DE69006948T2 - Verschlusssystem. - Google Patents

Verschlusssystem.

Info

Publication number
DE69006948T2
DE69006948T2 DE69006948T DE69006948T DE69006948T2 DE 69006948 T2 DE69006948 T2 DE 69006948T2 DE 69006948 T DE69006948 T DE 69006948T DE 69006948 T DE69006948 T DE 69006948T DE 69006948 T2 DE69006948 T2 DE 69006948T2
Authority
DE
Germany
Prior art keywords
opening
edge
partition wall
closure
sealing film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69006948T
Other languages
German (de)
English (en)
Other versions
DE69006948D1 (de
Inventor
Hideo Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of DE69006948D1 publication Critical patent/DE69006948D1/de
Application granted granted Critical
Publication of DE69006948T2 publication Critical patent/DE69006948T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P72/3306—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F16K3/207—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H10P72/0416—
    • H10P72/0441—

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DE69006948T 1989-06-13 1990-06-13 Verschlusssystem. Expired - Fee Related DE69006948T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989068063U JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置

Publications (2)

Publication Number Publication Date
DE69006948D1 DE69006948D1 (de) 1994-04-07
DE69006948T2 true DE69006948T2 (de) 1994-08-25

Family

ID=13362951

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69006948T Expired - Fee Related DE69006948T2 (de) 1989-06-13 1990-06-13 Verschlusssystem.

Country Status (3)

Country Link
EP (1) EP0407044B1 (OSRAM)
JP (1) JP2515777Y2 (OSRAM)
DE (1) DE69006948T2 (OSRAM)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762184U (OSRAM) * 1980-09-30 1982-04-13
JPH085623Y2 (ja) * 1987-08-31 1996-02-21 コクヨ株式会社 事務用家具の棚受装置
EP0817246B1 (en) * 1996-06-24 2005-02-02 Interuniversitair Microelektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
EP0849772A1 (en) * 1996-12-20 1998-06-24 Interuniversitair Micro-Elektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
ATE288622T1 (de) 1996-06-24 2005-02-15 Imec Inter Uni Micro Electr Vorrichtung und verfahren zur nassreinigung oder zum ätzen eines flachen substrats
CN103008282B (zh) * 2012-11-29 2015-07-15 北京七星华创电子股份有限公司 清洗兆声波换能器的装置
KR101649149B1 (ko) * 2014-10-30 2016-08-19 주식회사 토박스코리아 신고 벗기 용이한 유아용 신발

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139226A (en) * 1977-05-11 1978-12-05 Hitachi Ltd Air lock valve
US4418646A (en) * 1982-03-29 1983-12-06 Eaton Corporation Load lock valve
US4746397A (en) * 1986-01-17 1988-05-24 Matsushita Electric Industrial Co., Ltd. Treatment method for plate-shaped substrate
US4715764A (en) * 1986-04-28 1987-12-29 Varian Associates, Inc. Gate valve for wafer processing system
WO1987006862A1 (en) * 1986-05-16 1987-11-19 Eastman Kodak Company Ultrasonic cleaning method and apparatus

Also Published As

Publication number Publication date
JPH037577U (OSRAM) 1991-01-24
JP2515777Y2 (ja) 1996-10-30
DE69006948D1 (de) 1994-04-07
EP0407044A1 (en) 1991-01-09
EP0407044B1 (en) 1994-03-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee