DE69216887D1 - Gerät zur optischen Messung mit Verwendung von drei Wellenlängen - Google Patents

Gerät zur optischen Messung mit Verwendung von drei Wellenlängen

Info

Publication number
DE69216887D1
DE69216887D1 DE69216887T DE69216887T DE69216887D1 DE 69216887 D1 DE69216887 D1 DE 69216887D1 DE 69216887 T DE69216887 T DE 69216887T DE 69216887 T DE69216887 T DE 69216887T DE 69216887 D1 DE69216887 D1 DE 69216887D1
Authority
DE
Germany
Prior art keywords
wavelengths
measurement device
optical measurement
optical
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69216887T
Other languages
English (en)
Other versions
DE69216887T2 (de
Inventor
Peter J Degroot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE69216887D1 publication Critical patent/DE69216887D1/de
Publication of DE69216887T2 publication Critical patent/DE69216887T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69216887T 1991-03-27 1992-03-19 Gerät zur optischen Messung mit Verwendung von drei Wellenlängen Expired - Fee Related DE69216887T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/676,144 US5153669A (en) 1991-03-27 1991-03-27 Three wavelength optical measurement apparatus and method

Publications (2)

Publication Number Publication Date
DE69216887D1 true DE69216887D1 (de) 1997-03-06
DE69216887T2 DE69216887T2 (de) 1997-08-28

Family

ID=24713402

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69216887T Expired - Fee Related DE69216887T2 (de) 1991-03-27 1992-03-19 Gerät zur optischen Messung mit Verwendung von drei Wellenlängen

Country Status (6)

Country Link
US (1) US5153669A (de)
EP (1) EP0506297B1 (de)
JP (1) JP2553276B2 (de)
KR (1) KR920018505A (de)
DE (1) DE69216887T2 (de)
IL (1) IL101158A (de)

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JP2005106699A (ja) * 2003-09-30 2005-04-21 Sumitomo Osaka Cement Co Ltd 屈折率及び厚さの測定装置ならびに測定方法
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US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
EP2108919B1 (de) 2005-01-20 2015-03-11 Zygo Corporation Interferometer zur Bestimmung von Eigenschaften einer Objektoberfläche
US7884947B2 (en) 2005-01-20 2011-02-08 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
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US7215413B2 (en) * 2005-06-24 2007-05-08 The Boeing Company Chirped synthetic wave laser radar apparatus and methods
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US7561276B2 (en) * 2006-01-13 2009-07-14 Luna Innovations Incorporated Demodulation method and apparatus for fiber optic sensors
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JP5502491B2 (ja) 2006-12-22 2014-05-28 ザイゴ コーポレーション 表面特徴の特性測定のための装置および方法
US7889355B2 (en) 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
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JP5222954B2 (ja) 2007-11-13 2013-06-26 ザイゴ コーポレーション 偏光スキャンを利用した干渉計
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CN110631484B (zh) * 2019-11-04 2021-04-06 南京师范大学 基于激光自混合光栅干涉的三维位移测量系统及测量方法

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Also Published As

Publication number Publication date
US5153669A (en) 1992-10-06
JP2553276B2 (ja) 1996-11-13
EP0506297A3 (en) 1993-05-26
EP0506297B1 (de) 1997-01-22
IL101158A0 (en) 1992-11-15
KR920018505A (ko) 1992-10-22
IL101158A (en) 1994-06-24
DE69216887T2 (de) 1997-08-28
JPH05113316A (ja) 1993-05-07
EP0506297A2 (de) 1992-09-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO., LEXINGTON, MASS., US

8339 Ceased/non-payment of the annual fee