DE69016258D1 - Durch Entladung angeregte, gepulste Laservorrichtung. - Google Patents
Durch Entladung angeregte, gepulste Laservorrichtung.Info
- Publication number
- DE69016258D1 DE69016258D1 DE69016258T DE69016258T DE69016258D1 DE 69016258 D1 DE69016258 D1 DE 69016258D1 DE 69016258 T DE69016258 T DE 69016258T DE 69016258 T DE69016258 T DE 69016258T DE 69016258 D1 DE69016258 D1 DE 69016258D1
- Authority
- DE
- Germany
- Prior art keywords
- discharge
- laser device
- pulsed laser
- device excited
- excited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
- H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
- H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1123345A JPH077857B2 (ja) | 1989-05-17 | 1989-05-17 | 放電励起パルスレーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69016258D1 true DE69016258D1 (de) | 1995-03-09 |
DE69016258T2 DE69016258T2 (de) | 1995-06-29 |
Family
ID=14858265
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69016258T Expired - Fee Related DE69016258T2 (de) | 1989-05-17 | 1990-05-17 | Durch Entladung angeregte, gepulste Laservorrichtung. |
DE69029150T Expired - Fee Related DE69029150T2 (de) | 1989-05-17 | 1990-05-17 | Entladungsangeregte Impulslaservorrichtung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69029150T Expired - Fee Related DE69029150T2 (de) | 1989-05-17 | 1990-05-17 | Entladungsangeregte Impulslaservorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5090021A (de) |
EP (2) | EP0398330B1 (de) |
JP (1) | JPH077857B2 (de) |
KR (1) | KR930008356B1 (de) |
CA (1) | CA2017056C (de) |
DE (2) | DE69016258T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5040184A (en) * | 1990-06-04 | 1991-08-13 | Raytheon Company | Starter circuit for an RF laser |
DE69111061T2 (de) * | 1991-02-08 | 1996-04-11 | Mitsubishi Electric Corp | Pulslaservorrichtung. |
US5181217A (en) * | 1991-02-27 | 1993-01-19 | Mitsubishi Denki Kabushiki Kaisha | Laser oscillator circuit |
DE4108474A1 (de) * | 1991-03-15 | 1992-09-17 | Lambda Physik Forschung | Vorrichtung zur vorionisierung eines gepulsten gaslasers |
JPH04311077A (ja) * | 1991-04-08 | 1992-11-02 | Tech Res & Dev Inst Of Japan Def Agency | パルス気体レーザ装置 |
JPH04326584A (ja) * | 1991-04-25 | 1992-11-16 | Matsushita Electric Ind Co Ltd | 放電励起ガスレーザ装置 |
US5202892A (en) * | 1991-11-08 | 1993-04-13 | Kigre, Inc. | Pulse forming and delivery system |
US5309462A (en) * | 1993-02-17 | 1994-05-03 | National Research Council Of Canada | Magnetic spiker gas laser excitation circuit |
CN1034898C (zh) * | 1994-09-21 | 1997-05-14 | 中国科学院电子学研究所 | 高重复频率高平均功率激光器 |
JPH08132321A (ja) * | 1994-11-04 | 1996-05-28 | Mitsubishi Electric Corp | 放電励起パルスレーザ装置 |
JP3815578B2 (ja) * | 1996-07-19 | 2006-08-30 | 忠弘 大見 | エキシマレーザー発振装置 |
US6198761B1 (en) * | 1999-05-07 | 2001-03-06 | Lambda Physik Gmbh | Coaxial laser pulser with solid dielectrics |
WO2001084678A2 (en) | 2000-04-18 | 2001-11-08 | Lambda Physik Ag | Stabilization technique for high repetition rate gas discharge lasers |
US6862307B2 (en) * | 2000-05-15 | 2005-03-01 | Lambda Physik Ag | Electrical excitation circuit for a pulsed gas laser |
US7706424B2 (en) * | 2005-09-29 | 2010-04-27 | Cymer, Inc. | Gas discharge laser system electrodes and power supply for delivering electrical energy to same |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4380079A (en) * | 1980-09-12 | 1983-04-12 | Northrop Corp. | Gas laser preionization device |
IT1171313B (it) * | 1981-06-17 | 1987-06-10 | Selenia Ind Elettroniche | Laser a scarica longitudinale ad impulsi con preionizzazione ottenuta mediante effetto corona |
DE3240372A1 (de) * | 1982-11-02 | 1984-05-03 | Kraftwerk Union AG, 4330 Mülheim | Anregungssystem zur erzeugung einer schnellen, gepulsten hochspannungsentladung, insbesondere zur anregung eines hochleistungslasers |
DE3313811A1 (de) * | 1983-04-15 | 1984-10-18 | Siemens AG, 1000 Berlin und 8000 München | Transversal angeregter gaslaser |
IT1197768B (it) * | 1983-12-29 | 1988-12-06 | Selenia Ind Elettroniche | Preionizzatore ad effetto corona per laser a gas |
EP0243374A4 (de) * | 1985-10-18 | 1988-02-15 | Amoco Corp | Elektrische anregungsschaltung für gaslaser. |
DE3705165A1 (de) * | 1986-02-18 | 1987-08-20 | Mitsubishi Electric Corp | Mit entladungserregung arbeitende laservorrichtung fuer kurze impulse |
US4975921A (en) * | 1989-03-29 | 1990-12-04 | Lasertechnics, Inc. | Integrated prepulse circuits for efficient excitation of gas lasers |
-
1989
- 1989-05-17 JP JP1123345A patent/JPH077857B2/ja not_active Expired - Fee Related
-
1990
- 1990-05-15 KR KR1019900006883A patent/KR930008356B1/ko not_active IP Right Cessation
- 1990-05-15 US US07/523,688 patent/US5090021A/en not_active Expired - Lifetime
- 1990-05-17 DE DE69016258T patent/DE69016258T2/de not_active Expired - Fee Related
- 1990-05-17 DE DE69029150T patent/DE69029150T2/de not_active Expired - Fee Related
- 1990-05-17 EP EP90109341A patent/EP0398330B1/de not_active Expired - Lifetime
- 1990-05-17 EP EP93119529A patent/EP0589494B1/de not_active Expired - Lifetime
- 1990-05-17 CA CA002017056A patent/CA2017056C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69029150D1 (de) | 1996-12-19 |
DE69029150T2 (de) | 1997-04-03 |
JPH02303083A (ja) | 1990-12-17 |
EP0589494B1 (de) | 1996-11-13 |
EP0398330A3 (de) | 1991-01-23 |
EP0589494A1 (de) | 1994-03-30 |
EP0398330A2 (de) | 1990-11-22 |
CA2017056A1 (en) | 1990-11-17 |
CA2017056C (en) | 1994-09-20 |
JPH077857B2 (ja) | 1995-01-30 |
KR900019299A (ko) | 1990-12-24 |
DE69016258T2 (de) | 1995-06-29 |
EP0398330B1 (de) | 1995-01-25 |
US5090021A (en) | 1992-02-18 |
KR930008356B1 (ko) | 1993-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |