DE3871371D1 - Optische messeinrichtung. - Google Patents
Optische messeinrichtung.Info
- Publication number
- DE3871371D1 DE3871371D1 DE8888311091T DE3871371T DE3871371D1 DE 3871371 D1 DE3871371 D1 DE 3871371D1 DE 8888311091 T DE8888311091 T DE 8888311091T DE 3871371 T DE3871371 T DE 3871371T DE 3871371 D1 DE3871371 D1 DE 3871371D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- optical measuring
- optical
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63062139A JPH0674968B2 (ja) | 1988-03-15 | 1988-03-15 | 光学式測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3871371D1 true DE3871371D1 (de) | 1992-06-25 |
Family
ID=13191459
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888311091T Expired - Fee Related DE3871371D1 (de) | 1988-03-15 | 1988-11-23 | Optische messeinrichtung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4924105A (de) |
EP (1) | EP0332781B1 (de) |
JP (1) | JPH0674968B2 (de) |
KR (1) | KR920003615B1 (de) |
CA (1) | CA1295829C (de) |
DE (1) | DE3871371D1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03118405A (ja) * | 1989-09-30 | 1991-05-21 | Anritsu Corp | レーザ厚み計 |
DE9017645U1 (de) * | 1990-03-17 | 1991-07-04 | Koenig & Bauer AG, 8700 Würzburg | Laser-Mehrfachbogenkontrolle |
US5351126A (en) * | 1991-10-31 | 1994-09-27 | Matsushita Electric Works, Ltd. | Optical measurement system for determination of an object's profile or thickness |
SE470560B (sv) * | 1993-01-11 | 1994-08-22 | Limab Laser Instrumentmek | Förfarande och anordning vid mätning av avstånd varvid ett område på ett mätföremål belyses med ljus från en laserljuskälla |
DE19931710C2 (de) | 1999-07-08 | 2001-07-26 | Bayer Bitterfeld Gmbh | Überwachungseinrichtung für die Siegelstegbreite |
JP3565178B2 (ja) * | 2001-03-23 | 2004-09-15 | オムロン株式会社 | 変位センサ |
US6650422B2 (en) * | 2001-03-26 | 2003-11-18 | Advanced Micro Devices, Inc. | Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith |
US6731380B2 (en) | 2001-06-18 | 2004-05-04 | Applied Optics Center Of Delaware, Inc. | Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films |
JP2006308378A (ja) * | 2005-04-27 | 2006-11-09 | Yokohama Rubber Co Ltd:The | 厚み測定方法及びその装置 |
KR100815151B1 (ko) | 2005-12-09 | 2008-03-19 | 한국전자통신연구원 | 역산란파 측정방법과 이를 이용한 전파식별 트랜스폰더 및 판독기의 불량품 확인장치 |
JP2009079933A (ja) * | 2007-09-25 | 2009-04-16 | Fujinon Corp | 大型サンプル測定用干渉計装置 |
WO2010119562A1 (ja) * | 2009-04-17 | 2010-10-21 | Koyama Naoyuki | レーザ測距方法及びレーザ測距装置 |
WO2010119561A1 (ja) * | 2009-04-17 | 2010-10-21 | Koyama Naoyuki | レーザ測距方法及びレーザ測距装置 |
JP2011059000A (ja) * | 2009-09-11 | 2011-03-24 | Toshiba Corp | 放射線厚さ計 |
WO2017068813A1 (ja) | 2015-10-23 | 2017-04-27 | 株式会社カツラ・オプト・システムズ | 光学素子特性測定装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3994589A (en) * | 1975-04-30 | 1976-11-30 | Canadian Patents And Development Limited | Apparatus for determining the position of a surface |
JPS5428090A (en) * | 1977-08-02 | 1979-03-02 | Takayuki Wakizaka | Lens centering machine |
DE2926025A1 (de) * | 1979-06-28 | 1981-01-08 | Basf Ag | Neuer brauner kuepenfarbstoff und verfahren zu seiner herstellung |
US4806776A (en) * | 1980-03-10 | 1989-02-21 | Kley Victor B | Electrical illumination and detecting apparatus |
US4375921A (en) * | 1980-03-13 | 1983-03-08 | Selective Electronic Co. Ab | Dimension measuring apparatus |
US4298286A (en) * | 1980-06-02 | 1981-11-03 | The Carl Maxey Company | Measuring apparatus |
JPS6051043B2 (ja) * | 1980-06-30 | 1985-11-12 | オムロン株式会社 | 光電スイッチ |
SE425126B (sv) * | 1981-08-26 | 1982-08-30 | Kockumation Ab | Forfarande for indikering av ett foremals nervaro i en metzon och anordning for genomforande av forfarandet |
JPS6117905A (ja) * | 1984-07-05 | 1986-01-25 | Canon Inc | 厚さ測定装置 |
JPS6356015A (ja) * | 1986-08-26 | 1988-03-10 | Sankusu Kk | 多光軸式光電スイツチ |
-
1988
- 1988-03-15 JP JP63062139A patent/JPH0674968B2/ja not_active Expired - Lifetime
- 1988-07-20 KR KR1019880009053A patent/KR920003615B1/ko not_active IP Right Cessation
- 1988-11-08 CA CA000582559A patent/CA1295829C/en not_active Expired - Fee Related
- 1988-11-21 US US07/273,916 patent/US4924105A/en not_active Expired - Fee Related
- 1988-11-23 EP EP88311091A patent/EP0332781B1/de not_active Expired - Lifetime
- 1988-11-23 DE DE8888311091T patent/DE3871371D1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0332781A3 (en) | 1990-08-29 |
KR890014990A (ko) | 1989-10-28 |
CA1295829C (en) | 1992-02-18 |
EP0332781B1 (de) | 1992-05-20 |
JPH01235806A (ja) | 1989-09-20 |
JPH0674968B2 (ja) | 1994-09-21 |
US4924105A (en) | 1990-05-08 |
KR920003615B1 (ko) | 1992-05-04 |
EP0332781A2 (de) | 1989-09-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |