ATE222349T1 - Verbesserungen an oberflächenkrümmungsmessungen - Google Patents

Verbesserungen an oberflächenkrümmungsmessungen

Info

Publication number
ATE222349T1
ATE222349T1 AT96101238T AT96101238T ATE222349T1 AT E222349 T1 ATE222349 T1 AT E222349T1 AT 96101238 T AT96101238 T AT 96101238T AT 96101238 T AT96101238 T AT 96101238T AT E222349 T1 ATE222349 T1 AT E222349T1
Authority
AT
Austria
Prior art keywords
beams
curvage
measurements
curvature
radius
Prior art date
Application number
AT96101238T
Other languages
English (en)
Inventor
Kevin Ross Manning
Original Assignee
Roke Manor Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9502710.8A external-priority patent/GB9502710D0/en
Application filed by Roke Manor Research filed Critical Roke Manor Research
Application granted granted Critical
Publication of ATE222349T1 publication Critical patent/ATE222349T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
AT96101238T 1995-02-11 1996-01-26 Verbesserungen an oberflächenkrümmungsmessungen ATE222349T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9502710.8A GB9502710D0 (en) 1995-02-11 1995-02-11 Improvements in or relating to surface curvature measurement
GB9524883A GB2297836B (en) 1995-02-11 1995-12-05 Improvements in or relating to surface curvature measurement

Publications (1)

Publication Number Publication Date
ATE222349T1 true ATE222349T1 (de) 2002-08-15

Family

ID=26306488

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96101238T ATE222349T1 (de) 1995-02-11 1996-01-26 Verbesserungen an oberflächenkrümmungsmessungen

Country Status (7)

Country Link
US (1) US5633718A (de)
EP (1) EP0726446B1 (de)
JP (1) JP3294985B2 (de)
AT (1) ATE222349T1 (de)
AU (1) AU4225796A (de)
DE (1) DE69622896T2 (de)
ES (1) ES2181814T3 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19851176B4 (de) * 1998-11-06 2010-10-14 Carl Zeiss Meditec Ag Anordnung zur Bestimmung von Krümmungsradien
US6075604A (en) * 1998-11-10 2000-06-13 International Business Machines Corporation Apparatus for measuring curvature of magnetic read/write head sliders
US6538817B1 (en) * 1999-10-25 2003-03-25 Aculight Corporation Method and apparatus for optical coherence tomography with a multispectral laser source
KR100556612B1 (ko) * 2002-06-29 2006-03-06 삼성전자주식회사 레이저를 이용한 위치 측정 장치 및 방법
DE20306904U1 (de) * 2003-05-02 2003-09-04 Otto-von-Guericke-Universität Magdeburg, 39106 Magdeburg Vorrichtung zur Messung der Schichtdicke und der Krümmung von mindestens teilweise reflektierenden Oberflächen von Schichten
DK1528411T3 (da) * 2003-10-27 2010-05-17 Bea Sa Sensor til afstandsmåling
US7570368B2 (en) * 2004-05-12 2009-08-04 Veeco Instruments Inc. Method and apparatus for measuring the curvature of reflective surfaces
FR2879736B1 (fr) * 2004-12-20 2007-02-02 Essilor Int Procede et dispositif de mesure sans contact de la courbure d'un objet ophtalmique
JP5611168B2 (ja) * 2011-10-24 2014-10-22 信越化学工業株式会社 光ファイバの曲率の測定方法
JP6430307B2 (ja) * 2014-03-27 2018-11-28 株式会社ニューフレアテクノロジー 曲率測定装置及び曲率測定方法
TWI506242B (zh) * 2014-12-12 2015-11-01 Ind Tech Res Inst 薄膜曲率量測裝置及其方法
TWI624643B (zh) * 2016-08-19 2018-05-21 財團法人工業技術研究院 一種薄膜曲率量測裝置及其方法
US20180059219A1 (en) * 2016-08-31 2018-03-01 Qualcomm Incorporated Multi-beam position sensing devices
CN110709204B (zh) 2017-03-29 2022-02-01 新泽西鲁特格斯州立大学 小样品曲率半径和热膨胀实时测量系统和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4735508A (en) * 1986-06-02 1988-04-05 Honeywell Inc. Method and apparatus for measuring a curvature of a reflective surface
US5067817A (en) * 1990-02-08 1991-11-26 Bauer Associates, Inc. Method and device for noncontacting self-referencing measurement of surface curvature and profile
GB9205655D0 (en) 1992-03-14 1992-04-29 Roke Manor Research Improvements in or relating to surface curvature measurement

Also Published As

Publication number Publication date
JP3294985B2 (ja) 2002-06-24
US5633718A (en) 1997-05-27
JPH08247741A (ja) 1996-09-27
EP0726446A2 (de) 1996-08-14
EP0726446A3 (de) 1997-12-10
DE69622896D1 (de) 2002-09-19
EP0726446B1 (de) 2002-08-14
AU4225796A (en) 1996-08-22
DE69622896T2 (de) 2002-12-05
ES2181814T3 (es) 2003-03-01

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties