DE69018276D1 - Dotierte Titanatglaskeramik für Kondensatoren mit Korngrenzensperrschichten. - Google Patents

Dotierte Titanatglaskeramik für Kondensatoren mit Korngrenzensperrschichten.

Info

Publication number
DE69018276D1
DE69018276D1 DE69018276T DE69018276T DE69018276D1 DE 69018276 D1 DE69018276 D1 DE 69018276D1 DE 69018276 T DE69018276 T DE 69018276T DE 69018276 T DE69018276 T DE 69018276T DE 69018276 D1 DE69018276 D1 DE 69018276D1
Authority
DE
Germany
Prior art keywords
capacitors
grain boundary
barrier layers
glass ceramic
boundary barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69018276T
Other languages
English (en)
Other versions
DE69018276T2 (de
Inventor
Dudley Augustus Chance
Yung-Haw Hu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69018276D1 publication Critical patent/DE69018276D1/de
Application granted granted Critical
Publication of DE69018276T2 publication Critical patent/DE69018276T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/47—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on strontium titanates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/468—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates
    • C04B35/4682—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on barium titanates based on BaTiO3 perovskite phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1272—Semiconductive ceramic capacitors
    • H01G4/1281—Semiconductive ceramic capacitors with grain boundary layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/129—Ceramic dielectrics containing a glassy phase, e.g. glass ceramic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Capacitors (AREA)
  • Inorganic Insulating Materials (AREA)
  • Glass Compositions (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE69018276T 1989-01-17 1990-01-02 Dotierte Titanatglaskeramik für Kondensatoren mit Korngrenzensperrschichten. Expired - Fee Related DE69018276T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/297,907 US4870539A (en) 1989-01-17 1989-01-17 Doped titanate glass-ceramic for grain boundary barrier layer capacitors

Publications (2)

Publication Number Publication Date
DE69018276D1 true DE69018276D1 (de) 1995-05-11
DE69018276T2 DE69018276T2 (de) 1995-10-19

Family

ID=23148217

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69018276T Expired - Fee Related DE69018276T2 (de) 1989-01-17 1990-01-02 Dotierte Titanatglaskeramik für Kondensatoren mit Korngrenzensperrschichten.

Country Status (4)

Country Link
US (1) US4870539A (de)
EP (1) EP0378989B1 (de)
JP (1) JPH02233533A (de)
DE (1) DE69018276T2 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177670A (en) * 1991-02-08 1993-01-05 Hitachi, Ltd. Capacitor-carrying semiconductor module
EP0513894B1 (de) * 1991-05-08 1996-08-28 Koninklijke Philips Electronics N.V. Verfahren zur Herstellung einer Halbleiteranordnung mit einem Kondensator mit einem ferroelektrischen Dieletrikum und Halbleiteranordnung mit einem derartigen Kondensator
US5614018A (en) * 1991-12-13 1997-03-25 Symetrix Corporation Integrated circuit capacitors and process for making the same
US5173454A (en) * 1992-01-09 1992-12-22 Corning Incorporated Nanocrystalline materials
JP2943129B2 (ja) * 1992-12-29 1999-08-30 インターナショナル・ビジネス・マシーンズ・コーポレーション セラミック組成物、セラミック・グリーン・シートおよび製造方法
JP3227859B2 (ja) * 1993-01-08 2001-11-12 株式会社村田製作所 非還元性誘電体磁器組成物
US5607631A (en) * 1993-04-01 1997-03-04 Hughes Electronics Enhanced tunability for low-dielectric-constant ferroelectric materials
GB9504443D0 (en) * 1995-03-06 1995-04-26 Cookson Group Plc Temperature stable dielectric
US5680685A (en) * 1995-06-07 1997-10-28 Microelectronic Packaging, Inc. Method of fabricating a multilayer ceramic capacitor
US5891933A (en) * 1998-04-09 1999-04-06 Alliedsignal Inc. Metal titanates for friction stabilization of friction materials
DE19824783A1 (de) * 1998-06-03 1999-12-16 Siemens Ag Vorrichtung zur Formung eines Elektronenstrahls, Verfahren zur Herstellung der Vorrichtung und Anwendung
US6156606A (en) * 1998-11-17 2000-12-05 Siemens Aktiengesellschaft Method of forming a trench capacitor using a rutile dielectric material
JP3705141B2 (ja) * 2001-03-19 2005-10-12 株式会社村田製作所 誘電体セラミック、その製造方法およびその評価方法ならびに積層セラミック電子部品
JP2005167060A (ja) * 2003-12-04 2005-06-23 Seiko Epson Corp キャパシタとその製造方法、及び半導体装置
US7256980B2 (en) * 2003-12-30 2007-08-14 Du Pont Thin film capacitors on ceramic
JP4299759B2 (ja) * 2004-10-12 2009-07-22 Ｔｄｋ株式会社 セラミック電子部品およびその製造方法
WO2006059492A1 (ja) * 2004-11-30 2006-06-08 Asahi Glass Company, Limited フィールドエミッションディスプレイ用結晶化ガラススペーサーおよびその製造方法
US7528088B2 (en) * 2005-04-01 2009-05-05 Tdk Corporation Electronic device
JP4299827B2 (ja) * 2005-12-05 2009-07-22 Ｔｄｋ株式会社 誘電体磁器組成物、電子部品および積層セラミックコンデンサ
US8169014B2 (en) * 2006-01-09 2012-05-01 Taiwan Semiconductor Manufacturing Co., Ltd. Interdigitated capacitive structure for an integrated circuit
DE102006017902B4 (de) * 2006-04-18 2009-11-12 Forschungszentrum Karlsruhe Gmbh Keramisches Dielektrikum, Herstellverfahren für Dünn- und/oder Dickschichten enthaltend mindestens ein keramisches Dielektrikum und Verwendung davon
DE102008011206B4 (de) 2008-02-26 2011-05-05 Schott Ag Verfahren zur Herstellung einer Glaskeramik und Verwendung einer Glaskeramik laskeramik
DE102009024645B4 (de) * 2009-06-04 2011-06-01 Schott Ag Glaskeramik mit nanoskaligem Bariumtitanat, Verfahren zu deren Herstellung und Verwendung
JP5693940B2 (ja) * 2010-12-13 2015-04-01 株式会社トクヤマ セラミックスビア基板、メタライズドセラミックスビア基板、これらの製造方法
CN102260044B (zh) * 2011-04-30 2013-07-24 桂林电子科技大学 一种储能铌酸盐微晶玻璃介质材料及其制备方法
DE102011119798A1 (de) 2011-11-24 2013-05-29 Schott Ag Glaskeramik als Dielektrikum im Hochfrequenzbereich
JP6394127B2 (ja) * 2014-07-08 2018-09-26 Tdk株式会社 伝送線路および電子部品
US20170362119A1 (en) 2016-06-17 2017-12-21 Corning Incorporated Transparent, near infrared-shielding glass ceramic
DE102017200503B4 (de) 2017-01-13 2023-02-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines dielektrischen Elements
US10450220B2 (en) * 2017-12-13 2019-10-22 Corning Incorporated Glass-ceramics and glasses
US10246371B1 (en) 2017-12-13 2019-04-02 Corning Incorporated Articles including glass and/or glass-ceramics and methods of making the same
KR102608244B1 (ko) * 2019-01-29 2023-11-29 삼성전자주식회사 세라믹 유전체 및 그 제조 방법, 세라믹 전자 부품 및 전자장치
JP7444581B2 (ja) * 2019-11-07 2024-03-06 Hoya株式会社 導電性結晶化ガラス
CN114890676B (zh) * 2021-06-21 2023-07-07 桂林电子科技大学 一种高介电高储能微晶玻璃介质材料及其制备方法
CN113979745B (zh) * 2021-11-12 2022-11-04 合肥工业大学 一种介电陶瓷材料及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309295A (en) * 1980-02-08 1982-01-05 U.S. Philips Corporation Grain boundary barrier layer ceramic dielectrics and the method of manufacturing capacitors therefrom
JPS56162820A (en) * 1980-05-20 1981-12-15 Kiyoshi Okazaki Vapor bank layered laminated ceramic capacitor and method of manufacturing same
GB2103422B (en) * 1981-07-30 1985-02-27 Standard Telephones Cables Ltd Ceramic capacitors
DD263745A1 (de) * 1986-07-04 1989-01-11 Akad Wissenschaften Ddr Glaskeramisches sensormaterial und verfahren zu seiner herstellung
DE3785506T2 (de) * 1986-07-29 1993-08-12 Tdk Corp Halbleitende keramische zusammensetzung, sowie kondensator aus halbleitender keramik.

Also Published As

Publication number Publication date
JPH0550453B2 (de) 1993-07-29
EP0378989B1 (de) 1995-04-05
EP0378989A1 (de) 1990-07-25
JPH02233533A (ja) 1990-09-17
US4870539A (en) 1989-09-26
DE69018276T2 (de) 1995-10-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee