DE69017159D1 - Laser-interferometrischer Messapparat. - Google Patents
Laser-interferometrischer Messapparat.Info
- Publication number
- DE69017159D1 DE69017159D1 DE69017159T DE69017159T DE69017159D1 DE 69017159 D1 DE69017159 D1 DE 69017159D1 DE 69017159 T DE69017159 T DE 69017159T DE 69017159 T DE69017159 T DE 69017159T DE 69017159 D1 DE69017159 D1 DE 69017159D1
- Authority
- DE
- Germany
- Prior art keywords
- reflected
- corner
- measuring
- transmitting
- cube prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32093989 | 1989-12-11 | ||
JP2102739A JP2992829B2 (ja) | 1990-04-18 | 1990-04-18 | レーザ測長計 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69017159D1 true DE69017159D1 (de) | 1995-03-30 |
DE69017159T2 DE69017159T2 (de) | 1995-08-10 |
Family
ID=26443416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69017159T Expired - Fee Related DE69017159T2 (de) | 1989-12-11 | 1990-12-11 | Laser-interferometrischer Messapparat. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5305088A (de) |
EP (1) | EP0433008B1 (de) |
DE (1) | DE69017159T2 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5483342A (en) * | 1993-06-25 | 1996-01-09 | Hughes Aircraft Company | Polarization rotator with frequency shifting phase conjugate mirror and simplified interferometric output coupler |
EP0824722B1 (de) * | 1996-03-06 | 2001-07-25 | Asm Lithography B.V. | Differential-interferometer-system und lithographischer "step and scan" apparat ausgestattet mit diesem system |
EP1031868B1 (de) * | 1999-02-26 | 2003-05-14 | Dr. Johannes Heidenhain GmbH | Kompensierter Parallel-Strahlteiler mit zwei Platten sowie Interferometer |
US6201609B1 (en) * | 1999-08-27 | 2001-03-13 | Zygo Corporation | Interferometers utilizing polarization preserving optical systems |
JP4198929B2 (ja) * | 2002-03-27 | 2008-12-17 | パイオニア株式会社 | レーザ測長器及びレーザ測長方法 |
JP4939765B2 (ja) * | 2005-03-28 | 2012-05-30 | 株式会社日立製作所 | 変位計測方法とその装置 |
US7532330B2 (en) * | 2005-08-16 | 2009-05-12 | Zygo Corporation | Angle interferometers |
US7359057B2 (en) * | 2005-08-26 | 2008-04-15 | Ball Aerospace & Technologies Corp. | Method and apparatus for measuring small shifts in optical wavelengths |
US7705994B2 (en) * | 2005-11-23 | 2010-04-27 | Agilent Technologies, Inc. | Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs |
JP5523664B2 (ja) * | 2007-11-06 | 2014-06-18 | 株式会社ミツトヨ | 干渉計 |
US8978465B2 (en) | 2012-07-25 | 2015-03-17 | Micro-G Lacoste, Inc. | Interferometric gradiometer apparatus and method |
US9110185B2 (en) * | 2012-08-01 | 2015-08-18 | Micro-G Lacoste, Inc. | Polarized beam, matched coincident beam path, interferometric gradiometer apparatus and method |
US9256079B2 (en) | 2013-03-12 | 2016-02-09 | Micro-G Lacoste, Inc. | Polarized beam director and method |
KR101860347B1 (ko) * | 2016-11-29 | 2018-05-23 | 국방과학연구소 | 마이켈슨 간섭계의 하우징 시스템 |
CN106510613B (zh) * | 2016-12-02 | 2018-03-13 | 上海理工大学 | 用于眼轴长度测量的光学相位延迟器 |
RU2716167C2 (ru) * | 2017-03-16 | 2020-03-06 | Акционерное общество "Центр ВОСПИ" (АО "Центр ВОСПИ") | Регулируемая оптико-волоконная пассивная линия задержки |
RU2707123C2 (ru) * | 2017-03-16 | 2019-11-22 | Акционерное общество "Центр ВОСПИ" (АО "Центр ВОСПИ") | Регулируемая волоконно-оптическая пассивная линия задержки |
US10704895B2 (en) * | 2017-07-25 | 2020-07-07 | AW Solutions, Inc. | Apparatus and method for remote optical caliper measurement |
WO2022042947A1 (en) * | 2020-08-27 | 2022-03-03 | Asml Netherlands B.V. | Compact dual pass interferometer for a plane mirror interferometer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1429314A (fr) * | 1964-12-14 | 1966-02-25 | Centre Nat Rech Scient | Perfectionnements à l'interférométrie |
DE3404963C2 (de) * | 1984-02-11 | 1986-09-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München | Laser-Interferometer zur Längenmessung |
US4802764A (en) * | 1986-03-28 | 1989-02-07 | Young Peter S | Differential plane mirror interferometer having beamsplitter/beam folder assembly |
US4746216A (en) * | 1986-03-28 | 1988-05-24 | Zygo Corporation | Angle measuring interferometer |
WO1990000008A1 (en) * | 1988-06-27 | 1990-01-11 | Gaf Chemicals Corporation | Improved bread compositions and method for preparations thereof |
DE59007132D1 (de) * | 1989-03-03 | 1994-10-20 | Buehler Ag | Polarisationsinterferometer. |
-
1990
- 1990-12-11 EP EP90313424A patent/EP0433008B1/de not_active Expired - Lifetime
- 1990-12-11 DE DE69017159T patent/DE69017159T2/de not_active Expired - Fee Related
-
1993
- 1993-06-07 US US08/073,292 patent/US5305088A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0433008A3 (en) | 1991-09-25 |
DE69017159T2 (de) | 1995-08-10 |
US5305088A (en) | 1994-04-19 |
EP0433008B1 (de) | 1995-02-22 |
EP0433008A2 (de) | 1991-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |