DE68911093T2 - Verfahren zur Reinigung von gasförmigen Hydriden. - Google Patents

Verfahren zur Reinigung von gasförmigen Hydriden.

Info

Publication number
DE68911093T2
DE68911093T2 DE89117740T DE68911093T DE68911093T2 DE 68911093 T2 DE68911093 T2 DE 68911093T2 DE 89117740 T DE89117740 T DE 89117740T DE 68911093 T DE68911093 T DE 68911093T DE 68911093 T2 DE68911093 T2 DE 68911093T2
Authority
DE
Germany
Prior art keywords
purification
gaseous hydrides
hydrides
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89117740T
Other languages
English (en)
Other versions
DE68911093D1 (de
Inventor
Koichi Kitahara
Takashi Shimada
Keiichi Iwata
Noboru Akita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63238920A external-priority patent/JP2732262B2/ja
Priority claimed from JP27326788A external-priority patent/JP2592312B2/ja
Priority claimed from JP27617788A external-priority patent/JP2640517B2/ja
Priority claimed from JP28236288A external-priority patent/JP2700396B2/ja
Priority claimed from JP28776588A external-priority patent/JP2627324B2/ja
Priority claimed from JP1004748A external-priority patent/JP2700398B2/ja
Priority claimed from JP1004750A external-priority patent/JP2700400B2/ja
Priority claimed from JP1004749A external-priority patent/JP2700399B2/ja
Priority claimed from JP1022685A external-priority patent/JP2732277B2/ja
Priority claimed from JP1022684A external-priority patent/JP2700401B2/ja
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Publication of DE68911093D1 publication Critical patent/DE68911093D1/de
Publication of DE68911093T2 publication Critical patent/DE68911093T2/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00—Boron; Compounds thereof
    • C01B35/02—Boron; Borides
    • C01B35/04—Metal borides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B19/00—Selenium; Tellurium; Compounds thereof
    • C01B19/007—Tellurides or selenides of metals
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B19/00—Selenium; Tellurium; Compounds thereof
    • C01B19/04—Binary compounds including binary selenium-tellurium compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/06—Hydrogen phosphides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/08—Other phosphides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/06—Metal silicides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
    • C01B6/34—Purification; Stabilisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Catalysts (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
DE89117740T 1988-09-26 1989-09-26 Verfahren zur Reinigung von gasförmigen Hydriden. Expired - Fee Related DE68911093T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP63238920A JP2732262B2 (ja) 1988-09-26 1988-09-26 アルシンの精製方法
JP27326788A JP2592312B2 (ja) 1988-10-31 1988-10-31 ホスフィンの精製方法
JP27617788A JP2640517B2 (ja) 1988-11-02 1988-11-02 セレン化水素の精製方法
JP28236288A JP2700396B2 (ja) 1988-11-10 1988-11-10 ジボランの精製方法
JP28776588A JP2627324B2 (ja) 1988-11-16 1988-11-16 シランの精製方法
JP1004748A JP2700398B2 (ja) 1989-01-13 1989-01-13 水素化物ガスの精製方法
JP1004750A JP2700400B2 (ja) 1989-01-13 1989-01-13 水素化物ガスの精製方法
JP1004749A JP2700399B2 (ja) 1989-01-13 1989-01-13 水素化物ガスの精製方法
JP1022685A JP2732277B2 (ja) 1989-02-02 1989-02-02 水素化物ガスの精製方法
JP1022684A JP2700401B2 (ja) 1989-02-02 1989-02-02 水素化物ガスの精製方法

Publications (2)

Publication Number Publication Date
DE68911093D1 DE68911093D1 (de) 1994-01-13
DE68911093T2 true DE68911093T2 (de) 1994-04-28

Family

ID=27579524

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89117740T Expired - Fee Related DE68911093T2 (de) 1988-09-26 1989-09-26 Verfahren zur Reinigung von gasförmigen Hydriden.

Country Status (4)

Country Link
US (1) US4976942A (de)
EP (1) EP0361386B1 (de)
KR (1) KR960010082B1 (de)
DE (1) DE68911093T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2732262B2 (ja) * 1988-09-26 1998-03-25 日本パイオニクス株式会社 アルシンの精製方法
JP3052317B2 (ja) * 1989-10-25 2000-06-12 三菱瓦斯化学株式会社 脱酸素剤
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
JPH04318920A (ja) * 1991-04-17 1992-11-10 Mitsubishi Electric Corp 気相結晶成長装置
EP0523525B1 (de) * 1991-07-17 1995-04-12 Japan Pionics Co., Ltd. Verfahren zur Reinigung von gasförmigen organometallischen Verbindungen
KR100731836B1 (ko) * 1998-04-09 2007-06-25 허니웰 인터내셔널 인코포레이티드 디보란의 제조 및 정제
EP1450931A4 (de) * 2001-10-31 2005-01-05 Saes Pure Gas Inc Luftreinigungssystem und verfahren zur aufrechterhaltung von stickstoff- und sauerstoffverhältnissen mit regenerativen reinigungseinheiten
US8268046B2 (en) * 2008-05-16 2012-09-18 Matheson Tri-Gas Removal of impurities from hydrogen-containing materials
DE102012004417A1 (de) * 2012-03-08 2013-09-12 Technische Universität Bergakademie Freiberg Verfahren zur Herstellung von Aminboranen des Typs R3NBH3
CN105551810B (zh) * 2016-01-01 2018-03-27 三峡大学 一种原位电极的溶剂热制备方法
CN109759051B (zh) * 2019-01-15 2021-10-22 昆明理工大学 一种利用Zr-Nd-O改性白炭黑的催化剂制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2806767A (en) * 1953-08-27 1957-09-17 Universal Oil Prod Co Method of removing oxygen from mixtures of hydrogen and nitrogen
US3019087A (en) * 1958-09-29 1962-01-30 Merck & Co Inc Purification of silane
DE1667129C3 (de) * 1967-06-20 1978-06-29 Messer Griesheim Gmbh, 6000 Frankfurt Verfahren zur Entfernung von homogen gelösten Beimengungen, insbesondere Sauerstoff, aus Gasen oder Flüssigkeiten
JPS54160577A (en) * 1978-06-09 1979-12-19 Teijin Ltd Oxygen trapping composition
DD200422A1 (de) * 1981-09-30 1983-05-04 Rolf Kurze Verfahren zur entfernung von diphosphan aus monophosphanhaltigen gasen
JPS58120511A (ja) * 1982-01-07 1983-07-18 Matsushita Electric Ind Co Ltd シランの精製法
FR2527473A1 (fr) * 1982-05-25 1983-12-02 Inst Francais Du Petrole Procede pour l'hydrodesulfuration d'un gaz contenant de l'oxygene et des composes organiques du soufre
JPS6016802A (ja) * 1983-07-01 1985-01-28 Olympus Optical Co Ltd 半導体用原料ガスの純化剤およびその使用方法
GB2152528A (en) * 1984-01-12 1985-08-07 Shell Int Research Gas purification process
DD224229A1 (de) * 1984-04-27 1985-07-03 Leuna Werke Veb Verfahren zur entfernung von sauerstoff aus inertgasen
JPS60260412A (ja) * 1984-06-08 1985-12-23 Nippon Chem Ind Co Ltd:The 高純度ホスフインの製造法
DE3618942A1 (de) * 1986-06-05 1987-12-10 Messer Griesheim Gmbh Masse zur entfernung durch chemiesorption von homogen geloesten beimengungen, insbesondere sauerstoff, aus gasen oder fluessigkeiten

Also Published As

Publication number Publication date
EP0361386A3 (de) 1991-08-28
DE68911093D1 (de) 1994-01-13
KR960010082B1 (ko) 1996-07-25
US4976942A (en) 1990-12-11
EP0361386B1 (de) 1993-12-01
EP0361386A2 (de) 1990-04-04
KR900004625A (ko) 1990-04-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee