DE69023446T2 - Verfahren und Vorrichtung zur Dosierung von Verunreinigungen in einem Gas durch Gaschromatographie und Anwendung zur Kalibrierung von dotierenden Verunreinigungen in Silan. - Google Patents

Verfahren und Vorrichtung zur Dosierung von Verunreinigungen in einem Gas durch Gaschromatographie und Anwendung zur Kalibrierung von dotierenden Verunreinigungen in Silan.

Info

Publication number
DE69023446T2
DE69023446T2 DE69023446T DE69023446T DE69023446T2 DE 69023446 T2 DE69023446 T2 DE 69023446T2 DE 69023446 T DE69023446 T DE 69023446T DE 69023446 T DE69023446 T DE 69023446T DE 69023446 T2 DE69023446 T2 DE 69023446T2
Authority
DE
Germany
Prior art keywords
impurities
gas
dosing
silane
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69023446T
Other languages
English (en)
Other versions
DE69023446D1 (de
Inventor
Francis Bryselbout
Patrick Mauvais
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of DE69023446D1 publication Critical patent/DE69023446D1/de
Publication of DE69023446T2 publication Critical patent/DE69023446T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/281—Sorbents specially adapted for preparative, analytical or investigative chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/38—Flow patterns
    • G01N30/46—Flow patterns using more than one column
    • G01N30/461—Flow patterns using more than one column with serial coupling of separation columns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/30—Control of physical parameters of the fluid carrier of temperature
    • G01N2030/3023—Control of physical parameters of the fluid carrier of temperature using cryogenic fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/64—Electrical detectors
    • G01N2030/642—Electrical detectors photoionisation detectors
DE69023446T 1989-09-22 1990-09-20 Verfahren und Vorrichtung zur Dosierung von Verunreinigungen in einem Gas durch Gaschromatographie und Anwendung zur Kalibrierung von dotierenden Verunreinigungen in Silan. Expired - Fee Related DE69023446T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8912447A FR2652417B1 (fr) 1989-09-22 1989-09-22 Procede et dispositif de dosage d'impuretes dans un gaz par chromatographie en phase gazeuse et utilisation pour la calibration d'impuretes dopantes dans le silane.

Publications (2)

Publication Number Publication Date
DE69023446D1 DE69023446D1 (de) 1995-12-14
DE69023446T2 true DE69023446T2 (de) 1996-04-04

Family

ID=9385750

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69023446T Expired - Fee Related DE69023446T2 (de) 1989-09-22 1990-09-20 Verfahren und Vorrichtung zur Dosierung von Verunreinigungen in einem Gas durch Gaschromatographie und Anwendung zur Kalibrierung von dotierenden Verunreinigungen in Silan.

Country Status (7)

Country Link
US (1) US5152176A (de)
EP (1) EP0419357B1 (de)
JP (1) JPH03170861A (de)
KR (1) KR910006721A (de)
CA (1) CA2025821A1 (de)
DE (1) DE69023446T2 (de)
FR (1) FR2652417B1 (de)

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JP3169393B2 (ja) * 1991-05-31 2001-05-21 忠弘 大見 特殊材料ガスの分解率変化測定方法及びその測定装置
US5411707A (en) * 1992-06-25 1995-05-02 The United States Of American As Represented By The Administrator Of The Environmental Protection Agency Vacuum extractor incorporating a condenser column
US5458783A (en) * 1992-08-13 1995-10-17 Suprex Corporation Supercritical fluid extraction coupled to analytical chromatography system
CA2110343C (en) * 1992-12-14 1999-08-24 Christopher Huk-Shi Cheh Gas chromatographic method
US5338514A (en) * 1993-08-25 1994-08-16 The Dow Chemical Company Vented capillary gas chromatography apparatus
JP3302127B2 (ja) * 1993-09-17 2002-07-15 株式会社島津製作所 内燃機関用排出ガス自動分析装置
JP2580988B2 (ja) * 1993-12-17 1997-02-12 日本電気株式会社 有機物分析装置および有機物分析方法
US5611846A (en) * 1994-01-14 1997-03-18 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Portable gas chromatograph
JP2751852B2 (ja) * 1994-06-06 1998-05-18 日本電気株式会社 気体分析装置およびその分析方法および気体採取装置
US5492555A (en) * 1994-06-09 1996-02-20 Lovelace Biomedical & Environmental Research Institute, Inc. Automated two-dimensional interface for capillary gas chromatography
US5948360A (en) 1994-07-11 1999-09-07 Tekmar Company Autosampler with robot arm
EP0770212A1 (de) * 1994-07-11 1997-05-02 Tekmar Company Modul, bestehend aus einer aus probegefaessen selbsttaetig proben nehmende vorrichtung
US5563352A (en) * 1995-01-06 1996-10-08 University Corporation For Atmospheric Research Gas concentration and injection system for chromatographic analysis of organic trace gases
US5707150A (en) * 1995-09-19 1998-01-13 Rosemount Analytical Inc. Apparatus for computing BTU content in a sample of gas
DE69637079T2 (de) * 1995-10-16 2008-01-24 Thermo Orion Inc., Beverly Hochgeschwindigkeitschromatographie
US6649129B1 (en) 1995-11-13 2003-11-18 Teledyne Tekmar Company Method and apparatus for concentrating a VOC sample
JP2828061B2 (ja) * 1996-09-12 1998-11-25 日本電気株式会社 気体分析装置および気体分析方法
US6131440A (en) * 1996-10-15 2000-10-17 Universite De Montreal Selective removal of volatile substances injected into a chromatographic packing filled column
US5827945A (en) * 1996-10-24 1998-10-27 Varian Associates, Inc. Real-time gas-chromatography mass-spectrometry trace vapor detection
TW330240B (en) * 1997-06-28 1998-04-21 Ind Tech Res Inst Method for automatic detecting organic waste gas
US6032513A (en) * 1997-06-30 2000-03-07 Texas Instruments Incorporated Apparatus and method for measuring contaminants in semiconductor processing chemicals
US6125689A (en) * 1997-08-15 2000-10-03 Graves' Trust Group Non-destructive semiconductor wafer test system
DE19810109C2 (de) * 1998-03-10 2000-02-10 Gerstel Gmbh & Co Kg Gaschromatograph mit einem temperaturgesteuerten Injektor
DE19960631C1 (de) * 1999-12-16 2001-07-12 Gerstel Systemtechnik Gmbh Verfahren und Vorrichtung zur gaschromatographischen Analyse von Proben
JP2002250722A (ja) * 2001-02-27 2002-09-06 Taiyo Toyo Sanso Co Ltd 極低濃度硫化水素の分析方法および分析装置
CA2643092C (en) * 2005-02-22 2014-04-29 Systeme Analytique Inc. Chromatographic methods for measuring impurities in a gas sample
ATE369557T1 (de) * 2005-02-25 2007-08-15 Max Planck Gesellschaft Gaschromatographievorrichtung
EP1946098B1 (de) * 2005-10-19 2010-06-02 Panalytique Inc. Chromatographische systeme und verfahren zur beseitigung der störung durch störende agentien
CA2643094C (en) * 2006-02-28 2013-12-03 Panalytique Inc. System and method of eliminating interference for impurities measurement in noble gases
US8613215B2 (en) * 2008-12-23 2013-12-24 Schlumberger Technology Corporation Apparatus and method for multi-dimensional gas chromatography
US8226825B2 (en) * 2009-04-09 2012-07-24 The United States of America, as represented by the Sectretary of Commerce, The National Institute of Standards and Technology Recirculating temperature wave focusing chromatography
US8999245B2 (en) 2009-07-07 2015-04-07 Tricorn Tech Corporation Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same
US8707760B2 (en) 2009-07-31 2014-04-29 Tricorntech Corporation Gas collection and analysis system with front-end and back-end pre-concentrators and moisture removal
US20130055791A1 (en) * 2010-02-12 2013-03-07 Gl Sciences Incorporated Sample trapping method and sample trapping apparatus
US8978444B2 (en) 2010-04-23 2015-03-17 Tricorn Tech Corporation Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis
US10302605B2 (en) * 2011-02-07 2019-05-28 Agilent Technologies, Inc. Column assembly for a gas chromatograph
RU2470290C1 (ru) * 2011-05-13 2012-12-20 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Дальневосточный Федеральный Университет" (Двфу) Способ выполнения анализа газовых смесей
CN104267132B (zh) * 2014-08-26 2016-08-24 广东电网公司电力科学研究院 检测sf6分解产物的色谱分析方法
WO2018005679A1 (en) * 2016-06-28 2018-01-04 Perkinelmer Health Sciences, Inc. Improved low thermal mass gc module
FR3075383B1 (fr) * 2017-12-14 2021-01-08 Air Liquide Dispositif et procede de controle de la purete d'un gaz
CN112255353B (zh) * 2020-11-05 2022-11-15 北京高麦克仪器科技有限公司 乙烯、丙烯中砷烷、磷烷的检测方法

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US3168823A (en) * 1960-07-18 1965-02-09 Phillips Petroleum Co Thermochromatographic method and apparatus for separation and concentration
US3352644A (en) * 1964-09-18 1967-11-14 North American Aviation Inc Analysis of hydrogen
US3735565A (en) * 1971-05-06 1973-05-29 Wilks Scientific Corp Enrichment of chromatograph output
US3897211A (en) * 1973-08-06 1975-07-29 Phillips Petroleum Co Sample conditioner
FR2256702A5 (de) * 1973-12-28 1975-07-25 Raffinage Cie Francaise
FR2366564A1 (fr) * 1976-02-27 1978-04-28 Block Engineering Appareil de chromatographie en phase gazeuse
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US4454043A (en) * 1980-11-17 1984-06-12 Monsanto Company Column switching procedure
US4992083A (en) * 1988-11-19 1991-02-12 Kernforschungsanlage Juelich Gesellschaft Mit Beschrenkter Haftung Apparatus for intermediate enrichment of trace substances from a gas stream in a cold trap, and chromatography arrangement provided therewith

Also Published As

Publication number Publication date
FR2652417A1 (fr) 1991-03-29
FR2652417B1 (fr) 1993-12-03
JPH03170861A (ja) 1991-07-24
EP0419357B1 (de) 1995-11-08
EP0419357A1 (de) 1991-03-27
CA2025821A1 (fr) 1991-03-23
DE69023446D1 (de) 1995-12-14
US5152176A (en) 1992-10-06
KR910006721A (ko) 1991-04-29

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee