JPH037577U - - Google Patents

Info

Publication number
JPH037577U
JPH037577U JP1989068063U JP6806389U JPH037577U JP H037577 U JPH037577 U JP H037577U JP 1989068063 U JP1989068063 U JP 1989068063U JP 6806389 U JP6806389 U JP 6806389U JP H037577 U JPH037577 U JP H037577U
Authority
JP
Japan
Prior art keywords
partition wall
opening
shutter device
brim
flush
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989068063U
Other languages
English (en)
Japanese (ja)
Other versions
JP2515777Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989068063U priority Critical patent/JP2515777Y2/ja
Priority to DE69006948T priority patent/DE69006948T2/de
Priority to EP90306455A priority patent/EP0407044B1/en
Publication of JPH037577U publication Critical patent/JPH037577U/ja
Application granted granted Critical
Publication of JP2515777Y2 publication Critical patent/JP2515777Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H10P72/3306—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/20—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats
    • F16K3/207—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the seats by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H10P72/0416—
    • H10P72/0441—

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP1989068063U 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置 Expired - Lifetime JP2515777Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1989068063U JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置
DE69006948T DE69006948T2 (de) 1989-06-13 1990-06-13 Verschlusssystem.
EP90306455A EP0407044B1 (en) 1989-06-13 1990-06-13 A shutter system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989068063U JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置

Publications (2)

Publication Number Publication Date
JPH037577U true JPH037577U (OSRAM) 1991-01-24
JP2515777Y2 JP2515777Y2 (ja) 1996-10-30

Family

ID=13362951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989068063U Expired - Lifetime JP2515777Y2 (ja) 1989-06-13 1989-06-13 ウエ−ハ洗浄装置のシャッタ−装置

Country Status (3)

Country Link
EP (1) EP0407044B1 (OSRAM)
JP (1) JP2515777Y2 (OSRAM)
DE (1) DE69006948T2 (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762184U (OSRAM) * 1980-09-30 1982-04-13
JPS6435936U (OSRAM) * 1987-08-31 1989-03-03
KR20160050588A (ko) * 2014-10-30 2016-05-11 주식회사 토박스코리아 신고 벗기 용이한 유아용 신발

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0817246B1 (en) * 1996-06-24 2005-02-02 Interuniversitair Microelektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
EP0849772A1 (en) * 1996-12-20 1998-06-24 Interuniversitair Micro-Elektronica Centrum Vzw Apparatus and method for wet cleaning or etching of flat substrates
ATE288622T1 (de) 1996-06-24 2005-02-15 Imec Inter Uni Micro Electr Vorrichtung und verfahren zur nassreinigung oder zum ätzen eines flachen substrats
CN103008282B (zh) * 2012-11-29 2015-07-15 北京七星华创电子股份有限公司 清洗兆声波换能器的装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139226A (en) * 1977-05-11 1978-12-05 Hitachi Ltd Air lock valve

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4418646A (en) * 1982-03-29 1983-12-06 Eaton Corporation Load lock valve
US4746397A (en) * 1986-01-17 1988-05-24 Matsushita Electric Industrial Co., Ltd. Treatment method for plate-shaped substrate
US4715764A (en) * 1986-04-28 1987-12-29 Varian Associates, Inc. Gate valve for wafer processing system
WO1987006862A1 (en) * 1986-05-16 1987-11-19 Eastman Kodak Company Ultrasonic cleaning method and apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53139226A (en) * 1977-05-11 1978-12-05 Hitachi Ltd Air lock valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5762184U (OSRAM) * 1980-09-30 1982-04-13
JPS6435936U (OSRAM) * 1987-08-31 1989-03-03
KR20160050588A (ko) * 2014-10-30 2016-05-11 주식회사 토박스코리아 신고 벗기 용이한 유아용 신발

Also Published As

Publication number Publication date
JP2515777Y2 (ja) 1996-10-30
DE69006948D1 (de) 1994-04-07
EP0407044A1 (en) 1991-01-09
EP0407044B1 (en) 1994-03-02
DE69006948T2 (de) 1994-08-25

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