ES2181814T3 - Mejoras relacionadas con la medida de la curvatura superficial. - Google Patents

Mejoras relacionadas con la medida de la curvatura superficial.

Info

Publication number
ES2181814T3
ES2181814T3 ES96101238T ES96101238T ES2181814T3 ES 2181814 T3 ES2181814 T3 ES 2181814T3 ES 96101238 T ES96101238 T ES 96101238T ES 96101238 T ES96101238 T ES 96101238T ES 2181814 T3 ES2181814 T3 ES 2181814T3
Authority
ES
Spain
Prior art keywords
rays
measurement
lens
surface curvature
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96101238T
Other languages
English (en)
Inventor
Kevin Ross Manning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Roke Manor Research Ltd
Original Assignee
Roke Manor Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB9502710.8A external-priority patent/GB9502710D0/en
Application filed by Roke Manor Research Ltd filed Critical Roke Manor Research Ltd
Application granted granted Critical
Publication of ES2181814T3 publication Critical patent/ES2181814T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

EL APARATO MIDE EL RADIO DE CURVATURA DE UNA SUPERFICIE REFLECTORA O PARCIALMENTE REFLECTORA (18), Y COMPRENDE UN PRIMER Y UN SEGUNDO LASER (2, 4) QUE GENERAN DOS RAYOS PARALELOS CON UNA SEPARACION DE DISTANCIA CONOCIDA. UNA LENTE (12) ENFOCA LOS RADIOS, QUE SE HACEN PASAR POR MEDIO DE UN DIVISOR DE LUZ (14) Y DE UNA LENTE DE TRANSFORMACION (16) HASTA LA SUPERFICIE (18). LOS RAYOS SON REFLEJADOS HACIA ATRAS POR MEDIO DE LA LENTE DE TRANSFORMACION (16) Y EL DIVISOR DE LUZ (14) SOBRE UN DETECTOR (20). UN PROCESADOR (22) CALCULA EL RADIO DE CURVATURA DE LA SUPERFICIE DEPENDIENDO DE LA DISTANCIA CONOCIDA X QUE SEPARA LOS RAYOS DE LAS POSICIONES DE LOS RAYOS SOBRE EL DETECTOR (20).
ES96101238T 1995-02-11 1996-01-26 Mejoras relacionadas con la medida de la curvatura superficial. Expired - Lifetime ES2181814T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9502710.8A GB9502710D0 (en) 1995-02-11 1995-02-11 Improvements in or relating to surface curvature measurement
GB9524883A GB2297836B (en) 1995-02-11 1995-12-05 Improvements in or relating to surface curvature measurement

Publications (1)

Publication Number Publication Date
ES2181814T3 true ES2181814T3 (es) 2003-03-01

Family

ID=26306488

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96101238T Expired - Lifetime ES2181814T3 (es) 1995-02-11 1996-01-26 Mejoras relacionadas con la medida de la curvatura superficial.

Country Status (7)

Country Link
US (1) US5633718A (es)
EP (1) EP0726446B1 (es)
JP (1) JP3294985B2 (es)
AT (1) ATE222349T1 (es)
AU (1) AU4225796A (es)
DE (1) DE69622896T2 (es)
ES (1) ES2181814T3 (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19851176B4 (de) * 1998-11-06 2010-10-14 Carl Zeiss Meditec Ag Anordnung zur Bestimmung von Krümmungsradien
US6075604A (en) * 1998-11-10 2000-06-13 International Business Machines Corporation Apparatus for measuring curvature of magnetic read/write head sliders
US6538817B1 (en) * 1999-10-25 2003-03-25 Aculight Corporation Method and apparatus for optical coherence tomography with a multispectral laser source
KR100556612B1 (ko) * 2002-06-29 2006-03-06 삼성전자주식회사 레이저를 이용한 위치 측정 장치 및 방법
DE20306904U1 (de) * 2003-05-02 2003-09-04 Univ Magdeburg Tech Vorrichtung zur Messung der Schichtdicke und der Krümmung von mindestens teilweise reflektierenden Oberflächen von Schichten
ATE456811T1 (de) * 2003-10-27 2010-02-15 Bea Sa Entfernungsmessgerät
US7570368B2 (en) * 2004-05-12 2009-08-04 Veeco Instruments Inc. Method and apparatus for measuring the curvature of reflective surfaces
FR2879736B1 (fr) * 2004-12-20 2007-02-02 Essilor Int Procede et dispositif de mesure sans contact de la courbure d'un objet ophtalmique
JP5611168B2 (ja) * 2011-10-24 2014-10-22 信越化学工業株式会社 光ファイバの曲率の測定方法
JP6430307B2 (ja) * 2014-03-27 2018-11-28 株式会社ニューフレアテクノロジー 曲率測定装置及び曲率測定方法
TWI506242B (zh) * 2014-12-12 2015-11-01 Ind Tech Res Inst 薄膜曲率量測裝置及其方法
TWI624643B (zh) * 2016-08-19 2018-05-21 財團法人工業技術研究院 一種薄膜曲率量測裝置及其方法
US20180059219A1 (en) * 2016-08-31 2018-03-01 Qualcomm Incorporated Multi-beam position sensing devices
US11248904B2 (en) 2017-03-29 2022-02-15 Rutgers, The State University Of New Jersey Systems and methods for real time measurement of surface curvature and thermal expansion of small samples

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4735508A (en) * 1986-06-02 1988-04-05 Honeywell Inc. Method and apparatus for measuring a curvature of a reflective surface
US5067817A (en) * 1990-02-08 1991-11-26 Bauer Associates, Inc. Method and device for noncontacting self-referencing measurement of surface curvature and profile
GB9205655D0 (en) 1992-03-14 1992-04-29 Roke Manor Research Improvements in or relating to surface curvature measurement

Also Published As

Publication number Publication date
EP0726446B1 (en) 2002-08-14
AU4225796A (en) 1996-08-22
JPH08247741A (ja) 1996-09-27
EP0726446A3 (en) 1997-12-10
EP0726446A2 (en) 1996-08-14
DE69622896T2 (de) 2002-12-05
DE69622896D1 (de) 2002-09-19
ATE222349T1 (de) 2002-08-15
JP3294985B2 (ja) 2002-06-24
US5633718A (en) 1997-05-27

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