DE68925212T2 - Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten - Google Patents

Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten

Info

Publication number
DE68925212T2
DE68925212T2 DE68925212T DE68925212T DE68925212T2 DE 68925212 T2 DE68925212 T2 DE 68925212T2 DE 68925212 T DE68925212 T DE 68925212T DE 68925212 T DE68925212 T DE 68925212T DE 68925212 T2 DE68925212 T2 DE 68925212T2
Authority
DE
Germany
Prior art keywords
path
modulator
light divider
unit
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68925212T
Other languages
English (en)
Other versions
DE68925212D1 (de
Inventor
Vladimir Viktorovich Khopov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Publication of DE68925212D1 publication Critical patent/DE68925212D1/de
Application granted granted Critical
Publication of DE68925212T2 publication Critical patent/DE68925212T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE68925212T 1989-06-30 1989-06-30 Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten Expired - Fee Related DE68925212T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1989/000184 WO1991000496A1 (en) 1989-06-30 1989-06-30 Method and device for determining surface profile of diffusion-reflecting objects

Publications (2)

Publication Number Publication Date
DE68925212D1 DE68925212D1 (de) 1996-02-01
DE68925212T2 true DE68925212T2 (de) 1996-05-15

Family

ID=21617505

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925212T Expired - Fee Related DE68925212T2 (de) 1989-06-30 1989-06-30 Verfahren und vorrichtung zur determination des oberflächenprofils von diffus-reflektierenden objekten

Country Status (4)

Country Link
EP (1) EP0480028B1 (de)
AT (1) ATE131927T1 (de)
DE (1) DE68925212T2 (de)
WO (1) WO1991000496A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992013901A1 (en) * 1991-02-12 1992-08-20 Landec Corporation Temperature zone specific pressure-sensitive adhesive compositions, and adhesive assemblies and methods of use associated therewith
RU2092787C1 (ru) * 1992-07-27 1997-10-10 Фирма "RENISHAW PLC" Способ определения коротких дистанций до диффузно-отражающих объектов и устройство для его осуществления
US5313479A (en) * 1992-07-29 1994-05-17 Texas Instruments Incorporated Speckle-free display system using coherent light
EP1103785A1 (de) * 1999-11-26 2001-05-30 Nova C.O.R.D. Ag Verfahren und Vorrichtung zur Ermittlung von Formveränderungen an torusförmigen Prüfobjekten
JP2011038829A (ja) * 2009-08-07 2011-02-24 Topcon Corp 干渉顕微鏡及び測定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225240A (en) * 1978-06-05 1980-09-30 Balasubramanian N Method and system for determining interferometric optical path length difference
US4387994A (en) * 1980-02-04 1983-06-14 Balasubramanian N Optical system for surface topography measurement
FI823028A0 (fi) * 1982-09-01 1982-09-01 Kalevi Juhani Kalliomaeki Foerfarande foer maetning av korta straeckor med en interferometer som utnyttjar icke-koherent ljus, samt foer utfoerande av foerfarandet avsedd interferometer

Also Published As

Publication number Publication date
EP0480028B1 (de) 1995-12-20
EP0480028A1 (de) 1992-04-15
EP0480028A4 (en) 1993-05-26
WO1991000496A1 (en) 1991-01-10
DE68925212D1 (de) 1996-02-01
ATE131927T1 (de) 1996-01-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee