DE69222370D1 - Behälter für plattenförmiges Bauteil - Google Patents
Behälter für plattenförmiges BauteilInfo
- Publication number
- DE69222370D1 DE69222370D1 DE69222370T DE69222370T DE69222370D1 DE 69222370 D1 DE69222370 D1 DE 69222370D1 DE 69222370 T DE69222370 T DE 69222370T DE 69222370 T DE69222370 T DE 69222370T DE 69222370 D1 DE69222370 D1 DE 69222370D1
- Authority
- DE
- Germany
- Prior art keywords
- container
- plate
- shaped component
- shaped
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
- B65D55/12—Devices or means with relatively-moving parts co-operating with abutments on bottle or jar
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67353—Closed carriers specially adapted for a single substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Library & Information Science (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19735491 | 1991-07-12 | ||
JP16004992A JP3089590B2 (ja) | 1991-07-12 | 1992-05-28 | 板状物収納容器およびその蓋開口装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69222370D1 true DE69222370D1 (de) | 1997-10-30 |
DE69222370T2 DE69222370T2 (de) | 1998-02-05 |
Family
ID=26486655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69222370T Expired - Lifetime DE69222370T2 (de) | 1991-07-12 | 1992-07-10 | Behälter für plattenförmiges Bauteil |
Country Status (5)
Country | Link |
---|---|
US (1) | US5314068A (de) |
EP (1) | EP0522865B1 (de) |
JP (1) | JP3089590B2 (de) |
DE (1) | DE69222370T2 (de) |
SG (1) | SG47120A1 (de) |
Families Citing this family (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0758192A (ja) * | 1993-08-12 | 1995-03-03 | Nikon Corp | 基板収納ケース |
TW353854B (en) * | 1994-03-14 | 1999-03-01 | Minnesota Mining & Mfg | Component tray with removable insert |
US5481438A (en) * | 1994-09-06 | 1996-01-02 | Shinon Denkisangyo Kabushiki Kaisha | Tray for semiconductor devices |
TW285721B (de) * | 1994-12-27 | 1996-09-11 | Siemens Ag | |
US5727685A (en) * | 1995-10-19 | 1998-03-17 | Svg Lithography Systems, Inc. | Reticle container with corner holding |
US5938860A (en) | 1997-08-28 | 1999-08-17 | Micron Technology, Inc. | Reticle cleaning without damaging pellicle |
DE19745365A1 (de) * | 1997-10-14 | 1999-01-21 | Siemens Ag | Halteeinrichtung für integrierte Schaltungen |
JP3265252B2 (ja) | 1998-01-13 | 2002-03-11 | 山形日本電気株式会社 | 半導体収納治具、ハンドリング方法及び生産システム |
US6341695B1 (en) | 1998-05-07 | 2002-01-29 | Texas Instruments Incorporated | Containment device for retaining semiconductor wafers |
US6216873B1 (en) * | 1999-03-19 | 2001-04-17 | Asyst Technologies, Inc. | SMIF container including a reticle support structure |
US6216421B1 (en) * | 1999-07-01 | 2001-04-17 | H-Square Corporation | Device for seating and unseating a lid from a carrying cassette |
US6338409B1 (en) * | 2000-04-13 | 2002-01-15 | International Business Machines Corporation | Reticle SMIF pod in situ orientation |
US6646720B2 (en) * | 2001-09-21 | 2003-11-11 | Intel Corporation | Euv reticle carrier with removable pellicle |
US7304720B2 (en) * | 2002-02-22 | 2007-12-04 | Asml Holding N.V. | System for using a two part cover for protecting a reticle |
TWI286674B (en) * | 2002-12-27 | 2007-09-11 | Asml Netherlands Bv | Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a container |
TWI224719B (en) * | 2003-05-28 | 2004-12-01 | Gudeng Prec Ind Co Ltd | Reinforced structure device of mask frame |
US6882408B2 (en) * | 2003-06-25 | 2005-04-19 | Powerchip Semiconductor Corp. | Reticle transferring support and transferring method thereof |
JP4601932B2 (ja) * | 2003-09-16 | 2010-12-22 | 大日本印刷株式会社 | 基板収納ケース |
JP2005123292A (ja) * | 2003-10-15 | 2005-05-12 | Canon Inc | 収納装置、当該収納装置を用いた露光方法 |
EP1531363A1 (de) * | 2003-10-27 | 2005-05-18 | ASML Netherlands B.V. | Retikelhalter |
TWI288305B (en) | 2003-10-27 | 2007-10-11 | Asml Netherlands Bv | Assembly of a reticle holder and a reticle |
US7236233B2 (en) | 2003-10-27 | 2007-06-26 | Asml Netherlands B.V. | Assembly of a reticle holder and a reticle |
US20050133158A1 (en) * | 2003-12-19 | 2005-06-23 | Applied Materials, Inc. | Mask handler apparatus |
WO2006009225A1 (ja) * | 2004-07-23 | 2006-01-26 | Asahi Glass Company, Limited | 板状体梱包箱、板状体搬送方法及び板状体積載・取出し方法 |
JP2006103795A (ja) * | 2004-09-10 | 2006-04-20 | Nippon Valqua Ind Ltd | ガラス基板収納ケース、ガラス基板入替装置、ガラス基板管理装置、ガラス基板流通方法、シール部材及びこのシール部材を用いたシール構造 |
JP4581681B2 (ja) * | 2004-12-27 | 2010-11-17 | 株式会社ニコン | レチクル保護装置および露光装置 |
US7607543B2 (en) * | 2005-02-27 | 2009-10-27 | Entegris, Inc. | Reticle pod with isolation system |
US20060201848A1 (en) * | 2005-03-14 | 2006-09-14 | Ting-Yu Lin | Method for reducing mask precipitation defects |
JP4644035B2 (ja) * | 2005-05-25 | 2011-03-02 | ミライアル株式会社 | 枚葉収納容器 |
WO2007008555A2 (en) | 2005-07-08 | 2007-01-18 | Asyst Technologies, Inc. | Workpiece support structures and apparatus for accessing same |
EP1928764B1 (de) * | 2005-09-27 | 2011-11-02 | Entegris, Inc. | Retikelhalter |
JP4789566B2 (ja) * | 2005-09-30 | 2011-10-12 | ミライアル株式会社 | 薄板保持容器及び薄板保持容器用処理装置 |
JP4903429B2 (ja) * | 2005-12-05 | 2012-03-28 | ミライアル株式会社 | 載置トレイ及び薄板保持容器 |
JP2007153395A (ja) * | 2005-12-05 | 2007-06-21 | Asahi Glass Co Ltd | 大型板状体梱包箱 |
CN101326623B (zh) * | 2005-12-06 | 2011-04-20 | 富士通微电子株式会社 | 半导体晶片的容置盒以及半导体晶片的容置方法 |
JP4677335B2 (ja) * | 2005-12-07 | 2011-04-27 | 株式会社レクザム | 外観検査装置 |
FR2896912B1 (fr) * | 2005-12-09 | 2008-11-28 | Alcatel Sa | Enceinte etanche pour le transport et le stockage de substrats semi-conducteurs |
JP5043475B2 (ja) * | 2007-03-05 | 2012-10-10 | ミライアル株式会社 | 半導体ウエハ収納容器 |
TWM331743U (en) * | 2007-08-10 | 2008-05-01 | Gudeng Prec Industral Co Ltd | Photomask pod, photomask transport pod and the supporter thereof |
KR101699983B1 (ko) * | 2007-11-15 | 2017-01-26 | 가부시키가이샤 니콘 | 마스크 케이스, 반송 장치, 노광 장치, 마스크 반송 방법 및 디바이스 제조 방법 |
JP2009229639A (ja) * | 2008-03-21 | 2009-10-08 | E-Sun Precision Industrial Co Ltd | フォトマスクケース |
JP2009229638A (ja) * | 2008-03-21 | 2009-10-08 | E-Sun Precision Industrial Co Ltd | 半導体部材移送用移載容器 |
JP2011108698A (ja) * | 2009-11-13 | 2011-06-02 | Toyota Motor Corp | ウエハキャリア |
IT1403358B1 (it) * | 2011-01-18 | 2013-10-17 | 2Bg S R L | Dispositivo di laminazione per moduli fotovoltaici |
US8888086B2 (en) * | 2011-05-11 | 2014-11-18 | Sematech, Inc. | Apparatus with surface protector to inhibit contamination |
TWI501910B (zh) * | 2011-11-17 | 2015-10-01 | Gudeng Prec Ind Co Ltd | 具有排水結構之極紫外光光罩儲存傳送盒 |
US9164399B2 (en) * | 2012-01-10 | 2015-10-20 | Hermes-Microvision, Inc. | Reticle operation system |
US8777007B2 (en) * | 2012-04-13 | 2014-07-15 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Packaging box for liquid crystal glass |
EP2909110B1 (de) * | 2012-10-19 | 2017-08-30 | Entegris, Inc. | Maskenhalter mit system zur ausrichtung der abdeckung mit der grundplatte |
US8939289B2 (en) * | 2012-12-14 | 2015-01-27 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Packing box for liquid crystal display panel and waterproof structure thereof |
JP6020511B2 (ja) * | 2014-05-08 | 2016-11-02 | トヨタ自動車株式会社 | ウエハキャリア |
CN108107672B (zh) * | 2016-11-25 | 2021-03-02 | 上海微电子装备(集团)股份有限公司 | 一种掩模版版盒 |
US11018037B2 (en) | 2017-07-31 | 2021-05-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Optical reticle load port |
US10503082B2 (en) * | 2017-07-31 | 2019-12-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Optical reticle load port |
CN107464770B (zh) * | 2017-08-28 | 2020-10-13 | 武汉华星光电半导体显示技术有限公司 | 一种掩模板存储装置 |
TWI690771B (zh) * | 2018-01-11 | 2020-04-11 | 家登精密工業股份有限公司 | 光罩壓抵單元及應用其之極紫外光光罩容器 |
JP6952627B2 (ja) * | 2018-03-09 | 2021-10-20 | 株式会社ジェーイーエル | 基板収納容器のロック解除機構 |
WO2019203270A1 (ja) * | 2018-04-19 | 2019-10-24 | 信越ポリマー株式会社 | 基板収納容器 |
TWI656075B (zh) * | 2018-04-27 | 2019-04-11 | 友達光電股份有限公司 | 包裝緩衝結構及具有包裝緩衝結構的包裝容器 |
KR102213411B1 (ko) * | 2018-04-27 | 2021-02-08 | 스텍 코 엘티디 | 스냅-샷 케이스들을 개방하기 위한 장치 및 방법 |
US20190333797A1 (en) * | 2018-04-30 | 2019-10-31 | Stek Co., Ltd | Apparatus and method for opening snap-shot cases |
CN109292280B (zh) * | 2018-09-11 | 2021-01-26 | 京东方科技集团股份有限公司 | 用于装载薄膜的盒和装载薄膜的方法 |
TWI680086B (zh) * | 2019-02-25 | 2019-12-21 | 家登精密工業股份有限公司 | 光罩盒及其固持件 |
EP3929117A4 (de) * | 2019-02-22 | 2022-11-02 | Murata Machinery, Ltd. | Deckelöffnungs- und -schliessvorrichtung |
EP3929118A4 (de) * | 2019-02-22 | 2022-10-26 | Murata Machinery, Ltd. | Deckelöffnungs- und -schliessvorrichtung |
TWI693671B (zh) * | 2019-04-16 | 2020-05-11 | 家登精密工業股份有限公司 | 光罩盒及其夾持件 |
US20230014864A1 (en) * | 2019-12-24 | 2023-01-19 | Entegris, Inc. | Reticle pod having retention through baseplate |
WO2023129642A1 (en) * | 2021-12-29 | 2023-07-06 | Entegris, Inc. | Inner reticle pod cover and baseplate shipper |
EP4258330A1 (de) * | 2022-04-08 | 2023-10-11 | Brooks Automation (Germany) GmbH | Lagerbox, verfahren und lagervorrichtung zur lagerung eines halbleiterherstellungsartikels |
US20230365307A1 (en) * | 2022-05-13 | 2023-11-16 | FEI Corporation | Container lid |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3256975A (en) * | 1963-11-29 | 1966-06-21 | Leaming Ind Inc | Container |
US3552548A (en) * | 1968-08-05 | 1971-01-05 | Fluroware Inc | Wafer storage and shipping container |
US3615006A (en) * | 1969-06-26 | 1971-10-26 | Ibm | Storage container |
US4105121A (en) * | 1977-05-09 | 1978-08-08 | Plastofilm Industries, Inc. | Package with median supporting frame and integral decorative medial band |
US4197947A (en) * | 1979-04-19 | 1980-04-15 | Paper Manufacturers Company | Sterile package |
JPS5895812A (ja) * | 1981-12-01 | 1983-06-07 | Nippon Kogaku Kk <Nikon> | 基板の収納容器及び収納容器の装着装置 |
US4552268A (en) * | 1984-01-20 | 1985-11-12 | Federal Paper Board Co., Inc. | Light-tight carton for X-ray and other light sensitive film |
US4776462A (en) * | 1985-09-27 | 1988-10-11 | Canon Kabushiki Kaisha | Container for a sheet-like article |
JPS63178958A (ja) * | 1986-12-27 | 1988-07-23 | キヤノン株式会社 | 防塵容器 |
US4842136A (en) * | 1987-02-13 | 1989-06-27 | Canon Kabushiki Kaisha | Dust-proof container having improved construction for holding a reticle therein |
US5012926A (en) * | 1987-04-08 | 1991-05-07 | W. R. Grace & Co.-Conn. | Electrically conductive container |
US5168993A (en) * | 1991-08-26 | 1992-12-08 | Yen Yung Tsai | Optical pellicle holder |
-
1992
- 1992-05-28 JP JP16004992A patent/JP3089590B2/ja not_active Expired - Fee Related
- 1992-07-09 US US07/911,055 patent/US5314068A/en not_active Expired - Lifetime
- 1992-07-10 EP EP92306344A patent/EP0522865B1/de not_active Expired - Lifetime
- 1992-07-10 SG SG1996009152A patent/SG47120A1/en unknown
- 1992-07-10 DE DE69222370T patent/DE69222370T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69222370T2 (de) | 1998-02-05 |
EP0522865B1 (de) | 1997-09-24 |
US5314068A (en) | 1994-05-24 |
EP0522865A2 (de) | 1993-01-13 |
JPH05175321A (ja) | 1993-07-13 |
JP3089590B2 (ja) | 2000-09-18 |
EP0522865A3 (en) | 1993-06-02 |
SG47120A1 (en) | 1998-03-20 |
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