DE69111061T2 - Pulslaservorrichtung. - Google Patents
Pulslaservorrichtung.Info
- Publication number
- DE69111061T2 DE69111061T2 DE69111061T DE69111061T DE69111061T2 DE 69111061 T2 DE69111061 T2 DE 69111061T2 DE 69111061 T DE69111061 T DE 69111061T DE 69111061 T DE69111061 T DE 69111061T DE 69111061 T2 DE69111061 T2 DE 69111061T2
- Authority
- DE
- Germany
- Prior art keywords
- laser device
- pulse laser
- pulse
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Generation Of Surge Voltage And Current (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1991/000152 WO1992014288A1 (fr) | 1991-02-08 | 1991-02-08 | Laser a emission par impulsions |
CA002060896A CA2060896C (en) | 1991-02-08 | 1991-02-08 | Pulse laser apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69111061D1 DE69111061D1 (de) | 1995-08-10 |
DE69111061T2 true DE69111061T2 (de) | 1996-04-11 |
Family
ID=4149226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69111061T Expired - Fee Related DE69111061T2 (de) | 1991-02-08 | 1991-02-08 | Pulslaservorrichtung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5305339A (de) |
EP (1) | EP0526635B1 (de) |
CA (1) | CA2060896C (de) |
DE (1) | DE69111061T2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9318359D0 (en) * | 1993-09-04 | 1993-10-20 | Secr Defence | Pulsed gas lasers |
US6456643B1 (en) | 1999-03-31 | 2002-09-24 | Lambda Physik Ag | Surface preionization for gas lasers |
US6650679B1 (en) | 1999-02-10 | 2003-11-18 | Lambda Physik Ag | Preionization arrangement for gas laser |
US6757315B1 (en) | 1999-02-10 | 2004-06-29 | Lambda Physik Ag | Corona preionization assembly for a gas laser |
JP3775469B2 (ja) * | 2000-03-15 | 2006-05-17 | ウシオ電機株式会社 | ArFエキシマレーザ装置、KrFエキシマレーザ装置及びフッ素レーザ装置 |
US6834066B2 (en) * | 2000-04-18 | 2004-12-21 | Lambda Physik Ag | Stabilization technique for high repetition rate gas discharge lasers |
US6671302B2 (en) | 2000-08-11 | 2003-12-30 | Lambda Physik Ag | Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser |
US6693938B1 (en) * | 2000-09-08 | 2004-02-17 | Komatsu Ltd. | Discharge circuit for pulsed laser |
US6535540B1 (en) * | 2000-09-13 | 2003-03-18 | Komatsu Ltd. | Discharge device for pulsed laser |
DE10215095C1 (de) * | 2002-04-05 | 2003-09-18 | Tuilaser Ag | Excimer-Laser mit Energierückgewinnungsvorrichtung |
TWI687375B (zh) * | 2015-03-20 | 2020-03-11 | 美商康寧公司 | 用於成形基於玻璃的材料之模具與製作該模具之方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3314157A1 (de) * | 1982-04-19 | 1983-12-08 | Kraftwerk Union AG, 4330 Mülheim | Anregungskreis fuer lasersysteme, insbesondere fuer te-hochenergielaser, mit einstellung der vorionisierung |
US4612643A (en) * | 1984-01-30 | 1986-09-16 | Northrop Corporation | Electric glow discharge using prepulse and charge storage device |
DE3705165A1 (de) * | 1986-02-18 | 1987-08-20 | Mitsubishi Electric Corp | Mit entladungserregung arbeitende laservorrichtung fuer kurze impulse |
EP0283044B1 (de) * | 1987-03-19 | 1993-10-13 | Matsushita Electric Industrial Co., Ltd. | Laservorrichtung |
JPH077857B2 (ja) * | 1989-05-17 | 1995-01-30 | 三菱電機株式会社 | 放電励起パルスレーザ装置 |
US5305338A (en) * | 1990-09-25 | 1994-04-19 | Mitsubishi Denki Kabushiki Kaisha | Switch device for laser |
-
1991
- 1991-02-08 CA CA002060896A patent/CA2060896C/en not_active Expired - Fee Related
- 1991-02-08 EP EP91903289A patent/EP0526635B1/de not_active Expired - Lifetime
- 1991-02-08 US US07/793,430 patent/US5305339A/en not_active Expired - Lifetime
- 1991-02-08 DE DE69111061T patent/DE69111061T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5305339A (en) | 1994-04-19 |
EP0526635B1 (de) | 1995-07-05 |
EP0526635A1 (de) | 1993-02-10 |
CA2060896A1 (en) | 1992-08-09 |
DE69111061D1 (de) | 1995-08-10 |
CA2060896C (en) | 1996-11-26 |
EP0526635A4 (en) | 1993-02-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |