DE69018940T2 - Laser, angeregt durch hf-entladung. - Google Patents
Laser, angeregt durch hf-entladung.Info
- Publication number
- DE69018940T2 DE69018940T2 DE69018940T DE69018940T DE69018940T2 DE 69018940 T2 DE69018940 T2 DE 69018940T2 DE 69018940 T DE69018940 T DE 69018940T DE 69018940 T DE69018940 T DE 69018940T DE 69018940 T2 DE69018940 T2 DE 69018940T2
- Authority
- DE
- Germany
- Prior art keywords
- excited
- laser
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1013560A JP2644315B2 (ja) | 1989-01-23 | 1989-01-23 | 高周波放電励起レーザ装置 |
PCT/JP1990/000054 WO1990008415A1 (en) | 1989-01-23 | 1990-01-17 | High-frequency discharge-excited laser |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69018940D1 DE69018940D1 (de) | 1995-06-01 |
DE69018940T2 true DE69018940T2 (de) | 1995-08-24 |
Family
ID=11836561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69018940T Expired - Fee Related DE69018940T2 (de) | 1989-01-23 | 1990-01-17 | Laser, angeregt durch hf-entladung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5091914A (de) |
EP (1) | EP0429652B1 (de) |
JP (1) | JP2644315B2 (de) |
DE (1) | DE69018940T2 (de) |
WO (1) | WO1990008415A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5177761A (en) * | 1991-10-17 | 1993-01-05 | Spectra-Physics Lasers, Inc. | Gas discharge tube having refractory ceramic coated bore disc for ion laser |
JP2830671B2 (ja) * | 1993-01-07 | 1998-12-02 | 三菱電機株式会社 | レーザ発振器の出力制御装置 |
JP3315556B2 (ja) * | 1994-04-27 | 2002-08-19 | 三菱電機株式会社 | レーザ加工装置 |
US5682400A (en) * | 1995-09-27 | 1997-10-28 | Krasnov; Alexander V. | Supersonic and subsonic laser with high frequency discharge excitation |
US6636545B2 (en) | 1996-09-26 | 2003-10-21 | Alexander V. Krasnov | Supersonic and subsonic laser with radio frequency excitation |
US6198762B1 (en) | 1996-09-26 | 2001-03-06 | Yuri Krasnov | Supersonic and subsonic laser with RF discharge excitation |
JP2836566B2 (ja) * | 1995-12-08 | 1998-12-14 | 日本電気株式会社 | 波長安定化狭帯域エキシマレーザ装置 |
US5748656A (en) | 1996-01-05 | 1998-05-05 | Cymer, Inc. | Laser having improved beam quality and reduced operating cost |
JP3036514B2 (ja) * | 1998-06-26 | 2000-04-24 | 松下電器産業株式会社 | ガスレーザ発振装置 |
JP3797980B2 (ja) * | 2003-05-09 | 2006-07-19 | ファナック株式会社 | レーザ加工装置 |
US7263116B2 (en) * | 2004-08-05 | 2007-08-28 | Coherent, Inc. | Dielectric coupled CO2 slab laser |
RU2411619C1 (ru) * | 2009-10-15 | 2011-02-10 | Александр Васильевич Краснов | Газовый лазер с возбуждением высокочастотным разрядом |
JP5813152B2 (ja) * | 2014-02-27 | 2015-11-17 | ファナック株式会社 | レーザ電源の調整レベルを制御するガスレーザ発振器 |
US11095088B1 (en) | 2018-02-21 | 2021-08-17 | Zoyka Llc | Multi-pass coaxial molecular gas laser |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4418589Y1 (de) * | 1965-01-25 | 1969-08-11 | ||
US4122409A (en) * | 1976-03-10 | 1978-10-24 | Xerox Corporation | Method and apparatus for controlling the intensity of a laser output beam |
JPS558017A (en) * | 1978-06-30 | 1980-01-21 | Fujitsu Ltd | Laser ray output stabilizing method |
JPS58151083A (ja) * | 1982-03-03 | 1983-09-08 | Toshiba Corp | 横流型ガスレ−ザ装置 |
JPS598386A (ja) * | 1982-07-06 | 1984-01-17 | Tohoku Richo Kk | レ−ザ装置 |
JPS5954486A (ja) * | 1982-09-20 | 1984-03-29 | Matsushita Electric Ind Co Ltd | レ−ザ照射装置 |
JPS5984485A (ja) * | 1982-11-05 | 1984-05-16 | Nec Corp | ガスレ−ザ装置 |
JPS61208884A (ja) * | 1985-03-14 | 1986-09-17 | Mitsubishi Electric Corp | レ−ザ発振器 |
US4785456A (en) * | 1986-04-14 | 1988-11-15 | Lasers For Medicine Inc. | Self-contained laser system |
JPS62249494A (ja) * | 1986-04-23 | 1987-10-30 | Mitsubishi Electric Corp | ガスレ−ザ装置 |
JPS631088A (ja) * | 1986-06-20 | 1988-01-06 | Toshiba Corp | ガスレーザ発振器 |
JP2647832B2 (ja) * | 1986-08-06 | 1997-08-27 | 日本電気株式会社 | レーザ発振器 |
JPS6386592A (ja) * | 1986-09-30 | 1988-04-16 | Toshiba Corp | 放電電流検出装置 |
JPH0821747B2 (ja) * | 1987-04-23 | 1996-03-04 | 日本電気株式会社 | 光伝送装置 |
JPH01243596A (ja) * | 1988-03-25 | 1989-09-28 | Ushio Inc | 金属蒸気レーザ装置 |
US4856010A (en) * | 1988-07-18 | 1989-08-08 | Hughes Aircraft Company | Laser frequency control |
-
1989
- 1989-01-23 JP JP1013560A patent/JP2644315B2/ja not_active Expired - Lifetime
-
1990
- 1990-01-17 EP EP90901909A patent/EP0429652B1/de not_active Expired - Lifetime
- 1990-01-17 WO PCT/JP1990/000054 patent/WO1990008415A1/ja active IP Right Grant
- 1990-01-17 US US07/571,647 patent/US5091914A/en not_active Expired - Fee Related
- 1990-01-17 DE DE69018940T patent/DE69018940T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5091914A (en) | 1992-02-25 |
EP0429652A4 (en) | 1991-10-23 |
EP0429652A1 (de) | 1991-06-05 |
EP0429652B1 (de) | 1995-04-26 |
JP2644315B2 (ja) | 1997-08-25 |
WO1990008415A1 (en) | 1990-07-26 |
DE69018940D1 (de) | 1995-06-01 |
JPH02194579A (ja) | 1990-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |