SE445778B - Kompensationsanordning vid en laserinterferometer - Google Patents

Kompensationsanordning vid en laserinterferometer

Info

Publication number
SE445778B
SE445778B SE8002604A SE8002604A SE445778B SE 445778 B SE445778 B SE 445778B SE 8002604 A SE8002604 A SE 8002604A SE 8002604 A SE8002604 A SE 8002604A SE 445778 B SE445778 B SE 445778B
Authority
SE
Sweden
Prior art keywords
prism
compensation device
laser
laser interferometer
quantities
Prior art date
Application number
SE8002604A
Other languages
English (en)
Swedish (sv)
Other versions
SE8002604L (sv
Inventor
Gerhard Westerberg
Original Assignee
Gerhard Westerberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerhard Westerberg filed Critical Gerhard Westerberg
Priority to SE8002604A priority Critical patent/SE445778B/sv
Priority to US06/248,448 priority patent/US4385835A/en
Priority to GB8109954A priority patent/GB2073414B/en
Priority to FR8106804A priority patent/FR2479974B1/fr
Priority to JP5043681A priority patent/JPS5710403A/ja
Publication of SE8002604L publication Critical patent/SE8002604L/xx
Publication of SE445778B publication Critical patent/SE445778B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE8002604A 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer SE445778B (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer
US06/248,448 US4385835A (en) 1980-04-03 1981-03-27 Compensating device
GB8109954A GB2073414B (en) 1980-04-03 1981-03-31 Compensating device for an interferometer
FR8106804A FR2479974B1 (fr) 1980-04-03 1981-04-03 Dispositif de compensation pour interferometre a laser
JP5043681A JPS5710403A (en) 1980-04-03 1981-04-03 Compensator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer

Publications (2)

Publication Number Publication Date
SE8002604L SE8002604L (sv) 1981-10-04
SE445778B true SE445778B (sv) 1986-07-14

Family

ID=20340687

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer

Country Status (5)

Country Link
US (1) US4385835A (fr)
JP (1) JPS5710403A (fr)
FR (1) FR2479974B1 (fr)
GB (1) GB2073414B (fr)
SE (1) SE445778B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable
JPS60253945A (ja) * 1984-05-31 1985-12-14 Matsushita Electric Ind Co Ltd 形状測定装置
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry
JP4032841B2 (ja) * 2002-06-21 2008-01-16 株式会社島津製作所 二光束干渉計の固定鏡調整方法
DE102005046605A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Interferometrische Messeinrichtung
DE102006001732A1 (de) * 2006-01-13 2007-07-19 Robert Bosch Gmbh Interferometrische Messvorrichtung
US20100020331A1 (en) * 2008-07-25 2010-01-28 Micronic Laser Systems Ab Laser interferometer systems and methods with suppressed error and pattern generators having the same
US10545016B2 (en) * 2016-08-18 2020-01-28 Nec Corporation Light measurement device and optical axis adjustment method
US11231272B2 (en) * 2017-11-16 2022-01-25 Nec Corporation Optical measuring apparatus and optical measuring method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520613A (en) * 1966-11-14 1970-07-14 Optomechanisms Inc Interferometer with environmental correction computer
US3809481A (en) * 1972-12-01 1974-05-07 Nasa Single reflector interference spectrometer and drive system therefor
US4053231A (en) * 1975-12-18 1977-10-11 Nasa Interferometer mirror tilt correcting system

Also Published As

Publication number Publication date
JPH0216442B2 (fr) 1990-04-17
SE8002604L (sv) 1981-10-04
GB2073414A (en) 1981-10-14
FR2479974A1 (fr) 1981-10-09
US4385835A (en) 1983-05-31
FR2479974B1 (fr) 1986-08-08
JPS5710403A (en) 1982-01-20
GB2073414B (en) 1984-02-15

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