GB2020845A - Optical Compensation of Measuring Errors - Google Patents

Optical Compensation of Measuring Errors

Info

Publication number
GB2020845A
GB2020845A GB7916162A GB7916162A GB2020845A GB 2020845 A GB2020845 A GB 2020845A GB 7916162 A GB7916162 A GB 7916162A GB 7916162 A GB7916162 A GB 7916162A GB 2020845 A GB2020845 A GB 2020845A
Authority
GB
United Kingdom
Prior art keywords
measuring
reflector
telescope
slide
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7916162A
Other versions
GB2020845B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of GB2020845A publication Critical patent/GB2020845A/en
Application granted granted Critical
Publication of GB2020845B publication Critical patent/GB2020845B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/04—Catoptric systems, e.g. image erecting and reversing system using prisms only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses

Abstract

Apparatus, for use in machine tools and co-ordinate measuring devices for compensating first order measuring errors due to neglecting the Abbe comparator principle, comprising a frame (1), a light source (6) a beam splitter (not shown), an interferometer (not shown) and a reflector (9) for producing a measuring beam (5), the reflector and a compensation system comprising a plano-parallel plate (7) and a telescope (8) which, in use, produce the compensation effect being arranged on a slide (2) displaceable along an axis inclined relative to a reference or measuring axis (4), the light source (6) and the beam splitter being rigidly secured to the frame (1), the plate (7) and the telescope (8) being arranged in front of the reflector (9) in the path of the measuring beam (5) and being mounted fast to the slide (2). <IMAGE>
GB7916162A 1978-05-10 1979-05-10 Optical compensation of measuring errors Expired GB2020845B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20528778A DD136536B1 (en) 1978-05-10 1978-05-10 ARRANGEMENT FOR COMPENSATING FIRST-ORDER MEASUREMENT ERRORS

Publications (2)

Publication Number Publication Date
GB2020845A true GB2020845A (en) 1979-11-21
GB2020845B GB2020845B (en) 1982-08-04

Family

ID=5512580

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7916162A Expired GB2020845B (en) 1978-05-10 1979-05-10 Optical compensation of measuring errors

Country Status (5)

Country Link
JP (1) JPS54153056A (en)
CS (1) CS217421B1 (en)
DD (1) DD136536B1 (en)
DE (1) DE2909573A1 (en)
GB (1) GB2020845B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8452564B2 (en) * 2007-05-10 2013-05-28 Hexagon Metrology S.P.A. Method of determining geometric errors in a machine tool or measuring machine

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739308U (en) * 1980-08-18 1982-03-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8452564B2 (en) * 2007-05-10 2013-05-28 Hexagon Metrology S.P.A. Method of determining geometric errors in a machine tool or measuring machine

Also Published As

Publication number Publication date
CS217421B1 (en) 1983-01-28
DD136536B1 (en) 1980-07-23
GB2020845B (en) 1982-08-04
JPS54153056A (en) 1979-12-01
DE2909573A1 (en) 1979-11-15
DD136536A1 (en) 1979-07-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee