DE68905379T2 - Verfahren zur Reinigung von Stickstofftrifluoridgas. - Google Patents
Verfahren zur Reinigung von Stickstofftrifluoridgas.Info
- Publication number
- DE68905379T2 DE68905379T2 DE89109439T DE68905379T DE68905379T2 DE 68905379 T2 DE68905379 T2 DE 68905379T2 DE 89109439 T DE89109439 T DE 89109439T DE 68905379 T DE68905379 T DE 68905379T DE 68905379 T2 DE68905379 T2 DE 68905379T2
- Authority
- DE
- Germany
- Prior art keywords
- purification
- nitrogen trifluoride
- trifluoride gas
- gas
- nitrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13506188 | 1988-06-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68905379D1 DE68905379D1 (de) | 1993-04-22 |
DE68905379T2 true DE68905379T2 (de) | 1993-10-21 |
Family
ID=15142972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89109439T Expired - Lifetime DE68905379T2 (de) | 1988-06-01 | 1989-05-24 | Verfahren zur Reinigung von Stickstofftrifluoridgas. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4980144A (de) |
EP (1) | EP0344612B1 (de) |
JP (1) | JPH0280310A (de) |
KR (1) | KR920010082B1 (de) |
CA (1) | CA1316330C (de) |
DE (1) | DE68905379T2 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01261208A (ja) * | 1988-04-11 | 1989-10-18 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
US5069690A (en) * | 1991-02-21 | 1991-12-03 | Air Products And Chemicals, Inc. | Process for kinetic gas-solid chromatographic separations |
US5426944A (en) * | 1993-08-31 | 1995-06-27 | American Air Liquide, Inc. | Chemical purification for semiconductor processing by partial condensation |
US6759018B1 (en) | 1997-05-16 | 2004-07-06 | Advanced Technology Materials, Inc. | Method for point-of-use treatment of effluent gas streams |
US20010009652A1 (en) * | 1998-05-28 | 2001-07-26 | Jose I. Arno | Apparatus and method for point-of-use abatement of fluorocompounds |
US6458249B2 (en) * | 1997-11-10 | 2002-10-01 | E. I. Du Pont De Nemours And Company | Process for purifying perfluorinated products |
US8231851B2 (en) * | 1997-11-14 | 2012-07-31 | Hitachi, Ltd. | Method for processing perfluorocarbon, and apparatus therefor |
KR100432593B1 (ko) * | 2001-09-07 | 2004-05-24 | 주식회사 소디프신소재 | 삼불화 질소 가스의 정제 방법 |
KR100481795B1 (ko) * | 2002-07-31 | 2005-04-11 | 주식회사 소디프신소재 | 고 순도의 삼불화 질소 가스 제조 방법 |
US7074378B2 (en) * | 2004-01-23 | 2006-07-11 | Air Products And Chemicals, Inc. | Process for the purification of NF3 |
US7842125B2 (en) * | 2004-07-08 | 2010-11-30 | Hyosung Corporation | Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite |
EP2468387B1 (de) * | 2005-04-05 | 2015-10-21 | Mitsui Chemicals, Inc. | Gasbehandlungsvorrichtung, insbesondere für ein Polyisocyanatherstellungssystem |
KR100777576B1 (ko) | 2006-12-15 | 2007-11-28 | 동부일렉트로닉스 주식회사 | Nf3를 클리닝 가스로 사용하는 cvd 공정에서의 가스스크러버 및 이의 운전 방법 |
KR100945520B1 (ko) | 2008-03-12 | 2010-03-09 | 엔텍이앤씨 주식회사 | 악취 가스 제거 방법 |
JP2010105825A (ja) * | 2008-10-28 | 2010-05-13 | Central Glass Co Ltd | ハロゲンまたはハロゲン化合物を不純物として含む三フッ化窒素の精製方法 |
KR20130111554A (ko) * | 2010-09-15 | 2013-10-10 | 솔베이(소시에떼아노님) | 가스로부터 f2 및/또는 of2를 제거시키는 방법 |
KR20180075622A (ko) * | 2015-12-01 | 2018-07-04 | 쇼와 덴코 가부시키가이샤 | 불소 원소를 함유하는 배기 가스의 처리 방법 |
WO2017094418A1 (ja) * | 2015-12-01 | 2017-06-08 | 昭和電工株式会社 | フッ素元素を含有する排ガスの処理方法 |
CN111039266A (zh) * | 2019-12-29 | 2020-04-21 | 中船重工(邯郸)派瑞特种气体有限公司 | 一种除去三氟化氮中氧化亚氮的装置及方法 |
CN112742158B (zh) * | 2020-12-30 | 2022-11-25 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种三氟化氮电解制备过程中氟化氢废气处理系统及方法 |
CN114524421A (zh) * | 2022-03-08 | 2022-05-24 | 中船(邯郸)派瑞特种气体股份有限公司 | 一种从冷阱排污气体中回收三氟化氮并制备氢氟酸的方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4193976A (en) * | 1978-04-06 | 1980-03-18 | Air Products & Chemicals, Inc. | Removal of dinitrogen difluoride from nitrogen trifluoride |
US4156598A (en) * | 1978-06-08 | 1979-05-29 | Air Products And Chemicals, Inc. | Purification of nitrogen trifluoride atmospheres |
JPS6071503A (ja) * | 1983-09-27 | 1985-04-23 | Central Glass Co Ltd | Νf↓3の製造法 |
JPS61247609A (ja) * | 1985-04-26 | 1986-11-04 | Showa Denko Kk | 三弗化窒素の精製方法 |
JPH03151608A (ja) * | 1989-11-09 | 1991-06-27 | Toshiba Corp | リード線支持装置 |
-
1989
- 1989-05-23 JP JP1127854A patent/JPH0280310A/ja active Granted
- 1989-05-24 DE DE89109439T patent/DE68905379T2/de not_active Expired - Lifetime
- 1989-05-24 US US07/356,179 patent/US4980144A/en not_active Expired - Lifetime
- 1989-05-24 EP EP89109439A patent/EP0344612B1/de not_active Expired - Lifetime
- 1989-05-26 CA CA000600886A patent/CA1316330C/en not_active Expired - Lifetime
- 1989-06-01 KR KR1019890007523A patent/KR920010082B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR900000288A (ko) | 1990-01-30 |
JPH0280310A (ja) | 1990-03-20 |
EP0344612B1 (de) | 1993-03-17 |
CA1316330C (en) | 1993-04-20 |
DE68905379D1 (de) | 1993-04-22 |
JPH0553725B2 (de) | 1993-08-10 |
US4980144A (en) | 1990-12-25 |
EP0344612A2 (de) | 1989-12-06 |
KR920010082B1 (ko) | 1992-11-14 |
EP0344612A3 (en) | 1990-05-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: MITSUI CHEMICALS, INC., TOKIO/TOKYO, JP |