DE69115451D1 - Ionenstrahlgenerator mit elektronischer Umschaltung zwischen mehreren Kathoden - Google Patents

Ionenstrahlgenerator mit elektronischer Umschaltung zwischen mehreren Kathoden

Info

Publication number
DE69115451D1
DE69115451D1 DE69115451T DE69115451T DE69115451D1 DE 69115451 D1 DE69115451 D1 DE 69115451D1 DE 69115451 T DE69115451 T DE 69115451T DE 69115451 T DE69115451 T DE 69115451T DE 69115451 D1 DE69115451 D1 DE 69115451D1
Authority
DE
Germany
Prior art keywords
cathodes
cathode
anode
ion beam
beam generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69115451T
Other languages
English (en)
Other versions
DE69115451T2 (de
Inventor
Gustav D Magnuson
Joseph F Tooker
James R Treglio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISM Technologies Inc
Original Assignee
ISM Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISM Technologies Inc filed Critical ISM Technologies Inc
Publication of DE69115451D1 publication Critical patent/DE69115451D1/de
Application granted granted Critical
Publication of DE69115451T2 publication Critical patent/DE69115451T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Radiation-Therapy Devices (AREA)
  • Particle Accelerators (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69115451T 1990-11-14 1991-10-02 Ionenstrahlgenerator mit elektronischer Umschaltung zwischen mehreren Kathoden Expired - Fee Related DE69115451T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/612,589 US5089707A (en) 1990-11-14 1990-11-14 Ion beam generating apparatus with electronic switching between multiple cathodes

Publications (2)

Publication Number Publication Date
DE69115451D1 true DE69115451D1 (de) 1996-01-25
DE69115451T2 DE69115451T2 (de) 1996-07-04

Family

ID=24453802

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69115451T Expired - Fee Related DE69115451T2 (de) 1990-11-14 1991-10-02 Ionenstrahlgenerator mit elektronischer Umschaltung zwischen mehreren Kathoden

Country Status (6)

Country Link
US (1) US5089707A (de)
EP (1) EP0486147B1 (de)
JP (1) JP3065748B2 (de)
AT (1) ATE131659T1 (de)
DE (1) DE69115451T2 (de)
DK (1) DK0486147T3 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306408A (en) * 1992-06-29 1994-04-26 Ism Technologies, Inc. Method and apparatus for direct ARC plasma deposition of ceramic coatings
GB9503305D0 (en) * 1995-02-20 1995-04-12 Univ Nanyang Filtered cathodic arc source
KR100417112B1 (ko) * 2001-08-21 2004-02-05 (주) 브이에스아이 펄스형 금속플라즈마 이온소스 발생장치
JP2004014422A (ja) * 2002-06-11 2004-01-15 Matsushita Electric Ind Co Ltd イオン注入装置
US7365346B2 (en) * 2004-12-29 2008-04-29 Matsushita Electric Industrial Co., Ltd. Ion-implanting apparatus, ion-implanting method, and device manufactured thereby
EP2557902B1 (de) 2007-08-06 2016-11-23 Plasma Surgical Investments Limited Kathodenbaugruppe und Verfahren zur gepulsten Plasmaerzeugung
CN112423460B (zh) * 2019-08-20 2023-03-21 新奥科技发展有限公司 等离子体发生器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2682611A (en) * 1953-01-29 1954-06-29 Atomic Energy Commission Ion source
US3465192A (en) * 1966-09-21 1969-09-02 Gen Electric Triggerable arc discharge devices and trigger assemblies therefor
US3566185A (en) * 1969-03-12 1971-02-23 Atomic Energy Commission Sputter-type penning discharge for metallic ions
US3665241A (en) * 1970-07-13 1972-05-23 Stanford Research Inst Field ionizer and field emission cathode structures and methods of production
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
EP0090067B2 (de) * 1982-03-31 1991-03-20 Ibm Deutschland Gmbh Reaktor für das reaktive Ionenätzen und Ätzverfahren
US4785220A (en) * 1985-01-30 1988-11-15 Brown Ian G Multi-cathode metal vapor arc ion source
US4714860A (en) * 1985-01-30 1987-12-22 Brown Ian G Ion beam generating apparatus
FR2616587B1 (fr) * 1987-06-12 1989-11-24 Realisations Nucleaires Et Source d'ions a quatre electrodes
FR2618604B1 (fr) * 1987-07-22 1989-11-24 Realisations Nucleaires Et Source d'ions de metaux liquides a arc sous vide
FR2619247A1 (fr) * 1987-08-05 1989-02-10 Realisations Nucleaires Et Implanteur d'ions metalliques

Also Published As

Publication number Publication date
US5089707A (en) 1992-02-18
DK0486147T3 (da) 1996-01-22
JPH04315754A (ja) 1992-11-06
ATE131659T1 (de) 1995-12-15
JP3065748B2 (ja) 2000-07-17
DE69115451T2 (de) 1996-07-04
EP0486147B1 (de) 1995-12-13
EP0486147A2 (de) 1992-05-20
EP0486147A3 (en) 1992-10-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee