FR2247699A1 - Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength - Google Patents

Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength

Info

Publication number
FR2247699A1
FR2247699A1 FR7336313A FR7336313A FR2247699A1 FR 2247699 A1 FR2247699 A1 FR 2247699A1 FR 7336313 A FR7336313 A FR 7336313A FR 7336313 A FR7336313 A FR 7336313A FR 2247699 A1 FR2247699 A1 FR 2247699A1
Authority
FR
France
Prior art keywords
wavelength
surface roughness
compares
plate
measuring process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7336313A
Other languages
French (fr)
Other versions
FR2247699B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bpifrance Financement SA
Original Assignee
Agence National de Valorisation de la Recherche ANVAR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agence National de Valorisation de la Recherche ANVAR filed Critical Agence National de Valorisation de la Recherche ANVAR
Priority to FR7336313A priority Critical patent/FR2247699A1/en
Publication of FR2247699A1 publication Critical patent/FR2247699A1/en
Application granted granted Critical
Publication of FR2247699B1 publication Critical patent/FR2247699B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The instrument has a laser or a light source (So), a beam splitter (Ls), beam obstructors (Eo, Eu), a reflector (M) and a lens (L). The measurement consists in using a beam at a set wavelength to light the surface (S) and recording the effect on a photographic plate (R); then, using a beam at a second wavelength to light the surface (S) sightly displaced perpendicularly to the optical axis of the lens (L) and again recording the effect on the plate (R); A beam set at a third wavelength is used to make a spectral analysis of the superimposed images on the plate (R) and thus determine the degree of visibility of the interference fringes of the plate. This degree of visibility is related to the surface roughness to be measured.
FR7336313A 1973-10-11 1973-10-11 Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength Granted FR2247699A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7336313A FR2247699A1 (en) 1973-10-11 1973-10-11 Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7336313A FR2247699A1 (en) 1973-10-11 1973-10-11 Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength

Publications (2)

Publication Number Publication Date
FR2247699A1 true FR2247699A1 (en) 1975-05-09
FR2247699B1 FR2247699B1 (en) 1978-02-17

Family

ID=9126238

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7336313A Granted FR2247699A1 (en) 1973-10-11 1973-10-11 Surface roughness measuring process - compares two different wavelength laser lighted images at third wavelength

Country Status (1)

Country Link
FR (1) FR2247699A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003704A1 (en) * 1980-06-10 1981-12-24 Valmet Oy Procedure for examining the surface quality of materials in solid state of aggregation,and means for carrying out the procedure
EP0126475A1 (en) * 1983-05-21 1984-11-28 Firma Carl Zeiss Process and device for the contactless measuring of the position in situ and/or of the profiles of rough surfaces

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003704A1 (en) * 1980-06-10 1981-12-24 Valmet Oy Procedure for examining the surface quality of materials in solid state of aggregation,and means for carrying out the procedure
EP0126475A1 (en) * 1983-05-21 1984-11-28 Firma Carl Zeiss Process and device for the contactless measuring of the position in situ and/or of the profiles of rough surfaces
WO1984004810A1 (en) * 1983-05-21 1984-12-06 Zeiss Carl Fa Method and device for the contact-free measurement of the actual position and/or the profile of rough surfaces

Also Published As

Publication number Publication date
FR2247699B1 (en) 1978-02-17

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Legal Events

Date Code Title Description
ST Notification of lapse