DE60335283D1 - Bildaufnahmevorrichtung - Google Patents

Bildaufnahmevorrichtung

Info

Publication number
DE60335283D1
DE60335283D1 DE60335283T DE60335283T DE60335283D1 DE 60335283 D1 DE60335283 D1 DE 60335283D1 DE 60335283 T DE60335283 T DE 60335283T DE 60335283 T DE60335283 T DE 60335283T DE 60335283 D1 DE60335283 D1 DE 60335283D1
Authority
DE
Germany
Prior art keywords
recording device
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60335283T
Other languages
English (en)
Inventor
Hiroya Kobayashi
Masaharu Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Application granted granted Critical
Publication of DE60335283D1 publication Critical patent/DE60335283D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/22Optical or photographic arrangements associated with the tube
    • H01J37/224Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/244Detectors; Associated components or circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14618Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/148Charge coupled imagers
    • H01L27/14806Structural or functional details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • H04N23/54Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • H04N23/55Optical parts specially adapted for electronic image sensors; Mounting thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • H01J2237/2443Scintillation detectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244Detection characterized by the detecting means
    • H01J2237/2445Photon detectors for X-rays, light, e.g. photomultipliers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1515Shape
    • H01L2924/15153Shape the die mounting substrate comprising a recess for hosting the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/15165Monolayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Measurement Of Radiation (AREA)
DE60335283T 2002-10-09 2003-10-08 Bildaufnahmevorrichtung Expired - Lifetime DE60335283D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002296543A JP4227389B2 (ja) 2002-10-09 2002-10-09 撮像装置及びその製造方法
PCT/JP2003/012911 WO2004034471A1 (ja) 2002-10-09 2003-10-08 撮像装置及びその製造方法

Publications (1)

Publication Number Publication Date
DE60335283D1 true DE60335283D1 (de) 2011-01-20

Family

ID=32089240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60335283T Expired - Lifetime DE60335283D1 (de) 2002-10-09 2003-10-08 Bildaufnahmevorrichtung

Country Status (7)

Country Link
US (1) US7550811B2 (de)
EP (2) EP1557885B1 (de)
JP (1) JP4227389B2 (de)
CN (1) CN100409446C (de)
AU (1) AU2003272948A1 (de)
DE (1) DE60335283D1 (de)
WO (1) WO2004034471A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2007756B1 (de) * 2006-04-07 2015-08-26 Vertex Pharmaceuticals Incorporated Modulatoren von atp-bindenden kassettentransportern
KR100800476B1 (ko) * 2006-07-11 2008-02-04 삼성전자주식회사 반도체 패키지 및 그 제조방법과 반도체 모듈 및 그제조방법
US7675131B2 (en) * 2007-04-05 2010-03-09 Micron Technology, Inc. Flip-chip image sensor packages and methods of fabricating the same
DE102008001675A1 (de) * 2008-05-09 2009-11-12 Robert Bosch Gmbh Kameramodul mit verbessertem Kühlkonzept
JP2010093752A (ja) * 2008-10-10 2010-04-22 Sony Corp 固体撮像素子及び信号処理システム
JP2010093754A (ja) * 2008-10-10 2010-04-22 Sony Corp 固体撮像素子及び信号処理システム
DE102009009602A1 (de) * 2008-10-27 2010-04-29 Ifg - Institute For Scientific Instruments Gmbh Spektralauflösende elektronische Röntgenkamera
JP5464133B2 (ja) * 2010-11-29 2014-04-09 株式会社島津製作所 撮像装置の製造方法
EP2487703A1 (de) 2011-02-14 2012-08-15 Fei Company Detektor zur Verwendung in der Mikroskopie mit geladenen Teilchen
JP5940887B2 (ja) * 2012-05-18 2016-06-29 浜松ホトニクス株式会社 固体撮像装置
US9046426B1 (en) * 2012-06-15 2015-06-02 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Modular apparatus and method for attaching multiple devices
JP6083554B2 (ja) * 2012-08-07 2017-02-22 国立大学法人静岡大学 撮像モジュール
JP5600722B2 (ja) * 2012-11-02 2014-10-01 株式会社堀場製作所 放射線検出器、放射線検出装置、及びx線分析装置
JP6300442B2 (ja) * 2013-01-18 2018-03-28 オリンパス株式会社 光伝送モジュールおよび撮像装置
JP2015096882A (ja) * 2013-11-15 2015-05-21 セイコーエプソン株式会社 電気光学装置および投射型表示装置
US10217790B2 (en) * 2015-01-15 2019-02-26 Koninklijke Philips N.V. Imaging detector module assembly
JP2020088066A (ja) 2018-11-20 2020-06-04 キヤノン株式会社 電子部品および機器
US11355659B2 (en) 2019-11-27 2022-06-07 Xintec Inc. Chip package and manufacturing method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62189883A (ja) 1986-02-17 1987-08-19 Matsushita Electronics Corp 固体撮像装置
US4760031A (en) * 1986-03-03 1988-07-26 California Institute Of Technology Producing CCD imaging sensor with flashed backside metal film
JPH06196680A (ja) 1992-12-22 1994-07-15 Hamamatsu Photonics Kk 半導体エネルギー検出器とその製造方法
JPH09199699A (ja) 1996-01-12 1997-07-31 Hitachi Ltd 薄膜イメージセンサ
JPH11188033A (ja) 1997-12-26 1999-07-13 Hamamatsu Photonics Kk 歯科用x線像撮像装置および歯科用x線像撮像装置用モジュール
JP4005704B2 (ja) * 1998-07-14 2007-11-14 浜松ホトニクス株式会社 X線パネルセンサ
JP2000324400A (ja) 1999-05-13 2000-11-24 Hitachi Ltd 電子線像撮像装置及び電子顕微鏡
JP4562875B2 (ja) * 2000-07-17 2010-10-13 浜松ホトニクス株式会社 半導体装置

Also Published As

Publication number Publication date
EP1883111A2 (de) 2008-01-30
AU2003272948A1 (en) 2004-05-04
WO2004034471A1 (ja) 2004-04-22
EP1557885B1 (de) 2010-12-08
EP1883111A3 (de) 2008-12-10
EP1557885A1 (de) 2005-07-27
US7550811B2 (en) 2009-06-23
EP1557885A4 (de) 2005-12-28
CN100409446C (zh) 2008-08-06
US20060240586A1 (en) 2006-10-26
CN1692498A (zh) 2005-11-02
JP4227389B2 (ja) 2009-02-18
EP1883111B1 (de) 2015-04-22
JP2004134527A (ja) 2004-04-30

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