DE69013707D1 - Verfahren zur Partikelentfernung von Substratoberflächen. - Google Patents

Verfahren zur Partikelentfernung von Substratoberflächen.

Info

Publication number
DE69013707D1
DE69013707D1 DE69013707T DE69013707T DE69013707D1 DE 69013707 D1 DE69013707 D1 DE 69013707D1 DE 69013707 T DE69013707 T DE 69013707T DE 69013707 T DE69013707 T DE 69013707T DE 69013707 D1 DE69013707 D1 DE 69013707D1
Authority
DE
Germany
Prior art keywords
substrates
coating
coated
vacuum
pvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69013707T
Other languages
English (en)
Other versions
DE69013707T2 (de
Inventor
Horst-Christian Langowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polygram Manufacturing & Distr
Original Assignee
Polygram Manufacturing & Distr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polygram Manufacturing & Distr filed Critical Polygram Manufacturing & Distr
Priority to DE69013707T priority Critical patent/DE69013707T2/de
Application granted granted Critical
Publication of DE69013707D1 publication Critical patent/DE69013707D1/de
Publication of DE69013707T2 publication Critical patent/DE69013707T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Weting (AREA)
DE69013707T 1989-02-01 1990-01-29 Verfahren zur Partikelentfernung von Substratoberflächen. Expired - Fee Related DE69013707T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69013707T DE69013707T2 (de) 1989-02-01 1990-01-29 Verfahren zur Partikelentfernung von Substratoberflächen.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3902862A DE3902862A1 (de) 1989-02-01 1989-02-01 Verfahren zur entfernung von partikeln auf substratoberflaechen
DE69013707T DE69013707T2 (de) 1989-02-01 1990-01-29 Verfahren zur Partikelentfernung von Substratoberflächen.

Publications (2)

Publication Number Publication Date
DE69013707D1 true DE69013707D1 (de) 1994-12-08
DE69013707T2 DE69013707T2 (de) 1995-06-08

Family

ID=6373166

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3902862A Withdrawn DE3902862A1 (de) 1989-02-01 1989-02-01 Verfahren zur entfernung von partikeln auf substratoberflaechen
DE69013707T Expired - Fee Related DE69013707T2 (de) 1989-02-01 1990-01-29 Verfahren zur Partikelentfernung von Substratoberflächen.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3902862A Withdrawn DE3902862A1 (de) 1989-02-01 1989-02-01 Verfahren zur entfernung von partikeln auf substratoberflaechen

Country Status (6)

Country Link
US (1) US4996078A (de)
EP (1) EP0381278B1 (de)
JP (1) JPH02240254A (de)
AT (1) ATE113667T1 (de)
CA (1) CA2008765A1 (de)
DE (2) DE3902862A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0622627A1 (de) * 1993-04-30 1994-11-02 Applied Materials, Inc. Verfahren und Vorrichtung zum Nachweis von Teilchen auf einem Substrat
CA2130388A1 (en) * 1993-09-23 1995-03-24 Joel L. Williams Process for barrier coating of plastic objects
EP0987700B1 (de) * 1997-05-08 2004-08-25 Matsushita Electric Industrial Co., Ltd. Vorrichtung und verfahren zur herstellung eines aufzeichnungsträgers
US6080650A (en) * 1998-02-04 2000-06-27 Texas Instruments Incorporated Method and apparatus for attaching particles to a substrate
FR2885995B1 (fr) * 2005-05-20 2007-07-06 Eurokera Plaque vitroceramique et son procede de fabrication
KR101331213B1 (ko) * 2007-06-05 2013-11-20 삼성디스플레이 주식회사 기판 가공장치
US9358590B2 (en) 2011-03-23 2016-06-07 Sri International Electroadhesive surface cleaner
JP5818962B2 (ja) 2011-03-23 2015-11-18 エスアールアイ インターナショナルＳＲＩ Ｉｎｔｅｒｎａｔｉｏｎａｌ 能動式電気吸着清掃
JP7282030B2 (ja) 2016-11-10 2023-05-26 コーニング インコーポレイテッド スパッタリング堆積中の粒子の減少

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60141869A (ja) * 1983-12-29 1985-07-26 Nissin Electric Co Ltd 膜形成方法および膜形成装置
DD263084A1 (de) * 1987-07-27 1988-12-21 Akad Wissenschaften Ddr Verfahren zur herstellung homogener und haftfester metallschichten

Also Published As

Publication number Publication date
DE69013707T2 (de) 1995-06-08
ATE113667T1 (de) 1994-11-15
DE3902862A1 (de) 1990-08-02
EP0381278A1 (de) 1990-08-08
US4996078A (en) 1991-02-26
CA2008765A1 (en) 1990-08-01
JPH02240254A (ja) 1990-09-25
EP0381278B1 (de) 1994-11-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee