조방법
CN103832965B (zh) 2012-11-23 2017-02-08 北京北方微电子基地设备工艺研究中心有限责任公司 基片刻蚀方法
JP6180232B2 (ja) * 2013-08-22 2017-08-16 株式会社Ｊｃｕ エッチング装置用スプレー配管ユニット
CN104091775B (zh) * 2014-07-22 2017-02-15 深圳市华星光电技术有限公司 湿法刻蚀装置及其刻蚀方法
DE102017212887A1 (de) * 2017-07-26 2019-01-31 Gebr. Schmid Gmbh Verfahren, Vorrichtung und Anlage zur Leiterplattenherstellung

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756898A (en) * 1969-07-14 1973-09-04 Buckbee Mears Co Resistant system suitable for controlling etching without the aid of an etchant
US3808067A (en) * 1972-11-24 1974-04-30 Western Electric Co Method of controlling an etching process
JPS527340A (en) * 1975-07-08 1977-01-20 Tokyo Shibaura Electric Co Etching method
CH597363A5 (en) * 1976-02-10 1978-03-31 Engeler Walter Ag Etching machine, esp. for offset printing plates prodn.
US4126510A (en) * 1977-10-06 1978-11-21 Rca Corporation Etching a succession of articles from a strip of sheet metal
JPS55125276A (en) * 1979-03-20 1980-09-26 Matsushita Electric Ind Co Ltd Controlling unit for etching
IT1209218B (it) * 1980-05-09 1989-07-16 Sits Soc It Telecom Siemens Piastra a circuito stampato adoppia faccia.
US4397708A (en) * 1980-09-25 1983-08-09 Koltron Corporation Etching and etchant removal apparatus
JPS5976879A (ja) * 1982-10-26 1984-05-02 Hitachi Chem Co Ltd エツチングマシン
JPS5976878A (ja) * 1982-10-26 1984-05-02 Hitachi Chem Co Ltd エツチングマシン
DE3345125A1 (de) * 1983-12-14 1985-06-27 Hans 7033 Herrenberg Höllmüller Vorrichtung zur behandlung von gegenstaenden mittels einer fluessigkeit
DE3345124A1 (de) * 1983-12-14 1985-06-27 Hans 7033 Herrenberg Höllmüller Vorrichtung zur behandlung von gegenstaenden mit einer behandlungsfluessigkeit
DE3345206A1 (de) * 1983-12-14 1985-06-27 Hans 7033 Herrenberg Höllmüller Vorrichtung zur behandlung von gegenstaenden mittels einer fluessigkeit
DE3539874A1 (de) * 1985-11-11 1987-05-14 Hoellmueller Maschbau H Anlage zum aetzen von zumindest teilweise aus metall, vorzugsweise kupfer, bestehendem aetzgut
DE3539886A1 (de) * 1985-11-11 1987-05-14 Hoellmueller Maschbau H Verfahren und vorrichtung zum aetzen eines zumindest teilweise aus metall, vorzugsweise kupfer, bestehenden aetzguts
JPS62202087A (ja) * 1986-02-28 1987-09-05 Matsushita Electric Ind Co Ltd エツチング方法
JPH01132780A (ja) * 1987-11-18 1989-05-25 Dainippon Screen Mfg Co Ltd 基板の表面処理方法及び装置
JPH01205084A (ja) * 1988-02-12 1989-08-17 Toppan Printing Co Ltd 腐蝕方法及び腐蝕装置
DE3820591A1 (de) * 1988-06-16 1989-12-21 Texas Instruments Deutschland Vorrichtung zum nassaetzen von duennen filmen
EP0354266B1 (de) * 1988-08-12 1993-10-20 International Business Machines Corporation Verfahren und Vorrichtung zum Ätzen eines zumindest Teilweise aus Metall bestehenden Ätzguts
JPH0290600A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd プリント基板表面処理装置
JPH02153081A (ja) * 1988-12-05 1990-06-12 Fuji Plant Kogyo Kk エッチング方法および装置
US4985111A (en) * 1990-03-02 1991-01-15 Chemcut Corporation Process and apparatus for intermittent fluid application
US5228949A (en) * 1991-11-07 1993-07-20 Chemcut Corporation Method and apparatus for controlled spray etching

Also Published As

Publication number Publication date
EP0611483A1 (de) 1994-08-24
EP0611483B1 (de) 1998-12-16
JP3124549B2 (ja) 2001-01-15
EP0611483A4 (de) 1995-05-03
CA2123115A1 (en) 1993-05-13
WO1993009563A1 (en) 1993-05-13
KR100251034B1 (ko) 2000-04-15
JPH07500877A (ja) 1995-01-26
US5290384A (en) 1994-03-01
US5228949A (en) 1993-07-20
EP0611483B2 (de) 2002-06-19
DE69227920T2 (de) 1999-05-12
DE69227920D1 (de) 1999-01-28

Similar Documents

Publication Publication Date Title
DE69227920T2 (de) Verfahren und anordnung zur kontrollierten sprühätzung
DE69323015D1 (de) Verfahren und Anordnung zur Reprogrammierung
DE69328640D1 (de) Verfahren und Einrichtung zur Mustererkennung
DE69313597D1 (de) Verfahren und Vorrichtung zur Megaschallreinigung
DE69326839D1 (de) Vorrichtung und verfahren zur cursorbewegungssteuerung
DE59302428D1 (de) Verfahren und vorrichtung zur emissionsarmen spritzapplikation
DE69130142D1 (de) Verfahren und Gerät zur Herstellungsplanung
DE69213311D1 (de) Verfahren und Vorrichtung zur Versorgung mit Gas
DE59207521D1 (de) Verfahren und vorrichtung zur schaumerzeugung
DE69720306D1 (de) Verfahren und Vorrichtung zur Verfolgung einer relativen Bewegung
DE69427826T2 (de) Verfahren und system zur reinigung von bohrlöchern
DE69330016D1 (de) Verfahren und Gerät zur Entprellen von Signalen
DE69329354T2 (de) Verfahren und Gerät zur Mustererkennung
DE69416719T2 (de) Verfahren zur Programmierung eines Aufzeichnungsgeräts und Programmiergerät
DE69231051D1 (de) Verfahren und Anordnung zur vorteilierten Division
DE69318209T2 (de) Verfahren und Anordnung zur Sprachsynthese
DE69229650D1 (de) Verfahren und Anordnung zur Datenausgabe
DE69228160T2 (de) Vorrichtung und Verfahren zum Beschichten
DE69425166D1 (de) Verfahren und Gerät zur Mustererkennung
DE69429026D1 (de) Verfahren und Anordnung zur Ausgabesteuerung
DE69317968D1 (de) Verfahren und Einrichtung zur Störungsunterdrückung
DE69311605D1 (de) Verfahren und Vorrichtung zur richtungsabhängigen Interpolation
DE69322216D1 (de) Verfahren und Gerät zur graphischen Mustererzeugung
DE69304804D1 (de) Verfahren und Vorrichtung zur Trockenbeschichtung
DE69202236D1 (de) Verfahren und Anordnung zur Frequenzumsetzung.

Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee