DE68917525D1 - Antriebsanordnung vom Schwingungstyp. - Google Patents

Antriebsanordnung vom Schwingungstyp.

Info

Publication number
DE68917525D1
DE68917525D1 DE68917525T DE68917525T DE68917525D1 DE 68917525 D1 DE68917525 D1 DE 68917525D1 DE 68917525 T DE68917525 T DE 68917525T DE 68917525 T DE68917525 T DE 68917525T DE 68917525 D1 DE68917525 D1 DE 68917525D1
Authority
DE
Germany
Prior art keywords
drive arrangement
vibration type
type drive
vibration
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68917525T
Other languages
English (en)
Other versions
DE68917525T2 (de
Inventor
Kohji Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63129122A external-priority patent/JP2650122B2/ja
Priority claimed from JP63157506A external-priority patent/JP2694157B2/ja
Priority claimed from JP15771288A external-priority patent/JP2615143B2/ja
Priority claimed from JP63231727A external-priority patent/JP2759805B2/ja
Priority claimed from JP63231726A external-priority patent/JP2759804B2/ja
Priority claimed from JP63311453A external-priority patent/JP2717827B2/ja
Application filed by Individual filed Critical Individual
Publication of DE68917525D1 publication Critical patent/DE68917525D1/de
Application granted granted Critical
Publication of DE68917525T2 publication Critical patent/DE68917525T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
DE68917525T 1988-05-26 1989-05-26 Antriebsanordnung vom Schwingungstyp. Expired - Fee Related DE68917525T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP63129122A JP2650122B2 (ja) 1988-05-26 1988-05-26 振動子型アクチュエータ
JP63157506A JP2694157B2 (ja) 1988-06-24 1988-06-24 振動子型アクチュエータ
JP15771288A JP2615143B2 (ja) 1988-06-25 1988-06-25 紙送り装置
JP63231727A JP2759805B2 (ja) 1988-09-16 1988-09-16 振動子型アクチュエータ
JP63231726A JP2759804B2 (ja) 1988-09-16 1988-09-16 振動子型アクチュエータ
JP63311453A JP2717827B2 (ja) 1988-12-09 1988-12-09 圧電振動子自走装置

Publications (2)

Publication Number Publication Date
DE68917525D1 true DE68917525D1 (de) 1994-09-22
DE68917525T2 DE68917525T2 (de) 1995-01-12

Family

ID=27552738

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68917525T Expired - Fee Related DE68917525T2 (de) 1988-05-26 1989-05-26 Antriebsanordnung vom Schwingungstyp.

Country Status (3)

Country Link
US (2) US4999536A (de)
EP (1) EP0344008B1 (de)
DE (1) DE68917525T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344008B1 (de) * 1988-05-26 1994-08-17 Kohji Toda Antriebsanordnung vom Schwingungstyp
EP0415657A3 (en) * 1989-08-31 1991-12-04 Kohji Toda Vibrator-type actuator
ES2071146T3 (es) * 1990-04-27 1995-06-16 Rockwell International Corp Articulacion robotica.
JP3118251B2 (ja) * 1990-11-21 2000-12-18 ニスカ株式会社 超音波駆動装置及びその方法
JPH05208014A (ja) * 1991-04-10 1993-08-20 Olympus Optical Co Ltd 処置具
US5352949A (en) * 1991-08-30 1994-10-04 Canon Kabushiki Kaisha Vibration driven actuator
US5283497A (en) * 1992-02-10 1994-02-01 Rockwell International Corporation Electrotiltable material (tilter)
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
IL106296A0 (en) * 1993-07-09 1993-12-28 Nanomotion Ltd Ceramic motor
US5682076A (en) * 1993-08-03 1997-10-28 Nanomotion Ltd. Ceramic disc-drive actuator
JP3412648B2 (ja) * 1994-01-31 2003-06-03 株式会社ニコン 超音波モータ
US6617759B1 (en) * 1997-12-15 2003-09-09 Nanomotion Ltd. Conveying means and method
JP2000014176A (ja) * 1998-06-17 2000-01-14 Minolta Co Ltd 駆動装置
JP4459317B2 (ja) * 1998-08-07 2010-04-28 セイコーインスツル株式会社 超音波モータおよび超音波モータ付電子機器
US6068256A (en) * 1999-07-28 2000-05-30 Technology Commercialization Corp. Piezoelectric conveying device
DE10154526B4 (de) * 2001-06-12 2007-02-08 Physik Instrumente (Pi) Gmbh & Co Piezoelektrisches Stellelement
US6489705B1 (en) * 2001-06-26 2002-12-03 National Science Council Of Republic Of China Thin-disc piezoelectric actuating ultrasonic motor
JP2005328594A (ja) * 2004-05-12 2005-11-24 Honda Motor Co Ltd 超音波リニアモータの駆動装置
JP2007060888A (ja) * 2005-07-26 2007-03-08 Pentax Corp 二次元移動装置
US7593774B2 (en) * 2006-07-25 2009-09-22 Biotronik Crm Patent Ag Cardiac pacemaker
US8461969B2 (en) * 2009-06-02 2013-06-11 Lg Innotek Co., Ltd. Dual mode vibrator
FR2980535B1 (fr) * 2011-09-22 2018-03-09 Commissariat A L'energie Atomique Et Aux Energies Alternatives Pompe d'injection d'un fluide, et notamment micropompe utilisable pour delivrer une dose determinee
CN108225700B (zh) * 2017-12-16 2019-11-12 渤海大学 一种由压电陶瓷驱动的mems微结构四轴式激励装置
CN113891820B (zh) * 2020-03-19 2024-09-06 株式会社村田制作所 振动装置和振动控制方法
CN113916411B (zh) * 2021-09-18 2022-05-27 哈尔滨工业大学 一种基于全局线性化Koopman状态观测器的预紧力测量方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2870521A (en) * 1955-02-24 1959-01-27 Gulton Ind Inc Method of adjusting the resonant frequency of a vibrating system
US2838696A (en) * 1955-08-15 1958-06-10 Bell Telephone Labor Inc Torsional transducers of ethylene diamine tartrate and dipotassium tartrate
US2838695A (en) * 1955-08-15 1958-06-10 Bell Telephone Labor Inc Multi-section quartz torsional transducers
US3171696A (en) * 1961-07-06 1965-03-02 Electro Sonic Systems Inc Apparatus for reducing friction
US3211931A (en) * 1962-12-10 1965-10-12 Gen Electric Electromechanical transducer motors
SU197709A1 (de) * 1965-02-20 1967-08-18
SU399036A1 (ru) * 1971-11-15 1973-09-27 Электропривод
SE436675B (sv) * 1975-08-12 1985-01-14 Ki Politekhnichsky I Im 50 Let Elektrisk motor driven genom piezoelektriska krafter
SU851560A1 (ru) * 1976-02-16 1981-07-30 Киевский Ордена Ленина Политехническийинститут Им. 50-Летия Великой Октябрь-Ской Социалистической Революции Пьезоэлектрический двигатель
SU845198A1 (ru) * 1979-05-14 1981-07-07 Каунасский Политехнический Институт Им.Ahtahaca Снечкуса Вибродвигатель
SU817816A1 (ru) * 1979-05-30 1981-03-30 Каунасский Политехнический Институтим. Ahtahaca Снечкуса Вибродвигатель
SU851563A1 (ru) * 1979-10-02 1981-07-30 Каунасский Политехнический Институтим. Ahtahaca Снечкуса Координатный вибропривод
SU987714A1 (ru) * 1981-07-02 1983-01-07 Каунасский Политехнический Институт Им.Антанаса Снечкуса Вибродвигатель
AT384912B (de) * 1982-04-16 1988-01-25 Ki Polt I Piezoelektrischer motor
AT382262B (de) * 1982-04-16 1987-02-10 Ki Polt I Piezoelektrischer motor
US4663556A (en) * 1984-01-11 1987-05-05 Hitachi Maxell, Ltd. Torsional mode ultrasonic vibrator
US4634916A (en) * 1984-10-02 1987-01-06 Ngk Spark Plug Co., Ltd. Piezoelectric rotary driver
SU1287088A1 (ru) * 1985-02-20 1987-01-30 Каунасский Политехнический Институт Им.Антанаса Снечкуса Устройство перемещени
US4734610A (en) * 1986-03-25 1988-03-29 Canon Kabushiki Kaisha Vibration wave motor
JP2632811B2 (ja) * 1986-08-29 1997-07-23 キヤノン株式会社 振動駆動モータ
US4868446A (en) * 1987-01-22 1989-09-19 Hitachi Maxell, Ltd. Piezoelectric revolving resonator and ultrasonic motor
JP2608413B2 (ja) * 1987-07-26 1997-05-07 本多電子株式会社 超音波駆動装置
US4945275A (en) * 1987-07-26 1990-07-31 Honda Electric Co., Ltd. Ultrasonic driving device
JPH0697864B2 (ja) * 1987-09-18 1994-11-30 日本電気株式会社 超音波モータ
JPS6477485A (en) * 1987-09-18 1989-03-23 Nec Corp Ultrasonic motor
JP2614635B2 (ja) * 1988-04-12 1997-05-28 日立マクセル株式会社 電歪公転子及び単相超音波モータ
EP0344008B1 (de) * 1988-05-26 1994-08-17 Kohji Toda Antriebsanordnung vom Schwingungstyp

Also Published As

Publication number Publication date
EP0344008B1 (de) 1994-08-17
US5130599A (en) 1992-07-14
US4999536A (en) 1991-03-12
EP0344008A2 (de) 1989-11-29
DE68917525T2 (de) 1995-01-12
EP0344008A3 (en) 1990-09-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee