DE69118313D1 - Verfahren und Anlage zur Bildung eines dünnen Films - Google Patents

Verfahren und Anlage zur Bildung eines dünnen Films

Info

Publication number
DE69118313D1
DE69118313D1 DE69118313T DE69118313T DE69118313D1 DE 69118313 D1 DE69118313 D1 DE 69118313D1 DE 69118313 T DE69118313 T DE 69118313T DE 69118313 T DE69118313 T DE 69118313T DE 69118313 D1 DE69118313 D1 DE 69118313D1
Authority
DE
Germany
Prior art keywords
plant
forming
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69118313T
Other languages
English (en)
Other versions
DE69118313T2 (de
Inventor
Hirokazu Nakaue
Hideo Kurokawa
Tsutomu Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69118313D1 publication Critical patent/DE69118313D1/de
Application granted granted Critical
Publication of DE69118313T2 publication Critical patent/DE69118313T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
DE69118313T 1990-11-01 1991-11-02 Verfahren und Anlage zur Bildung eines dünnen Films Expired - Fee Related DE69118313T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29796190 1990-11-01
JP3077524A JPH07122132B2 (ja) 1990-11-01 1991-04-10 薄膜形成方法および薄膜形成装置

Publications (2)

Publication Number Publication Date
DE69118313D1 true DE69118313D1 (de) 1996-05-02
DE69118313T2 DE69118313T2 (de) 1996-11-14

Family

ID=26418604

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69118313T Expired - Fee Related DE69118313T2 (de) 1990-11-01 1991-11-02 Verfahren und Anlage zur Bildung eines dünnen Films

Country Status (5)

Country Link
US (1) US5320877A (de)
EP (1) EP0483880B1 (de)
JP (1) JPH07122132B2 (de)
KR (1) KR950006278B1 (de)
DE (1) DE69118313T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766489A (en) * 1993-09-13 1998-06-16 Pts Gesellschaft Fuer Physikalisch-Technische Studien Jena Mbh Process and arrangement for continously carrying out photoreactions in a liquid phase
US5472747A (en) * 1993-11-23 1995-12-05 Poo; Ramon E. Method and apparatus for treating a polyolefin surface to obtain an active surface which is receptive to inks and adhesives
AU2074097A (en) * 1996-03-04 1997-09-22 Polar Materials, Inc. Method for bulk coating using a plasma process
US5997947A (en) * 1998-04-29 1999-12-07 United Technologies Corporation Rotisserie fixture for coating airfoils
JP3506949B2 (ja) 1999-04-09 2004-03-15 松下電器産業株式会社 薄膜の製造方法、薄膜が形成された回転楕円体、及びこれを用いた電球と薄膜形成装置。
JP4560971B2 (ja) * 2000-03-23 2010-10-13 日立金属株式会社 蒸着被膜形成装置
DE10331608A1 (de) * 2003-07-12 2005-01-27 Hew-Kabel/Cdt Gmbh & Co. Kg Verfahren zum Beschichten und/oder partiellen Umspritzen von flexiblem langgestrecktem Gut
US7183548B1 (en) * 2004-02-25 2007-02-27 Metadigm Llc Apparatus for modifying and measuring diamond and other workpiece surfaces with nanoscale precision
US10438703B2 (en) * 2004-02-25 2019-10-08 Sunshell Llc Diamond structures as fuel capsules for nuclear fusion
JP5044756B2 (ja) * 2007-01-10 2012-10-10 株式会社ツバキエマソン Ｄｌｃ成膜装置
WO2009102070A1 (ja) * 2008-02-12 2009-08-20 Imott Inc. ダイヤモンド状炭素膜成膜装置及びダイヤモンド状炭素膜を成膜する方法
CA2757872C (en) * 2009-04-28 2019-03-26 Ferrotec (Usa) Corporation Lift-off deposition system featuring a density optimized hula substrate holder in a conical deposition chamber
JPWO2021060160A1 (de) * 2019-09-25 2021-04-01

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US533303A (en) * 1895-01-29 Method of and apparatus for making catheter or other tubes
US1290202A (en) * 1918-04-23 1919-01-07 John A Hanlon Work-holder for coated articles.
US3517644A (en) * 1965-06-23 1970-06-30 Mallory & Co Inc P R Apparatus for making metal alloy resistors
US3608519A (en) * 1968-12-31 1971-09-28 Texas Instruments Inc Deposition reactor
US3583363A (en) * 1969-03-05 1971-06-08 Air Reduction Substrate support apparatus
US4055683A (en) * 1974-05-28 1977-10-25 Anatoly Alexandrovich Gusarov Method of balancing rotors
US3977926A (en) * 1974-12-20 1976-08-31 Western Electric Company, Inc. Methods for treating articles
US4207356A (en) * 1976-12-09 1980-06-10 The D. L. Auld Company Method for coating glass containers
JPS5487683A (en) * 1977-12-26 1979-07-12 Ulvac Corp Metal film depositing apparatus
US4516523A (en) * 1983-12-16 1985-05-14 Knox David J Apparatus for wetting apertured discs
US4725345A (en) * 1985-04-22 1988-02-16 Kabushiki Kaisha Kenwood Method for forming a hard carbon thin film on article and applications thereof
US4833031A (en) * 1986-03-20 1989-05-23 Matsushita Electric Industrial Co., Ltd. Magnetic recording medium
US4992298A (en) * 1988-10-11 1991-02-12 Beamalloy Corporation Dual ion beam ballistic alloying process
US4961958A (en) * 1989-06-30 1990-10-09 The Regents Of The Univ. Of Calif. Process for making diamond, and doped diamond films at low temperature
US5038707A (en) * 1989-12-27 1991-08-13 Xerox Corporation Modular apparatus for cleaning, coating and curing photoreceptors in an enclosed planetary array
US5090350A (en) * 1989-12-27 1992-02-25 Xerox Corporation Method and apparatus for cleaning, coating and curing receptor substrates in an enclosed planetary array
US5112644A (en) * 1990-03-08 1992-05-12 Optical Coating Laboratory, Inc. Horizontal precession tooling and method for tube rotation

Also Published As

Publication number Publication date
US5320877A (en) 1994-06-14
EP0483880A3 (en) 1993-09-08
JPH04218664A (ja) 1992-08-10
EP0483880B1 (de) 1996-03-27
DE69118313T2 (de) 1996-11-14
KR950006278B1 (ko) 1995-06-13
EP0483880A2 (de) 1992-05-06
JPH07122132B2 (ja) 1995-12-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee