DE69215176D1 - Solarzelle und deren Herstellungsmethode - Google Patents

Solarzelle und deren Herstellungsmethode

Info

Publication number
DE69215176D1
DE69215176D1 DE69215176T DE69215176T DE69215176D1 DE 69215176 D1 DE69215176 D1 DE 69215176D1 DE 69215176 T DE69215176 T DE 69215176T DE 69215176 T DE69215176 T DE 69215176T DE 69215176 D1 DE69215176 D1 DE 69215176D1
Authority
DE
Germany
Prior art keywords
manufacturing
solar cell
solar
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69215176T
Other languages
English (en)
Other versions
DE69215176T2 (de
Inventor
Tsutomu Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3244939A external-priority patent/JPH0563219A/ja
Priority claimed from JP3244938A external-priority patent/JPH0563218A/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69215176D1 publication Critical patent/DE69215176D1/de
Publication of DE69215176T2 publication Critical patent/DE69215176T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03921Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Photovoltaic Devices (AREA)
DE69215176T 1991-08-30 1992-08-28 Solarzelle und deren Herstellungsmethode Expired - Fee Related DE69215176T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3244939A JPH0563219A (ja) 1991-08-30 1991-08-30 太陽電池及びその製造方法
JP3244938A JPH0563218A (ja) 1991-08-30 1991-08-30 太陽電池及びその製造方法

Publications (2)

Publication Number Publication Date
DE69215176D1 true DE69215176D1 (de) 1996-12-19
DE69215176T2 DE69215176T2 (de) 1997-03-27

Family

ID=26536970

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69215176T Expired - Fee Related DE69215176T2 (de) 1991-08-30 1992-08-28 Solarzelle und deren Herstellungsmethode

Country Status (4)

Country Link
US (1) US5380371A (de)
EP (1) EP0531827B1 (de)
AU (1) AU651486B2 (de)
DE (1) DE69215176T2 (de)

Families Citing this family (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428249A (en) * 1992-07-15 1995-06-27 Canon Kabushiki Kaisha Photovoltaic device with improved collector electrode
US5660645A (en) * 1994-04-28 1997-08-26 Canon Kabushiki Kaisha Solar cell module
US7732243B2 (en) * 1995-05-15 2010-06-08 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US6459032B1 (en) 1995-05-15 2002-10-01 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US20080314433A1 (en) * 1995-05-15 2008-12-25 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
KR0172000B1 (ko) * 1995-08-11 1999-05-01 이대원 전도성 잉크를 이용한 반도체 패키지용 기판의 제조방법
US6121542A (en) * 1996-05-17 2000-09-19 Canon Kabushiki Kaisha Photovoltaic device
JPH1056190A (ja) * 1996-08-08 1998-02-24 Canon Inc 光起電力素子及びその製造方法
US20080011350A1 (en) * 1999-03-30 2008-01-17 Daniel Luch Collector grid, electrode structures and interconnect structures for photovoltaic arrays and other optoelectric devices
US8222513B2 (en) 2006-04-13 2012-07-17 Daniel Luch Collector grid, electrode structures and interconnect structures for photovoltaic arrays and methods of manufacture
US8076568B2 (en) 2006-04-13 2011-12-13 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US20090107538A1 (en) * 2007-10-29 2009-04-30 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US20090111206A1 (en) 1999-03-30 2009-04-30 Daniel Luch Collector grid, electrode structures and interrconnect structures for photovoltaic arrays and methods of manufacture
US7507903B2 (en) * 1999-03-30 2009-03-24 Daniel Luch Substrate and collector grid structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US8664030B2 (en) 1999-03-30 2014-03-04 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8138413B2 (en) * 2006-04-13 2012-03-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US6239352B1 (en) * 1999-03-30 2001-05-29 Daniel Luch Substrate and collector grid structures for electrically interconnecting photovoltaic arrays and process of manufacture of such arrays
US7635810B2 (en) * 1999-03-30 2009-12-22 Daniel Luch Substrate and collector grid structures for integrated photovoltaic arrays and process of manufacture of such arrays
US7898053B2 (en) * 2000-02-04 2011-03-01 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US7898054B2 (en) 2000-02-04 2011-03-01 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US20110067754A1 (en) * 2000-02-04 2011-03-24 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US8198696B2 (en) 2000-02-04 2012-06-12 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
JP2002190945A (ja) * 2000-10-12 2002-07-05 Canon Inc 情報処理装置及びその制御方法及び記憶媒体
EP1417042B1 (de) * 2001-03-29 2013-01-23 Schott AG Verfahren zur herstellung eines beschichteten kunststoffkörpers
JPWO2003009394A1 (ja) * 2001-07-18 2004-11-11 本田技研工業株式会社 透明電極層の成膜方法および装置
US20070251570A1 (en) * 2002-03-29 2007-11-01 Konarka Technologies, Inc. Photovoltaic cells utilizing mesh electrodes
US7163596B2 (en) * 2002-06-07 2007-01-16 E. I. Du Pont Nemours And Company Fibers and ribbons for use in the manufacture of solar cells
US7282106B2 (en) * 2003-05-02 2007-10-16 E. I. Du Pont De Nemours And Company Fibers and ribbons for use in the manufacture of solar cells
JP4565650B2 (ja) * 2003-05-22 2010-10-20 株式会社Neomaxマテリアル 電極線材およびその製造方法並びに前記電極線材によって形成された接続用リード線を備えた太陽電池
US20070224464A1 (en) * 2005-03-21 2007-09-27 Srini Balasubramanian Dye-sensitized photovoltaic cells
JP2009505426A (ja) * 2005-08-15 2009-02-05 コナルカ テクノロジーズ インコーポレイテッド 外部回路への相互接続を有する光起電力電池
US20070221268A1 (en) * 2006-03-21 2007-09-27 Hasch Bruce M Encapsulants for electronic components
US9236512B2 (en) 2006-04-13 2016-01-12 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8822810B2 (en) 2006-04-13 2014-09-02 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US9006563B2 (en) 2006-04-13 2015-04-14 Solannex, Inc. Collector grid and interconnect structures for photovoltaic arrays and modules
US9865758B2 (en) 2006-04-13 2018-01-09 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8729385B2 (en) 2006-04-13 2014-05-20 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
US8884155B2 (en) 2006-04-13 2014-11-11 Daniel Luch Collector grid and interconnect structures for photovoltaic arrays and modules
CN100576578C (zh) * 2006-04-20 2009-12-30 无锡尚德太阳能电力有限公司 制备太阳电池电极的方法及其电化学沉积装置
JP2008085227A (ja) * 2006-09-28 2008-04-10 Sanyo Electric Co Ltd 太陽電池モジュール
US20080128019A1 (en) * 2006-12-01 2008-06-05 Applied Materials, Inc. Method of metallizing a solar cell substrate
WO2008122027A2 (en) * 2007-04-02 2008-10-09 Konarka Technologies, Inc. Novel electrode
KR20090007063A (ko) * 2007-07-13 2009-01-16 삼성에스디아이 주식회사 태양전지 및 이의 제조방법
WO2009067475A1 (en) * 2007-11-19 2009-05-28 Applied Materials, Inc. Crystalline solar cell metallization methods
DE102008030880A1 (de) * 2007-12-11 2009-06-18 Institut Für Solarenergieforschung Gmbh Rückkontaktsolarzelle mit großflächigen Rückseiten-Emitterbereichen und Herstellungsverfahren hierfür
US20100000602A1 (en) * 2007-12-11 2010-01-07 Evergreen Solar, Inc. Photovoltaic Cell with Efficient Finger and Tab Layout
US20090159114A1 (en) * 2007-12-11 2009-06-25 Evergreen Solar, Inc. Photovoltaic Panel and Cell with Fine Fingers and Method of Manufacture of the Same
US20090301560A1 (en) * 2008-06-05 2009-12-10 Sanyo Electric Co., Ltd. Photovoltaic element, photovoltaic module and method of manufacturing photovoltaic element
KR100993511B1 (ko) 2008-11-19 2010-11-12 엘지전자 주식회사 태양 전지 및 그 제조 방법
US8742531B2 (en) * 2008-12-08 2014-06-03 Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University Electrical devices including dendritic metal electrodes
KR20100066817A (ko) * 2008-12-10 2010-06-18 에스에스씨피 주식회사 태양 전지용 전극의 제조방법, 이를 이용하여 제조된 태양 전지용 기판 및 태양 전지
US20100258171A1 (en) * 2009-04-09 2010-10-14 Yung-Szu Su Solar photovoltaic device
US20100264035A1 (en) * 2009-04-15 2010-10-21 Solopower, Inc. Reel-to-reel plating of conductive grids for flexible thin film solar cells
TWI392868B (zh) * 2009-06-11 2013-04-11 Atomic Energy Council 太陽電池模組端子強度測試機台
JP5384224B2 (ja) * 2009-06-29 2014-01-08 三洋電機株式会社 太陽電池
US20110023952A1 (en) * 2009-07-30 2011-02-03 Evergreen Solar, Inc. Photovoltaic cell with semiconductor fingers
JP5224470B2 (ja) 2009-07-31 2013-07-03 国立大学法人東北大学 光電変換部材
US20110139214A1 (en) 2009-12-16 2011-06-16 Nagendra Srinivas Cherukupalli Systems, Circuits, and Methods For a Back Sheet of an Adaptive Solar Power System
TW201123480A (en) * 2009-12-29 2011-07-01 Auria Solar Co Ltd Solar cell structure and manufacturing method thereof
US20110214718A1 (en) * 2010-03-02 2011-09-08 E.I. Du Pont De Nemours And Company Manufacturing of electrode
KR101060272B1 (ko) * 2010-04-22 2011-08-29 한국철강 주식회사 광기전력 장치와 이의 제조 방법
US20110277825A1 (en) * 2010-05-14 2011-11-17 Sierra Solar Power, Inc. Solar cell with metal grid fabricated by electroplating
JP2013035699A (ja) * 2011-08-04 2013-02-21 Sony Corp グラフェン構造体、グラフェン構造体の製造方法、光電変換素子、太陽電池及び撮像装置
US9246026B2 (en) 2011-11-22 2016-01-26 Kaneka Corporation Solar cell and method of manufacture thereof, and solar cell module
US20130164882A1 (en) * 2011-12-23 2013-06-27 International Business Machines Corporation Transparent conducting layer for solar cell applications
WO2013140553A1 (ja) * 2012-03-21 2013-09-26 三洋電機株式会社 太陽電池モジュール
KR101956734B1 (ko) * 2012-09-19 2019-03-11 엘지전자 주식회사 태양 전지 및 그의 제조 방법
US9812592B2 (en) 2012-12-21 2017-11-07 Sunpower Corporation Metal-foil-assisted fabrication of thin-silicon solar cell
US9437756B2 (en) 2013-09-27 2016-09-06 Sunpower Corporation Metallization of solar cells using metal foils
US9178104B2 (en) 2013-12-20 2015-11-03 Sunpower Corporation Single-step metal bond and contact formation for solar cells
US9653638B2 (en) 2013-12-20 2017-05-16 Sunpower Corporation Contacts for solar cells formed by directing a laser beam with a particular shape on a metal foil over a dielectric region
US10193007B2 (en) 2014-03-26 2019-01-29 Kaneka Corporation Solar cell module and method for manufacturing same
US9947812B2 (en) 2014-03-28 2018-04-17 Sunpower Corporation Metallization of solar cells
US9231129B2 (en) 2014-03-28 2016-01-05 Sunpower Corporation Foil-based metallization of solar cells
US9257575B1 (en) 2014-09-18 2016-02-09 Sunpower Corporation Foil trim approaches for foil-based metallization of solar cells
US10069019B2 (en) * 2014-10-31 2018-09-04 Byd Company Limited Solar cell unit, solar cell array, solar cell module and manufacturing method thereof
US9620661B2 (en) 2014-12-19 2017-04-11 Sunpower Corporation Laser beam shaping for foil-based metallization of solar cells
US20160380127A1 (en) 2015-06-26 2016-12-29 Richard Hamilton SEWELL Leave-In Etch Mask for Foil-Based Metallization of Solar Cells
US9620655B1 (en) 2015-10-29 2017-04-11 Sunpower Corporation Laser foil trim approaches for foil-based metallization for solar cells
US11424373B2 (en) 2016-04-01 2022-08-23 Sunpower Corporation Thermocompression bonding approaches for foil-based metallization of non-metal surfaces of solar cells
US10290763B2 (en) 2016-05-13 2019-05-14 Sunpower Corporation Roll-to-roll metallization of solar cells
US9882071B2 (en) 2016-07-01 2018-01-30 Sunpower Corporation Laser techniques for foil-based metallization of solar cells
US10115855B2 (en) 2016-09-30 2018-10-30 Sunpower Corporation Conductive foil based metallization of solar cells
US11908958B2 (en) 2016-12-30 2024-02-20 Maxeon Solar Pte. Ltd. Metallization structures for solar cells
US11362234B2 (en) 2018-04-06 2022-06-14 Sunpower Corporation Local patterning and metallization of semiconductor structures using a laser beam
WO2019195803A1 (en) 2018-04-06 2019-10-10 Sunpower Corporation Laser assisted metallization process for solar cell fabrication
US11664472B2 (en) 2018-04-06 2023-05-30 Maxeon Solar Pte. Ltd. Laser assisted metallization process for solar cell stringing
WO2019195804A1 (en) 2018-04-06 2019-10-10 Sunpower Corporation Laser assisted metallization process for solar cell circuit formation
AU2019249263A1 (en) 2018-04-06 2020-11-05 Maxeon Solar Pte. Ltd. Local metallization for semiconductor substrates using a laser beam
CN109585581A (zh) * 2018-12-03 2019-04-05 江苏中宇光伏科技有限公司 一种太阳能电池片用电极的制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1558764A (en) * 1976-11-15 1980-01-09 Ferranti Ltd Formation of contacts for semiconductor devices
US4586988A (en) * 1983-08-19 1986-05-06 Energy Conversion Devices, Inc. Method of forming an electrically conductive member
JPS60234379A (ja) * 1984-05-07 1985-11-21 Agency Of Ind Science & Technol 太陽電池の電極形成方法
US4590327A (en) * 1984-09-24 1986-05-20 Energy Conversion Devices, Inc. Photovoltaic device and method
US4633033A (en) * 1985-02-08 1986-12-30 Energy Conversion Devices, Inc. Photovoltaic device and method
US4633034A (en) * 1985-02-08 1986-12-30 Energy Conversion Devices, Inc. Photovoltaic device and method
JPS61268072A (ja) * 1985-05-23 1986-11-27 Mitsubishi Electric Corp 薄膜光電変換素子
JPS62119979A (ja) * 1985-11-20 1987-06-01 Teijin Ltd 薄膜太陽電池及びその製造方法
US4774193A (en) * 1986-03-11 1988-09-27 Siemens Aktiengesellschaft Method for avoiding shorts in the manufacture of layered electrical components
JPS6457762A (en) * 1987-08-28 1989-03-06 Kyocera Corp Photoelectric converting device
JPH02268469A (ja) * 1989-03-30 1990-11-02 Atlantic Richfield Co <Arco> 薄膜半導体デバイスとそれを製造する方法
US5103268A (en) * 1989-03-30 1992-04-07 Siemens Solar Industries, L.P. Semiconductor device with interfacial electrode layer

Also Published As

Publication number Publication date
US5380371A (en) 1995-01-10
EP0531827A1 (de) 1993-03-17
AU651486B2 (en) 1994-07-21
EP0531827B1 (de) 1996-11-13
AU2138092A (en) 1993-03-04
DE69215176T2 (de) 1997-03-27

Similar Documents

Publication Publication Date Title
DE69215176D1 (de) Solarzelle und deren Herstellungsmethode
KR930701838A (ko) 태양전지와 그 제조방법
DE69434943D1 (de) Solarzellenanordnung und herstellungsverfahren
DE68919399D1 (de) Dünnschichtsolarzelle und deren Herstellungsverfahren.
DE69535071D1 (de) Solarzelle und Herstellungsverfahren
DE69734183D1 (de) Sonnenzelle und Herstellungsverfahren
DE69435107D1 (de) Photovoltaischer Konzentrationsmodul und Herstellungsverfahren
DE69217287D1 (de) Photovoltische Vorrichtung mit mehreren Übergängen und Herstellungsverfahren
KR950034858A (ko) 광기전력 소자, 그의 전극 구조 및 그의 제조방법
DE69332097D1 (de) BiCDMOS-Herstellungstechnologie und deren Strukturen
DE69225373D1 (de) Sonnenzelle
DE69216042D1 (de) Solarzelle
DE69434300D1 (de) Solarzelle
DE59812443D1 (de) Solarzelle und Herstellungsverfahren
DE69636605D1 (de) Solarzelle und ihr Herstellungsverfahren
GB2278236B (en) Photovoltaic cell and method
DE69527715D1 (de) Solarzellenmodul und Herstellungsverfahren
DE69531075T2 (de) Sonnenzelle und Herstellungsverfahren
DE69637334D1 (de) Photovoltaische Zelle und Herstellungsverfahren
DE69532904D1 (de) Herstellungsverfahren von solarzellenmodulen
DE69836960D1 (de) Solarzellenmodul und herstellungsverfahren
EP0475666A3 (en) Amorphous silicon solar cell and method for manufacturing the same
DE69026301D1 (de) Supraleitende Einrichtung und deren Herstellungsverfahren
DE69307933D1 (de) Geformte absorbierende Kleidungsstück und deren Herstellungsmethode
EP0666602A3 (de) Solarzelle und Herstellungsverfahren.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee