DE69106834D1 - Verfahren und Anlage zur Herstellung eines Beschichtungsfilms. - Google Patents

Verfahren und Anlage zur Herstellung eines Beschichtungsfilms.

Info

Publication number
DE69106834D1
DE69106834D1 DE69106834T DE69106834T DE69106834D1 DE 69106834 D1 DE69106834 D1 DE 69106834D1 DE 69106834 T DE69106834 T DE 69106834T DE 69106834 T DE69106834 T DE 69106834T DE 69106834 D1 DE69106834 D1 DE 69106834D1
Authority
DE
Germany
Prior art keywords
plant
producing
coating film
coating
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106834T
Other languages
English (en)
Other versions
DE69106834T2 (de
Inventor
Kazuaki Kurihara
Motonobu Kawarada
Ken-Ichi Sasaki
Akitomo Teshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE69106834D1 publication Critical patent/DE69106834D1/de
Publication of DE69106834T2 publication Critical patent/DE69106834T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/276—Diamond only using plasma jets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/278—Diamond only doping or introduction of a secondary phase in the diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Carbon And Carbon Compounds (AREA)
DE69106834T 1990-10-17 1991-10-15 Verfahren und Anlage zur Herstellung eines Beschichtungsfilms. Expired - Fee Related DE69106834T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2278229A JP2938552B2 (ja) 1990-10-17 1990-10-17 コーティング膜の製造方法およびコーティング膜の製造装置

Publications (2)

Publication Number Publication Date
DE69106834D1 true DE69106834D1 (de) 1995-03-02
DE69106834T2 DE69106834T2 (de) 1995-05-18

Family

ID=17594421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106834T Expired - Fee Related DE69106834T2 (de) 1990-10-17 1991-10-15 Verfahren und Anlage zur Herstellung eines Beschichtungsfilms.

Country Status (5)

Country Link
US (1) US5314726A (de)
EP (1) EP0481722B1 (de)
JP (1) JP2938552B2 (de)
KR (1) KR940002751B1 (de)
DE (1) DE69106834T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4112156A1 (de) * 1991-04-13 1992-10-15 Lugscheider Erich Mit hilfe eines plasmabrenners aufgebrachte beschichtung sowie plasmabrenner
US5370299A (en) * 1992-04-23 1994-12-06 Sumitomo Electric Industries, Ltd. Bonding tool having diamond head and method of manufacturing the same
US5565249A (en) * 1992-05-07 1996-10-15 Fujitsu Limited Method for producing diamond by a DC plasma jet
DE4322804A1 (de) * 1993-07-08 1995-01-12 Wacker Chemie Gmbh Verfahren zur Herstellung von hochdisperser Kieselsäure und Vorrichtung zur Durchführung des Verfahrens
GB2282390B (en) * 1993-09-23 1997-04-30 Opa Method for obtaining diamond and diamond-like films
BR9407924A (pt) * 1993-10-29 1996-11-26 Balzers Hochvakuum Corpo revestido processo para sua fabricaçao assim como emprego do mesmo
DE69416855T2 (de) * 1993-11-23 1999-08-12 Plasmoteg Engineering Center Schleifmittel zur feinen oberflächenbehandlung und verfahren zur herstellung desselben
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
JP3774904B2 (ja) * 1994-01-27 2006-05-17 住友電気工業株式会社 平坦なダイヤモンド膜の合成法とダイヤモンド自立膜及びダイヤモンド膜の研磨方法
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5759623A (en) * 1995-09-14 1998-06-02 Universite De Montreal Method for producing a high adhesion thin film of diamond on a Fe-based substrate
DE19958474A1 (de) * 1999-12-04 2001-06-21 Bosch Gmbh Robert Verfahren zur Erzeugung von Funktionsschichten mit einer Plasmastrahlquelle
DE19958473A1 (de) 1999-12-04 2001-06-07 Bosch Gmbh Robert Verfahren zur Herstellung von Kompositschichten mit einer Plasmastrahlquelle
JP4549553B2 (ja) * 2001-02-19 2010-09-22 吉田 豊信 熱プラズマを用いた成膜装置
US7444883B2 (en) * 2005-12-22 2008-11-04 Honeywell International Inc. Vibrating beam force transducer
JP4983091B2 (ja) * 2006-05-02 2012-07-25 東京エレクトロン株式会社 電解質膜の形成方法、成膜装置及び固体燃料電池
EP1980645A1 (de) * 2007-04-13 2008-10-15 Ralf Stein Verfahren zum Aufbringen einer mehrlagigen Beschichtung auf Werkstücke und/oder Werkstoffe
DE102007047629A1 (de) * 2007-04-13 2008-10-16 Stein, Ralf Verfahren zum Aufbringen einer hochfesten Beschichtung auf Werkstücke und/oder Werkstoffe
CA2658210A1 (en) * 2008-04-04 2009-10-04 Sulzer Metco Ag Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam
TR201809190T4 (tr) * 2011-06-28 2018-07-23 Mtix Ltd Çoklu kombine enerji kaynakları kullanılarak materyallerin yüzey uygulamasına yönelik yöntem ve aparat.
CN102400084B (zh) * 2011-10-19 2013-04-24 北京科技大学 一种致密钨涂层的制备方法
DE102013010126B4 (de) * 2013-06-18 2015-12-31 Häuser & Co. GmbH Plasmapulverspritzverfahren und Vorrichtung zur Beschichtung von Paneelen für Kesselwände in Verbindung mit einem Laserstrahlgerät
JP2015090916A (ja) * 2013-11-06 2015-05-11 東京エレクトロン株式会社 基板処理装置及び基板処理方法
DE102014221735A1 (de) * 2014-10-24 2016-04-28 Mahle Lnternational Gmbh Thermisches Spritzverfahren und Vorrichtung dafür
CN107447179B (zh) * 2017-07-21 2019-12-10 上海交通大学 一种复合热喷涂方法
JP7421018B1 (ja) * 2022-04-26 2024-01-23 住友化学株式会社 ダイヤモンド膜堆積基板、およびダイヤモンド膜堆積基板の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59166673A (ja) * 1983-03-11 1984-09-20 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
JP2555045B2 (ja) * 1987-01-19 1996-11-20 株式会社日立製作所 薄膜形成方法及びその装置
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
EP0286306B1 (de) * 1987-04-03 1993-10-06 Fujitsu Limited Verfahren und Vorrichtung zur Gasphasenabscheidung von Diamant
JPS6433096A (en) * 1987-04-03 1989-02-02 Fujitsu Ltd Gaseous phase synthesis for diamond
JP2628601B2 (ja) * 1988-07-12 1997-07-09 富士通株式会社 ダイアモンド被覆超硬合金および超硬合金のダイアモンド被覆方法
US4928879A (en) * 1988-12-22 1990-05-29 The Perkin-Elmer Corporation Wire and power thermal spray gun
US4981717A (en) * 1989-02-24 1991-01-01 Mcdonnell Douglas Corporation Diamond like coating and method of forming
JPH02248397A (ja) * 1989-03-20 1990-10-04 Onoda Cement Co Ltd ダイヤモンドの製造装置および製造方法
US5047612A (en) * 1990-02-05 1991-09-10 General Electric Company Apparatus and method for controlling powder deposition in a plasma spray process

Also Published As

Publication number Publication date
KR920008212A (ko) 1992-05-27
DE69106834T2 (de) 1995-05-18
JP2938552B2 (ja) 1999-08-23
JPH04157177A (ja) 1992-05-29
EP0481722A1 (de) 1992-04-22
KR940002751B1 (ko) 1994-04-02
US5314726A (en) 1994-05-24
EP0481722B1 (de) 1995-01-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee