JPS54153056A - Device for correcting primary measurement error - Google Patents

Device for correcting primary measurement error

Info

Publication number
JPS54153056A
JPS54153056A JP5639079A JP5639079A JPS54153056A JP S54153056 A JPS54153056 A JP S54153056A JP 5639079 A JP5639079 A JP 5639079A JP 5639079 A JP5639079 A JP 5639079A JP S54153056 A JPS54153056 A JP S54153056A
Authority
JP
Japan
Prior art keywords
measurement error
primary measurement
correcting primary
correcting
error
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5639079A
Other languages
Japanese (ja)
Inventor
Guramusu Geruharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS54153056A publication Critical patent/JPS54153056A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/04—Catoptric systems, e.g. image erecting and reversing system using prisms only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
JP5639079A 1978-05-10 1979-05-10 Device for correcting primary measurement error Pending JPS54153056A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD20528778A DD136536B1 (en) 1978-05-10 1978-05-10 ARRANGEMENT FOR COMPENSATING FIRST-ORDER MEASUREMENT ERRORS

Publications (1)

Publication Number Publication Date
JPS54153056A true JPS54153056A (en) 1979-12-01

Family

ID=5512580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5639079A Pending JPS54153056A (en) 1978-05-10 1979-05-10 Device for correcting primary measurement error

Country Status (5)

Country Link
JP (1) JPS54153056A (en)
CS (1) CS217421B1 (en)
DD (1) DD136536B1 (en)
DE (1) DE2909573A1 (en)
GB (1) GB2020845B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739308U (en) * 1980-08-18 1982-03-03

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20070318A1 (en) * 2007-05-10 2008-11-11 Hexagon Metrology Spa METHOD FOR DETERMINING GEOMETRIC ERRORS IN A MACHINE TOOL OR MEASUREMENT

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739308U (en) * 1980-08-18 1982-03-03

Also Published As

Publication number Publication date
GB2020845A (en) 1979-11-21
CS217421B1 (en) 1983-01-28
DE2909573A1 (en) 1979-11-15
DD136536B1 (en) 1980-07-23
DD136536A1 (en) 1979-07-11
GB2020845B (en) 1982-08-04

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