DE69112913D1 - Reinigung einer Oberfläche mittels eines kryogenen Aerosols. - Google Patents

Reinigung einer Oberfläche mittels eines kryogenen Aerosols.

Info

Publication number
DE69112913D1
DE69112913D1 DE69112913T DE69112913T DE69112913D1 DE 69112913 D1 DE69112913 D1 DE 69112913D1 DE 69112913 T DE69112913 T DE 69112913T DE 69112913 T DE69112913 T DE 69112913T DE 69112913 D1 DE69112913 D1 DE 69112913D1
Authority
DE
Germany
Prior art keywords
cleaning
cryogenic aerosol
cryogenic
aerosol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69112913T
Other languages
English (en)
Other versions
DE69112913T2 (de
Inventor
Wayne Thomas Mcdermott
Richard Carl Ockovic
Jin Jwang Wu
Douglas Winslow Cooper
Alexander Schwarz
Henry Lewis Wolfe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
International Business Machines Corp
Original Assignee
Air Products and Chemicals Inc
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc, International Business Machines Corp filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of DE69112913D1 publication Critical patent/DE69112913D1/de
Publication of DE69112913T2 publication Critical patent/DE69112913T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • B24C1/086—Descaling; Removing coating films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/003—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods using material which dissolves or changes phase after the treatment, e.g. ice, CO2
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • B24C3/322—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks for electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
DE69112913T 1990-06-05 1991-05-29 Reinigung einer Oberfläche mittels eines kryogenen Aerosols. Expired - Fee Related DE69112913T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/534,810 US5062898A (en) 1990-06-05 1990-06-05 Surface cleaning using a cryogenic aerosol

Publications (2)

Publication Number Publication Date
DE69112913D1 true DE69112913D1 (de) 1995-10-19
DE69112913T2 DE69112913T2 (de) 1996-02-08

Family

ID=24131621

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69112913T Expired - Fee Related DE69112913T2 (de) 1990-06-05 1991-05-29 Reinigung einer Oberfläche mittels eines kryogenen Aerosols.

Country Status (7)

Country Link
US (1) US5062898A (de)
EP (1) EP0461476B1 (de)
JP (1) JPH081900B2 (de)
KR (1) KR940001024B1 (de)
CA (1) CA2043445C (de)
DE (1) DE69112913T2 (de)
IE (1) IE70238B1 (de)

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IE911891A1 (en) 1991-12-18
JPH04230030A (ja) 1992-08-19
CA2043445A1 (en) 1991-12-06
KR940001024B1 (ko) 1994-02-08
JPH081900B2 (ja) 1996-01-10
US5062898A (en) 1991-11-05
EP0461476A2 (de) 1991-12-18
EP0461476A3 (en) 1992-10-21
IE70238B1 (en) 1996-11-13
EP0461476B1 (de) 1995-09-13
CA2043445C (en) 1997-01-21
DE69112913T2 (de) 1996-02-08

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