DE69024893T2 - Verfahren zum Herstellen einer Fotodiode - Google Patents

Verfahren zum Herstellen einer Fotodiode

Info

Publication number
DE69024893T2
DE69024893T2 DE69024893T DE69024893T DE69024893T2 DE 69024893 T2 DE69024893 T2 DE 69024893T2 DE 69024893 T DE69024893 T DE 69024893T DE 69024893 T DE69024893 T DE 69024893T DE 69024893 T2 DE69024893 T2 DE 69024893T2
Authority
DE
Germany
Prior art keywords
photodiode
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024893T
Other languages
English (en)
Other versions
DE69024893D1 (de
Inventor
Richard F Austin
Robert D Feldman
James W Sulhofff
John L Zyskind
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
AT&T Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AT&T Corp filed Critical AT&T Corp
Application granted granted Critical
Publication of DE69024893D1 publication Critical patent/DE69024893D1/de
Publication of DE69024893T2 publication Critical patent/DE69024893T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
    • H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the Schottky type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
    • H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
DE69024893T 1989-08-18 1990-08-09 Verfahren zum Herstellen einer Fotodiode Expired - Fee Related DE69024893T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/395,922 US4999694A (en) 1989-08-18 1989-08-18 Photodiode

Publications (2)

Publication Number Publication Date
DE69024893D1 DE69024893D1 (de) 1996-02-29
DE69024893T2 true DE69024893T2 (de) 1996-05-30

Family

ID=23565092

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69024893T Expired - Fee Related DE69024893T2 (de) 1989-08-18 1990-08-09 Verfahren zum Herstellen einer Fotodiode

Country Status (6)

Country Link
US (1) US4999694A (de)
EP (1) EP0419025B1 (de)
JP (1) JPH0389564A (de)
CA (1) CA2018320C (de)
DE (1) DE69024893T2 (de)
ES (1) ES2081935T3 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2773930B2 (ja) * 1989-10-31 1998-07-09 三菱電機株式会社 光検知装置
JPH0521827A (ja) * 1991-07-11 1993-01-29 Nec Corp 赤外線検出器の製造方法
US5241196A (en) * 1991-10-15 1993-08-31 Santa Barbara Research Center Photoresponsive device including composition grading and recessed contacts for trapping minority carriers
US5449561A (en) * 1992-07-17 1995-09-12 University Of Houston Semimetal-semiconductor heterostructures and multilayers
US5472914A (en) * 1994-07-14 1995-12-05 The United States Of America As Represented By The Secretary Of The Air Force Wafer joined optoelectronic integrated circuits and method
JP2570646B2 (ja) * 1994-12-13 1997-01-08 日本電気株式会社 Ｓｉベ−ス半導体結晶基板及びその製造方法
JPH08255923A (ja) * 1995-03-15 1996-10-01 Fujitsu Ltd Ｉｉ−ｖｉ族化合物半導体を使用した半導体装置及びその製造方法
US5998809A (en) * 1995-10-06 1999-12-07 Raytheon Company Room temperature 3-5 micrometer wavelength HgCdTe heterojunction emitter
US6545799B1 (en) 1998-09-02 2003-04-08 Corning Incorporated Method and apparatus for optical system link control
WO2004109764A2 (en) * 2003-06-04 2004-12-16 Myung Cheol Yoo Method of fabricating vertical structure compound semiconductor devices
GB0407804D0 (en) * 2004-04-06 2004-05-12 Qinetiq Ltd Manufacture of cadmium mercury telluride
CN101901858B (zh) * 2004-04-28 2014-01-29 沃提科尔公司 垂直结构半导体器件
TWI433343B (zh) * 2004-06-22 2014-04-01 Verticle Inc 具有改良光輸出的垂直構造半導體裝置
TWI389334B (zh) * 2004-11-15 2013-03-11 Verticle Inc 製造及分離半導體裝置之方法
US7659474B2 (en) * 2005-05-04 2010-02-09 The Boeing Company Solar cell array with isotype-heterojunction diode
US7829909B2 (en) * 2005-11-15 2010-11-09 Verticle, Inc. Light emitting diodes and fabrication methods thereof
EP2281306A4 (de) * 2008-05-30 2013-05-22 Sarnoff Corp Verfahren zur elektronischen befestigung einer rückfläche eines auf einem utsoi-wafer hergestellten rückbeleuchteten abbilders
CA2744774C (en) 2008-07-17 2017-05-23 Uriel Solar, Inc. High power efficiency, large substrate, polycrystalline cdte thin film semiconductor photovoltaic cell structures grown by molecular beam epitaxy at high deposition rate for use in solar electricity generation
JP5506258B2 (ja) * 2008-08-06 2014-05-28 キヤノン株式会社 整流素子
JP5813654B2 (ja) * 2009-12-10 2015-11-17 ウリエル ソーラー インコーポレイテッド 太陽光発電における使用のための高電力効率多結晶ＣｄＴｅ薄膜半導体光起電力電池構造
US11043604B2 (en) * 2015-07-28 2021-06-22 University Of Rochester Low dark current, resonant cavity-enhanced infrared photodetectors

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723190A (en) * 1968-10-09 1973-03-27 Honeywell Inc Process for preparing mercury cadmium telluride
US3761718A (en) * 1972-09-07 1973-09-25 Honeywell Inc Detector apparatus using semiconductor laminae
US4201604A (en) * 1975-08-13 1980-05-06 Raytheon Company Process for making a negative resistance diode utilizing spike doping
US4123295A (en) * 1977-01-14 1978-10-31 California Institute Of Technology Mercury chalcogenide contact for semiconductor devices
FR2568485B1 (fr) * 1984-08-06 1990-03-23 Rhone Poulenc Rech Appareil de fractionnement par electrophorese de solutions contenant des proteines, utilisable notamment pour le fractionnement du plasma humain
US4648917A (en) * 1985-08-26 1987-03-10 Ford Aerospace & Communications Corporation Non isothermal method for epitaxially growing HgCdTe
FR2592740B1 (fr) * 1986-01-08 1988-03-18 Commissariat Energie Atomique Detecteur photovoltaique en hgcdte a heterojonction et son procede de fabrication
FR2598558B1 (fr) * 1986-05-07 1988-11-10 Telecommunications Sa Photodiode a avalanche hgcdte sensible aux rayonnements de longueur d'onde superieure a 2 mm
FR2614135B1 (fr) * 1987-04-14 1989-06-30 Telecommunications Sa Photodiode hgcdte a reponse rapide
DE3736201C2 (de) * 1987-10-26 1993-12-09 Siemens Ag Wellenlängenselektives Diodenarray

Also Published As

Publication number Publication date
CA2018320C (en) 1994-07-19
JPH0389564A (ja) 1991-04-15
EP0419025A1 (de) 1991-03-27
CA2018320A1 (en) 1991-02-18
EP0419025B1 (de) 1996-01-17
DE69024893D1 (de) 1996-02-29
ES2081935T3 (es) 1996-03-16
US4999694A (en) 1991-03-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee