DK0486147T3 - Ionstrålegenerator med elektronisk omskiftning mellem en flerhed af katoder - Google Patents

Ionstrålegenerator med elektronisk omskiftning mellem en flerhed af katoder

Info

Publication number
DK0486147T3
DK0486147T3 DK91309008.0T DK91309008T DK0486147T3 DK 0486147 T3 DK0486147 T3 DK 0486147T3 DK 91309008 T DK91309008 T DK 91309008T DK 0486147 T3 DK0486147 T3 DK 0486147T3
Authority
DK
Denmark
Prior art keywords
cathodes
cathode
anode
chamber
ion beam
Prior art date
Application number
DK91309008.0T
Other languages
English (en)
Inventor
Gustav D Magnuson
Joseph F Tooker
James R Treglio
Original Assignee
Ism Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ism Technologies Inc filed Critical Ism Technologies Inc
Application granted granted Critical
Publication of DK0486147T3 publication Critical patent/DK0486147T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Radiation-Therapy Devices (AREA)
  • Particle Accelerators (AREA)
DK91309008.0T 1990-11-14 1991-10-02 Ionstrålegenerator med elektronisk omskiftning mellem en flerhed af katoder DK0486147T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/612,589 US5089707A (en) 1990-11-14 1990-11-14 Ion beam generating apparatus with electronic switching between multiple cathodes

Publications (1)

Publication Number Publication Date
DK0486147T3 true DK0486147T3 (da) 1996-01-22

Family

ID=24453802

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91309008.0T DK0486147T3 (da) 1990-11-14 1991-10-02 Ionstrålegenerator med elektronisk omskiftning mellem en flerhed af katoder

Country Status (6)

Country Link
US (1) US5089707A (da)
EP (1) EP0486147B1 (da)
JP (1) JP3065748B2 (da)
AT (1) ATE131659T1 (da)
DE (1) DE69115451T2 (da)
DK (1) DK0486147T3 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306408A (en) * 1992-06-29 1994-04-26 Ism Technologies, Inc. Method and apparatus for direct ARC plasma deposition of ceramic coatings
GB9503305D0 (en) * 1995-02-20 1995-04-12 Univ Nanyang Filtered cathodic arc source
KR100417112B1 (ko) * 2001-08-21 2004-02-05 (주) 브이에스아이 펄스형 금속플라즈마 이온소스 발생장치
JP2004014422A (ja) * 2002-06-11 2004-01-15 Matsushita Electric Ind Co Ltd イオン注入装置
US7365346B2 (en) * 2004-12-29 2008-04-29 Matsushita Electric Industrial Co., Ltd. Ion-implanting apparatus, ion-implanting method, and device manufactured thereby
ES2458515T3 (es) 2007-08-06 2014-05-05 Plasma Surgical Investments Limited Conjunto de cátodo y método de generación de plasma pulsado
CN112423460B (zh) * 2019-08-20 2023-03-21 新奥科技发展有限公司 等离子体发生器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2682611A (en) * 1953-01-29 1954-06-29 Atomic Energy Commission Ion source
US3465192A (en) * 1966-09-21 1969-09-02 Gen Electric Triggerable arc discharge devices and trigger assemblies therefor
US3566185A (en) * 1969-03-12 1971-02-23 Atomic Energy Commission Sputter-type penning discharge for metallic ions
US3665241A (en) * 1970-07-13 1972-05-23 Stanford Research Inst Field ionizer and field emission cathode structures and methods of production
US4570106A (en) * 1982-02-18 1986-02-11 Elscint, Inc. Plasma electron source for cold-cathode discharge device or the like
DE3272083D1 (en) * 1982-03-31 1986-08-28 Ibm Deutschland Reactor for reactive ion etching, and etching process
US4714860A (en) * 1985-01-30 1987-12-22 Brown Ian G Ion beam generating apparatus
US4785220A (en) * 1985-01-30 1988-11-15 Brown Ian G Multi-cathode metal vapor arc ion source
FR2616587B1 (fr) * 1987-06-12 1989-11-24 Realisations Nucleaires Et Source d'ions a quatre electrodes
FR2618604B1 (fr) * 1987-07-22 1989-11-24 Realisations Nucleaires Et Source d'ions de metaux liquides a arc sous vide
FR2619247A1 (fr) * 1987-08-05 1989-02-10 Realisations Nucleaires Et Implanteur d'ions metalliques

Also Published As

Publication number Publication date
JPH04315754A (ja) 1992-11-06
EP0486147A3 (en) 1992-10-21
ATE131659T1 (de) 1995-12-15
DE69115451D1 (de) 1996-01-25
JP3065748B2 (ja) 2000-07-17
US5089707A (en) 1992-02-18
EP0486147B1 (en) 1995-12-13
EP0486147A2 (en) 1992-05-20
DE69115451T2 (de) 1996-07-04

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