DE69131032T2 - Verfahren zum Herstellen einer EPROM-Zelle mit geteiltem Gate und mit Polysilizium-Abstandhaltern - Google Patents

Verfahren zum Herstellen einer EPROM-Zelle mit geteiltem Gate und mit Polysilizium-Abstandhaltern

Info

Publication number
DE69131032T2
DE69131032T2 DE69131032T DE69131032T DE69131032T2 DE 69131032 T2 DE69131032 T2 DE 69131032T2 DE 69131032 T DE69131032 T DE 69131032T DE 69131032 T DE69131032 T DE 69131032T DE 69131032 T2 DE69131032 T2 DE 69131032T2
Authority
DE
Germany
Prior art keywords
manufacturing
split gate
eprom cell
polysilicon spacers
gate eprom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69131032T
Other languages
English (en)
Other versions
DE69131032D1 (de
Inventor
Martin H Manley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Semiconductor Corp
Original Assignee
National Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Semiconductor Corp filed Critical National Semiconductor Corp
Publication of DE69131032D1 publication Critical patent/DE69131032D1/de
Application granted granted Critical
Publication of DE69131032T2 publication Critical patent/DE69131032T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
    • H01L29/7881—Programmable transistors with only two possible levels of programmation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
    • H01L21/2815—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects part or whole of the electrode is a sidewall spacer or made by a similar technique, e.g. transformation under mask, plating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401—Multistep manufacturing processes
    • H01L29/4011—Multistep manufacturing processes for data storage electrodes
    • H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
DE69131032T 1990-06-28 1991-06-14 Verfahren zum Herstellen einer EPROM-Zelle mit geteiltem Gate und mit Polysilizium-Abstandhaltern Expired - Fee Related DE69131032T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US54539790A 1990-06-28 1990-06-28

Publications (2)

Publication Number Publication Date
DE69131032D1 DE69131032D1 (de) 1999-04-29
DE69131032T2 true DE69131032T2 (de) 1999-10-21

Family

ID=24176053

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69131032T Expired - Fee Related DE69131032T2 (de) 1990-06-28 1991-06-14 Verfahren zum Herstellen einer EPROM-Zelle mit geteiltem Gate und mit Polysilizium-Abstandhaltern

Country Status (4)

Country Link
EP (1) EP0463511B1 (de)
JP (1) JP3086282B2 (de)
KR (1) KR100236009B1 (de)
DE (1) DE69131032T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0151621B1 (ko) * 1994-11-05 1998-10-01 문정환 비휘발성 메모리 반도체 소자 및 이의 제조방법
US5880499A (en) * 1994-11-11 1999-03-09 Nec Corporation Memory cell of a nonvolatile semiconductor device
JP2601226B2 (ja) * 1994-11-11 1997-04-16 日本電気株式会社 不揮発性半導体記憶装置のメモリセルの形成方法
US5900657A (en) * 1997-05-19 1999-05-04 National Semiconductor Corp. MOS switch that reduces clock feed through in a switched capacitor circuit
KR100554833B1 (ko) * 1999-10-11 2006-02-22 주식회사 하이닉스반도체 비휘발성 메모리 소자 및 그의 제조방법
CN1309426A (zh) * 1999-11-12 2001-08-22 密克罗奇普技术公司 用于独立阀值电压控制的存储单元和选择栅的装置及方法
JP4488565B2 (ja) * 1999-12-03 2010-06-23 富士通株式会社 半導体記憶装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4639893A (en) * 1984-05-15 1987-01-27 Wafer Scale Integration, Inc. Self-aligned split gate EPROM
JPS61136274A (ja) * 1984-12-07 1986-06-24 Toshiba Corp 半導体装置
US4794565A (en) * 1986-09-15 1988-12-27 The Regents Of The University Of California Electrically programmable memory device employing source side injection
JPH01248670A (ja) * 1988-03-30 1989-10-04 Toshiba Corp 不揮発性半導体記憶装置ならびにその動作方法および製造方法
US5095344A (en) * 1988-06-08 1992-03-10 Eliyahou Harari Highly compact eprom and flash eeprom devices

Also Published As

Publication number Publication date
KR100236009B1 (ko) 1999-12-15
EP0463511A2 (de) 1992-01-02
JPH04233278A (ja) 1992-08-21
EP0463511A3 (en) 1993-04-07
EP0463511B1 (de) 1999-03-24
DE69131032D1 (de) 1999-04-29
JP3086282B2 (ja) 2000-09-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication of lapse of patent is to be deleted
8339 Ceased/non-payment of the annual fee