DE69005263D1 - Verbesserte Vorionisationselektrode für gepulste Gaslaser. - Google Patents

Verbesserte Vorionisationselektrode für gepulste Gaslaser.

Info

Publication number
DE69005263D1
DE69005263D1 DE90119044T DE69005263T DE69005263D1 DE 69005263 D1 DE69005263 D1 DE 69005263D1 DE 90119044 T DE90119044 T DE 90119044T DE 69005263 T DE69005263 T DE 69005263T DE 69005263 D1 DE69005263 D1 DE 69005263D1
Authority
DE
Germany
Prior art keywords
gas lasers
ionization electrode
pulsed gas
improved pre
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE90119044T
Other languages
English (en)
Other versions
DE69005263T2 (de
Inventor
Robert E Eldridge
David B Cohn
Wayde H Affleck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE69005263D1 publication Critical patent/DE69005263D1/de
Publication of DE69005263T2 publication Critical patent/DE69005263T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE90119044T 1989-10-23 1990-10-04 Verbesserte Vorionisationselektrode für gepulste Gaslaser. Expired - Lifetime DE69005263T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/425,264 US4953174A (en) 1989-10-23 1989-10-23 Preionization electrode for pulsed gas laser

Publications (2)

Publication Number Publication Date
DE69005263D1 true DE69005263D1 (de) 1994-01-27
DE69005263T2 DE69005263T2 (de) 1994-04-07

Family

ID=23685836

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90119044T Expired - Lifetime DE69005263T2 (de) 1989-10-23 1990-10-04 Verbesserte Vorionisationselektrode für gepulste Gaslaser.

Country Status (7)

Country Link
US (1) US4953174A (de)
EP (1) EP0426993B1 (de)
JP (1) JP2564423B2 (de)
DE (1) DE69005263T2 (de)
IL (1) IL95786A (de)
NO (1) NO904553L (de)
TR (1) TR25724A (de)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2233814B (en) * 1989-07-10 1994-06-22 Toshiba Kk Laser apparatus
US4953174A (en) * 1989-10-23 1990-08-28 Hughes Aircraft Company Preionization electrode for pulsed gas laser
US5153892A (en) * 1990-01-24 1992-10-06 Hitachi, Ltd. High-pressure gas laser apparatus and method of laser processing
DE4108474A1 (de) * 1991-03-15 1992-09-17 Lambda Physik Forschung Vorrichtung zur vorionisierung eines gepulsten gaslasers
US5557629A (en) * 1992-08-28 1996-09-17 Kabushiki Kaisha Komatsu Seisakusho Laser device having an electrode with auxiliary conductor members
US5337330A (en) * 1992-10-09 1994-08-09 Cymer Laser Technologies Pre-ionizer for a laser
DE19845586B4 (de) * 1997-10-03 2008-04-03 Komatsu Ltd. Entladungsschaltung für einen Impulslaser mit einer Impulsleistungsquelle
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) * 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6490307B1 (en) 1999-03-17 2002-12-03 Lambda Physik Ag Method and procedure to automatically stabilize excimer laser output parameters
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6965624B2 (en) * 1999-03-17 2005-11-15 Lambda Physik Ag Laser gas replenishment method
US6389052B2 (en) 1999-03-17 2002-05-14 Lambda Physik Ag Laser gas replenishment method
US6727731B1 (en) 1999-03-12 2004-04-27 Lambda Physik Ag Energy control for an excimer or molecular fluorine laser
US7856044B2 (en) 1999-05-10 2010-12-21 Cymer, Inc. Extendable electrode for gas discharge laser
US6414979B2 (en) * 2000-06-09 2002-07-02 Cymer, Inc. Gas discharge laser with blade-dielectric electrode
US6546036B1 (en) 1999-06-08 2003-04-08 Lambda Physik Ag Roof configuration for laser discharge electrodes
US6700908B1 (en) * 1999-06-21 2004-03-02 Tui Laser Ag Device for avoiding sliding discharges in pre-ionization in a gas laser with corona discharge
US6785316B1 (en) 1999-08-17 2004-08-31 Lambda Physik Ag Excimer or molecular laser with optimized spectral purity
JP2003521683A (ja) 2000-01-25 2003-07-15 ラムダ フィジーク アーゲー ビーム・パラメータ監視ユニット、分子弗素（Ｆ２）或はＡｒＦレーザ・システム、分子弗素（Ｆ２）レーザ・システム、およびＡｒＦレーザ・システム
US6570901B2 (en) 2000-02-24 2003-05-27 Lambda Physik Ag Excimer or molecular fluorine laser having lengthened electrodes
US6834066B2 (en) 2000-04-18 2004-12-21 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6862307B2 (en) * 2000-05-15 2005-03-01 Lambda Physik Ag Electrical excitation circuit for a pulsed gas laser
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
US7671349B2 (en) * 2003-04-08 2010-03-02 Cymer, Inc. Laser produced plasma EUV light source
US7147759B2 (en) * 2002-09-30 2006-12-12 Zond, Inc. High-power pulsed magnetron sputtering
US6853142B2 (en) * 2002-11-04 2005-02-08 Zond, Inc. Methods and apparatus for generating high-density plasma
US6805779B2 (en) * 2003-03-21 2004-10-19 Zond, Inc. Plasma generation using multi-step ionization
US6806651B1 (en) 2003-04-22 2004-10-19 Zond, Inc. High-density plasma source
US6903511B2 (en) * 2003-05-06 2005-06-07 Zond, Inc. Generation of uniformly-distributed plasma
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
US9771648B2 (en) * 2004-08-13 2017-09-26 Zond, Inc. Method of ionized physical vapor deposition sputter coating high aspect-ratio structures
US6963596B2 (en) * 2004-01-28 2005-11-08 Coherent, Inc. Pre-ionizer for RF-energized gas laser
US7750575B2 (en) * 2004-04-07 2010-07-06 Zond, Inc. High density plasma source
EP1803142A1 (de) * 2004-09-24 2007-07-04 Zond, Inc. Vorrichtung zum erzeugen von elektrischen hochstrom-entladungen
DE102005024931B3 (de) * 2005-05-23 2007-01-11 Ltb-Lasertechnik Gmbh Transversal elektrisch angeregter Gasentladungslaser zur Erzeugung von Lichtpulsen mit hoher Pulsfolgefrequenz und Verfahren zur Herstellung
US20070071047A1 (en) * 2005-09-29 2007-03-29 Cymer, Inc. 6K pulse repetition rate and above gas discharge laser system solid state pulse power system improvements
US7706424B2 (en) * 2005-09-29 2010-04-27 Cymer, Inc. Gas discharge laser system electrodes and power supply for delivering electrical energy to same
US7812329B2 (en) * 2007-12-14 2010-10-12 Cymer, Inc. System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatus
US7655925B2 (en) * 2007-08-31 2010-02-02 Cymer, Inc. Gas management system for a laser-produced-plasma EUV light source
US8519366B2 (en) * 2008-08-06 2013-08-27 Cymer, Inc. Debris protection system having a magnetic field for an EUV light source
JP5687488B2 (ja) 2010-02-22 2015-03-18 ギガフォトン株式会社 極端紫外光生成装置
RU2596908C1 (ru) * 2015-07-31 2016-09-10 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") Устройство формирования объемного разряда

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4464760A (en) * 1982-04-20 1984-08-07 Sutter Jr Leroy V Elongated chambers for use in combination with a transversely excited gas laser
US4620306A (en) * 1982-07-30 1986-10-28 Sutter Jr Leroy V Elongated chambers for use in combination with a transversely excited gas laser
DE3579966D1 (de) * 1984-05-14 1990-11-08 Telecommunications Sa Gaslaser.
JPS60254685A (ja) * 1984-05-31 1985-12-16 Mitsubishi Electric Corp レ−ザ発振器用放電々極
JPS61137380A (ja) * 1984-12-10 1986-06-25 Toshiba Corp 横励起形ガスレ−ザ発振装置
JPS6360577A (ja) * 1986-09-01 1988-03-16 Mitsubishi Electric Corp 無声放電式ガスレ−ザ装置
JPS6360576A (ja) * 1986-09-01 1988-03-16 Mitsubishi Electric Corp 無声放電式ガスレ−ザ装置
JPH01151277A (ja) * 1987-12-09 1989-06-14 Toshiba Corp パルスレーザ電極
US4953174A (en) * 1989-10-23 1990-08-28 Hughes Aircraft Company Preionization electrode for pulsed gas laser

Also Published As

Publication number Publication date
IL95786A0 (en) 1991-06-30
EP0426993B1 (de) 1993-12-15
TR25724A (tr) 1993-09-01
US4953174A (en) 1990-08-28
EP0426993A2 (de) 1991-05-15
IL95786A (en) 1993-04-04
DE69005263T2 (de) 1994-04-07
JP2564423B2 (ja) 1996-12-18
NO904553D0 (no) 1990-10-22
NO904553L (no) 1991-04-24
JPH03151678A (ja) 1991-06-27
EP0426993A3 (en) 1991-05-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO. (N.D.GES.D. STAATES DELAWARE), LEXING