FR2479974B1 - Dispositif de compensation pour interferometre a laser - Google Patents

Dispositif de compensation pour interferometre a laser

Info

Publication number
FR2479974B1
FR2479974B1 FR8106804A FR8106804A FR2479974B1 FR 2479974 B1 FR2479974 B1 FR 2479974B1 FR 8106804 A FR8106804 A FR 8106804A FR 8106804 A FR8106804 A FR 8106804A FR 2479974 B1 FR2479974 B1 FR 2479974B1
Authority
FR
France
Prior art keywords
laser interferometer
prism
laser
compensation device
compensating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8106804A
Other languages
English (en)
Other versions
FR2479974A1 (fr
Inventor
Gerhard Westerberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mycronic AB
Original Assignee
Micronic AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronic AB filed Critical Micronic AB
Publication of FR2479974A1 publication Critical patent/FR2479974A1/fr
Application granted granted Critical
Publication of FR2479974B1 publication Critical patent/FR2479974B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8106804A 1980-04-03 1981-04-03 Dispositif de compensation pour interferometre a laser Expired FR2479974B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer

Publications (2)

Publication Number Publication Date
FR2479974A1 FR2479974A1 (fr) 1981-10-09
FR2479974B1 true FR2479974B1 (fr) 1986-08-08

Family

ID=20340687

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8106804A Expired FR2479974B1 (fr) 1980-04-03 1981-04-03 Dispositif de compensation pour interferometre a laser

Country Status (5)

Country Link
US (1) US4385835A (fr)
JP (1) JPS5710403A (fr)
FR (1) FR2479974B1 (fr)
GB (1) GB2073414B (fr)
SE (1) SE445778B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable
JPS60253945A (ja) * 1984-05-31 1985-12-14 Matsushita Electric Ind Co Ltd 形状測定装置
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry
JP4032841B2 (ja) * 2002-06-21 2008-01-16 株式会社島津製作所 二光束干渉計の固定鏡調整方法
DE102005046605A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Interferometrische Messeinrichtung
DE102006001732A1 (de) * 2006-01-13 2007-07-19 Robert Bosch Gmbh Interferometrische Messvorrichtung
US20100020331A1 (en) * 2008-07-25 2010-01-28 Micronic Laser Systems Ab Laser interferometer systems and methods with suppressed error and pattern generators having the same
JP6953673B2 (ja) * 2016-08-18 2021-10-27 日本電気株式会社 光測定装置および光軸調整方法
WO2019098005A1 (fr) * 2017-11-16 2019-05-23 日本電気株式会社 Dispositif de mesure optique et procédé de mesure optique

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520613A (en) * 1966-11-14 1970-07-14 Optomechanisms Inc Interferometer with environmental correction computer
US3809481A (en) * 1972-12-01 1974-05-07 Nasa Single reflector interference spectrometer and drive system therefor
US4053231A (en) * 1975-12-18 1977-10-11 Nasa Interferometer mirror tilt correcting system

Also Published As

Publication number Publication date
FR2479974A1 (fr) 1981-10-09
JPS5710403A (en) 1982-01-20
GB2073414A (en) 1981-10-14
US4385835A (en) 1983-05-31
GB2073414B (en) 1984-02-15
SE8002604L (sv) 1981-10-04
SE445778B (sv) 1986-07-14
JPH0216442B2 (fr) 1990-04-17

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse