DE69010868T2 - Mikroskop-Spektrometer mit Cassegrain-Objektiv. - Google Patents

Mikroskop-Spektrometer mit Cassegrain-Objektiv.

Info

Publication number
DE69010868T2
DE69010868T2 DE69010868T DE69010868T DE69010868T2 DE 69010868 T2 DE69010868 T2 DE 69010868T2 DE 69010868 T DE69010868 T DE 69010868T DE 69010868 T DE69010868 T DE 69010868T DE 69010868 T2 DE69010868 T2 DE 69010868T2
Authority
DE
Germany
Prior art keywords
cassegrain lens
microscope spectrometer
spectrometer
microscope
cassegrain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69010868T
Other languages
English (en)
Other versions
DE69010868D1 (de
Inventor
Juichiro Ukon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Application granted granted Critical
Publication of DE69010868D1 publication Critical patent/DE69010868D1/de
Publication of DE69010868T2 publication Critical patent/DE69010868T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G02B21/04—Objectives involving mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0096—Microscopes with photometer devices

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
DE69010868T 1989-11-03 1990-10-26 Mikroskop-Spektrometer mit Cassegrain-Objektiv. Expired - Fee Related DE69010868T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1286891A JPH0776745B2 (ja) 1989-11-03 1989-11-03 顕微分光測定装置

Publications (2)

Publication Number Publication Date
DE69010868D1 DE69010868D1 (de) 1994-08-25
DE69010868T2 true DE69010868T2 (de) 1995-02-23

Family

ID=17710340

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69010868T Expired - Fee Related DE69010868T2 (de) 1989-11-03 1990-10-26 Mikroskop-Spektrometer mit Cassegrain-Objektiv.

Country Status (4)

Country Link
US (1) US5136422A (de)
EP (1) EP0433613B1 (de)
JP (1) JPH0776745B2 (de)
DE (1) DE69010868T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05134192A (ja) * 1991-05-02 1993-05-28 Hughes Aircraft Co 多数の同時機能を有する光学系
US5631770A (en) * 1994-05-26 1997-05-20 Hughes Danbury Optical Systems, Inc. Reflective scanning telescopic system on single optical bench
US5737137A (en) * 1996-04-01 1998-04-07 The Regents Of The University Of California Critical illumination condenser for x-ray lithography
GB9711366D0 (en) * 1997-06-02 1997-07-30 Pilkington Perkin Elmer Ltd Optical imaging system
GB9810341D0 (en) * 1998-05-15 1998-07-15 Pilkington Perkin Elmer Ltd Optical imaging system
US6577443B2 (en) * 1998-05-30 2003-06-10 Carl-Zeiss Stiftung Reduction objective for extreme ultraviolet lithography
FR2845487B1 (fr) * 2002-10-08 2005-06-10 Commissariat Energie Atomique Systeme de collecte de lumiere, amplificateur, achromatique et d'absorption reduite, particulierement adapte a l'analyse spectrometrique optique
JP4378140B2 (ja) * 2003-09-17 2009-12-02 キヤノン株式会社 照明光学系及び露光装置
FR2867282B1 (fr) * 2004-03-03 2006-05-26 Sagem Microscope optique a fort grandissement utilisable dans l'extreme ultraviolet
CN1314991C (zh) * 2005-03-21 2007-05-09 中国工程物理研究院激光聚变研究中心 离轴抛物面聚焦镜的安装调试方法
EP1936421A1 (de) * 2007-09-18 2008-06-25 Carl Zeiss SMT AG Katadioptrisches optisches System und katadioptrisches optisches Element
EP2182412A1 (de) * 2008-11-04 2010-05-05 ASML Netherlands B.V. Strahlungsquelle und lithografische Vorrichtung
US8816279B2 (en) 2010-04-09 2014-08-26 Northeastern University Tunable laser-based infrared imaging system and method of use thereof
JP5008012B2 (ja) * 2011-01-28 2012-08-22 レーザーテック株式会社 検査装置、及び検査方法
CN102721677B (zh) * 2012-06-15 2014-11-05 中国科学院物理研究所 一种非共线光参量放大荧光光谱仪
US20140118819A1 (en) * 2012-10-31 2014-05-01 Corning Incorporated Optical device, imaging system which incorporates the optical device and method implemented by the imaging system for imaging a specimen
EP3686642A1 (de) 2019-01-24 2020-07-29 Depixus Mehrkanalige nahbildgebungsvorrichtung

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2212211A (en) * 1938-02-17 1940-08-20 August H Pfund Apparatus for detecting and measuring heteroatomic gases
US3040176A (en) * 1959-01-26 1962-06-19 Siemens Ag Hot box detector
US2995973A (en) * 1959-10-23 1961-08-15 Barnes Eng Co In-line spectrometer
DE2462110B2 (de) * 1974-08-07 1977-05-12 Ausscheidung aus: 24 37 984 Wilhelm Will KG, Optisches Werk, 6331 Nauborn Verfahren zur steigerung der foerderlichen vergroesserung eines optischen mikroskopes und mikroskop zur durchfuehrung des verfahrens
US4101195A (en) * 1977-07-29 1978-07-18 Nasa Anastigmatic three-mirror telescope
DE3214269A1 (de) * 1982-04-17 1983-10-20 Zeiss Carl Fa Gekuehlte feldoptik fuer infrarotteleskope
DE3303140A1 (de) * 1983-01-31 1984-08-02 Bruker Analytische Meßtechnik GmbH, 7512 Rheinstetten Infrarot-spektrometer
JPS60200134A (ja) * 1984-03-24 1985-10-09 Matsushita Electric Works Ltd 赤外線検知装置
JPS60200133A (ja) * 1984-03-24 1985-10-09 Matsushita Electric Works Ltd 赤外線検知装置
US4716293A (en) * 1986-05-16 1987-12-29 Harrick Nicolas J Accessory for infrared emission spectroscopy
US4852955A (en) * 1986-09-16 1989-08-01 Laser Precision Corporation Microscope for use in modular FTIR spectrometer system
US4922104A (en) * 1987-11-30 1990-05-01 501 Hitachi, Ltd. Infrared microspectrometer

Also Published As

Publication number Publication date
EP0433613B1 (de) 1994-07-20
EP0433613A1 (de) 1991-06-26
DE69010868D1 (de) 1994-08-25
US5136422A (en) 1992-08-04
JPH03148044A (ja) 1991-06-24
JPH0776745B2 (ja) 1995-08-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee