DE69111061D1 - Pulslaservorrichtung. - Google Patents

Pulslaservorrichtung.

Info

Publication number
DE69111061D1
DE69111061D1 DE69111061T DE69111061T DE69111061D1 DE 69111061 D1 DE69111061 D1 DE 69111061D1 DE 69111061 T DE69111061 T DE 69111061T DE 69111061 T DE69111061 T DE 69111061T DE 69111061 D1 DE69111061 D1 DE 69111061D1
Authority
DE
Germany
Prior art keywords
laser device
pulse laser
pulse
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69111061T
Other languages
English (en)
Other versions
DE69111061T2 (de
Inventor
Hajime Mitsubishi Den Nakatani
Atsushi Mitsubishi D Sugitatsu
Yasushi Mitsubishi Minamitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority claimed from PCT/JP1991/000152 external-priority patent/WO1992014288A1/ja
Publication of DE69111061D1 publication Critical patent/DE69111061D1/de
Application granted granted Critical
Publication of DE69111061T2 publication Critical patent/DE69111061T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/097Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Generation Of Surge Voltage And Current (AREA)
DE69111061T 1991-02-08 1991-02-08 Pulslaservorrichtung. Expired - Fee Related DE69111061T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA002060896A CA2060896C (en) 1991-02-08 1991-02-08 Pulse laser apparatus
PCT/JP1991/000152 WO1992014288A1 (fr) 1991-02-08 1991-02-08 Laser a emission par impulsions

Publications (2)

Publication Number Publication Date
DE69111061D1 true DE69111061D1 (de) 1995-08-10
DE69111061T2 DE69111061T2 (de) 1996-04-11

Family

ID=4149226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111061T Expired - Fee Related DE69111061T2 (de) 1991-02-08 1991-02-08 Pulslaservorrichtung.

Country Status (4)

Country Link
US (1) US5305339A (de)
EP (1) EP0526635B1 (de)
CA (1) CA2060896C (de)
DE (1) DE69111061T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9318359D0 (en) * 1993-09-04 1993-10-20 Secr Defence Pulsed gas lasers
US6650679B1 (en) 1999-02-10 2003-11-18 Lambda Physik Ag Preionization arrangement for gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
JP3775469B2 (ja) * 2000-03-15 2006-05-17 ウシオ電機株式会社 ArFエキシマレーザ装置、KrFエキシマレーザ装置及びフッ素レーザ装置
WO2001084678A2 (en) * 2000-04-18 2001-11-08 Lambda Physik Ag Stabilization technique for high repetition rate gas discharge lasers
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6693938B1 (en) * 2000-09-08 2004-02-17 Komatsu Ltd. Discharge circuit for pulsed laser
US6535540B1 (en) * 2000-09-13 2003-03-18 Komatsu Ltd. Discharge device for pulsed laser
DE10215095C1 (de) * 2002-04-05 2003-09-18 Tuilaser Ag Excimer-Laser mit Energierückgewinnungsvorrichtung
TWI687375B (zh) * 2015-03-20 2020-03-11 美商康寧公司 用於成形基於玻璃的材料之模具與製作該模具之方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3314157A1 (de) * 1982-04-19 1983-12-08 Kraftwerk Union AG, 4330 Mülheim Anregungskreis fuer lasersysteme, insbesondere fuer te-hochenergielaser, mit einstellung der vorionisierung
US4612643A (en) * 1984-01-30 1986-09-16 Northrop Corporation Electric glow discharge using prepulse and charge storage device
DE3705165A1 (de) * 1986-02-18 1987-08-20 Mitsubishi Electric Corp Mit entladungserregung arbeitende laservorrichtung fuer kurze impulse
EP0283044B1 (de) * 1987-03-19 1993-10-13 Matsushita Electric Industrial Co., Ltd. Laservorrichtung
JPH077857B2 (ja) * 1989-05-17 1995-01-30 三菱電機株式会社 放電励起パルスレーザ装置
US5305338A (en) * 1990-09-25 1994-04-19 Mitsubishi Denki Kabushiki Kaisha Switch device for laser

Also Published As

Publication number Publication date
US5305339A (en) 1994-04-19
EP0526635A1 (de) 1993-02-10
CA2060896A1 (en) 1992-08-09
DE69111061T2 (de) 1996-04-11
CA2060896C (en) 1996-11-26
EP0526635A4 (en) 1993-02-24
EP0526635B1 (de) 1995-07-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee