DE69103807D1 - Verfahren zum Anlöten metallisierter Komponenten an keramische Substrate. - Google Patents
Verfahren zum Anlöten metallisierter Komponenten an keramische Substrate.Info
- Publication number
- DE69103807D1 DE69103807D1 DE69103807T DE69103807T DE69103807D1 DE 69103807 D1 DE69103807 D1 DE 69103807D1 DE 69103807 T DE69103807 T DE 69103807T DE 69103807 T DE69103807 T DE 69103807T DE 69103807 D1 DE69103807 D1 DE 69103807D1
- Authority
- DE
- Germany
- Prior art keywords
- ceramic substrates
- metallized components
- soldering
- soldering metallized
- components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000919 ceramic Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000005476 soldering Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
- C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
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- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
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- C04B2237/55—Pre-treatments of a coated or not coated substrate other than oxidation treatment in order to form an active joining layer
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- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/86—Joining of two substrates at their largest surfaces, one surface being complete joined and covered, the other surface not, e.g. a small plate joined at it's largest surface on top of a larger plate
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
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- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/014—Solder alloys
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12033—Gunn diode
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/245—Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Structural Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/508,871 US5033666A (en) | 1990-04-12 | 1990-04-12 | Process for brazing metallized components to ceramic substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69103807D1 true DE69103807D1 (de) | 1994-10-13 |
DE69103807T2 DE69103807T2 (de) | 1995-03-23 |
Family
ID=24024417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69103807T Expired - Fee Related DE69103807T2 (de) | 1990-04-12 | 1991-04-09 | Verfahren zum Anlöten metallisierter Komponenten an keramische Substrate. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5033666A (de) |
EP (1) | EP0453858B1 (de) |
JP (1) | JP2602372B2 (de) |
KR (1) | KR940006434B1 (de) |
CA (1) | CA2039205A1 (de) |
DE (1) | DE69103807T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5202153A (en) * | 1991-08-23 | 1993-04-13 | E. I. Du Pont De Nemours And Company | Method for making thick film/solder joints |
US5402032A (en) * | 1992-10-29 | 1995-03-28 | Litton Systems, Inc. | Traveling wave tube with plate for bonding thermally-mismatched elements |
JP2674523B2 (ja) * | 1993-12-16 | 1997-11-12 | 日本電気株式会社 | セラミック配線基板とその製造方法 |
US5700724A (en) * | 1994-08-02 | 1997-12-23 | Philips Electronic North America Corporation | Hermetically sealed package for a high power hybrid circuit |
US5637261A (en) * | 1994-11-07 | 1997-06-10 | The Curators Of The University Of Missouri | Aluminum nitride-compatible thick-film binder glass and thick-film paste composition |
US5763888A (en) * | 1995-01-30 | 1998-06-09 | Ametek Aerospace Products, Inc. | High temperature gas stream optical flame sensor and method for fabricating same |
US5678168A (en) * | 1995-11-13 | 1997-10-14 | National Starch And Chemical Investment Holding Corporation | Two-layer solderable gold for thick film circuits |
DE19621001A1 (de) * | 1996-05-24 | 1997-11-27 | Heraeus Sensor Nite Gmbh | Sensoranordnung zur Temperaturmessung und Verfahren zur Herstellung der Anordnung |
US5896869A (en) * | 1997-01-13 | 1999-04-27 | International Business Machines Corporation | Semiconductor package having etched-back silver-copper braze |
DE19842276A1 (de) * | 1998-09-16 | 2000-03-30 | Bosch Gmbh Robert | Paste zum Verschweißen von Keramiken mit Metallen und Verfahren zur Herstellung einer Schweißverbindung |
US6699571B1 (en) * | 2002-03-27 | 2004-03-02 | Morgan Advanced Ceramics, Inc. | Devices and methods for mounting components of electronic circuitry |
KR100873772B1 (ko) * | 2002-11-19 | 2008-12-15 | 도와 홀딩스 가부시끼가이샤 | 금속/세라믹 접합 제품 |
US7989086B2 (en) * | 2003-11-05 | 2011-08-02 | Hamilton Sundstrand Corporation | High temperature seal for joining ceramic components such as cells in a ceramic oxygen generator |
US20060009036A1 (en) * | 2004-07-12 | 2006-01-12 | Bacher Rudolph J | High thermal cycle conductor system |
US7145076B2 (en) * | 2005-02-08 | 2006-12-05 | Greatbatch, Inc. | Method for minimizing stress in feedthrough capacitor filter assemblies |
US20060275607A1 (en) * | 2005-06-06 | 2006-12-07 | Semih Demir | Composite assemblies including powdered metal components |
US7328832B2 (en) * | 2005-09-28 | 2008-02-12 | General Electric Company | Gold/nickel/copper brazing alloys for brazing WC-Co to titanium alloys |
US7293688B2 (en) * | 2005-11-14 | 2007-11-13 | General Electric Company | Gold/nickel/copper/aluminum/silver brazing alloys for brazing WC-Co to titanium alloys |
US7987712B2 (en) * | 2008-12-10 | 2011-08-02 | Rosemount Aerospace Inc. | High temperature seal assembly for optical sensor |
US9643021B2 (en) | 2013-01-08 | 2017-05-09 | Advanced Bionics Ag | Electrical feedthrough assembly |
EP2569051B1 (de) * | 2010-05-12 | 2014-10-08 | Advanced Bionics AG | Elektrische durchführungsanordnung |
JP6480806B2 (ja) | 2014-05-23 | 2019-03-13 | ゼネラル・エレクトリック・カンパニイ | セラミックと金属を接合するための方法およびその封止構造 |
BG112154A (bg) * | 2015-11-19 | 2017-05-31 | СОФИЙСКИ УНИВЕРСИТЕТ "Св. Кл. Охридски" | Метод за получаване на течни, полутечни и твърди органични частици с контролирана форма и/или размер |
US11222878B2 (en) | 2019-04-30 | 2022-01-11 | Ab Mikroelektronik Gesellschaft Mit Beschraenkter Haftung | Electronic power module |
EP4112586A1 (de) * | 2021-06-29 | 2023-01-04 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung eines metall-keramik-substrats mittels einem durchlaufofen |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2857664A (en) * | 1954-08-09 | 1958-10-28 | Frenchtown Porcelain Company | Coated non-metallic refractory bodies, composition for coating such bodies, and method for bonding such bodies by means of said composition |
US3006069A (en) * | 1957-05-23 | 1961-10-31 | Rca Corp | Method of sealing a metal member to a ceramic member |
US3207838A (en) * | 1961-06-30 | 1965-09-21 | Western Electric Co | Substrates having solderable gold films formed thereon, and methods of making the same |
US3281931A (en) * | 1963-10-10 | 1966-11-01 | Bendix Corp | High temperature ceramic-metal seal |
US3590468A (en) * | 1969-02-19 | 1971-07-06 | Sperry Rand Corp | Glassy phase method for making pure alumina-to-metal hermetic seals |
US4313262A (en) * | 1979-12-17 | 1982-02-02 | General Electric Company | Molybdenum substrate thick film circuit |
US4613560A (en) * | 1984-12-28 | 1986-09-23 | E. I. Du Pont De Nemours And Company | Photosensitive ceramic coating composition |
JPS6369786A (ja) * | 1986-09-09 | 1988-03-29 | 電気化学工業株式会社 | メタライズ層をもつた窒化アルミニウム基板の製法 |
JPH03103385A (ja) * | 1989-09-18 | 1991-04-30 | Nippon Steel Corp | セラミックスのメタライズ方法、ならびにセラミックスと金属の接合方法 |
-
1990
- 1990-04-12 US US07/508,871 patent/US5033666A/en not_active Expired - Lifetime
-
1991
- 1991-03-27 CA CA002039205A patent/CA2039205A1/en not_active Abandoned
- 1991-04-09 DE DE69103807T patent/DE69103807T2/de not_active Expired - Fee Related
- 1991-04-09 EP EP91105566A patent/EP0453858B1/de not_active Expired - Lifetime
- 1991-04-11 JP JP3105152A patent/JP2602372B2/ja not_active Expired - Fee Related
- 1991-04-11 KR KR1019910005789A patent/KR940006434B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5033666A (en) | 1991-07-23 |
JPH04238875A (ja) | 1992-08-26 |
JP2602372B2 (ja) | 1997-04-23 |
EP0453858B1 (de) | 1994-09-07 |
EP0453858A1 (de) | 1991-10-30 |
KR910019109A (ko) | 1991-11-30 |
DE69103807T2 (de) | 1995-03-23 |
CA2039205A1 (en) | 1991-10-13 |
KR940006434B1 (ko) | 1994-07-20 |
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