DE60323303D1 - Laserstrahlaufweitung mit unveränderter räumlicher Kohärenz - Google Patents
Laserstrahlaufweitung mit unveränderter räumlicher KohärenzInfo
- Publication number
- DE60323303D1 DE60323303D1 DE60323303T DE60323303T DE60323303D1 DE 60323303 D1 DE60323303 D1 DE 60323303D1 DE 60323303 T DE60323303 T DE 60323303T DE 60323303 T DE60323303 T DE 60323303T DE 60323303 D1 DE60323303 D1 DE 60323303D1
- Authority
- DE
- Germany
- Prior art keywords
- laser beam
- spatial coherence
- beam expansion
- unchanged spatial
- unchanged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/102—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1073—Beam splitting or combining systems characterized by manufacturing or alignment methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70583—Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/208,046 US6801299B2 (en) | 2002-07-31 | 2002-07-31 | System for laser beam expansion without expanding spatial coherence |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60323303D1 true DE60323303D1 (de) | 2008-10-16 |
Family
ID=30115198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60323303T Expired - Lifetime DE60323303D1 (de) | 2002-07-31 | 2003-07-30 | Laserstrahlaufweitung mit unveränderter räumlicher Kohärenz |
Country Status (8)
Country | Link |
---|---|
US (2) | US6801299B2 (de) |
EP (2) | EP1992991A3 (de) |
JP (1) | JP3981048B2 (de) |
KR (1) | KR100634918B1 (de) |
CN (1) | CN100524025C (de) |
DE (1) | DE60323303D1 (de) |
SG (1) | SG108927A1 (de) |
TW (1) | TWI324843B (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6629641B2 (en) * | 2000-06-07 | 2003-10-07 | Metrologic Instruments, Inc. | Method of and system for producing images of objects using planar laser illumination beams and image detection arrays |
US6819402B2 (en) | 2001-10-18 | 2004-11-16 | Asml Holding N.V. | System and method for laser beam expansion |
US6801299B2 (en) * | 2002-07-31 | 2004-10-05 | Asml Holding N.V. | System for laser beam expansion without expanding spatial coherence |
US7281807B2 (en) * | 2003-07-16 | 2007-10-16 | Honeywood Technologies, Llc | Positionable projection display devices |
US7156522B2 (en) * | 2003-07-16 | 2007-01-02 | Plut William J | Projection-type display devices with reduced weight and size |
GB0425419D0 (en) * | 2004-11-18 | 2004-12-22 | Sira Ltd | Interference apparatus and method and probe |
US7355657B2 (en) * | 2004-12-14 | 2008-04-08 | Coherent, Inc. | Laser illuminated projection displays |
US7244028B2 (en) * | 2004-12-14 | 2007-07-17 | Coherent, Inc. | Laser illuminated projection displays |
GB0428185D0 (en) * | 2004-12-23 | 2005-01-26 | Micromass Ltd | Mass spectrometer |
US7413311B2 (en) * | 2005-09-29 | 2008-08-19 | Coherent, Inc. | Speckle reduction in laser illuminated projection displays having a one-dimensional spatial light modulator |
US7551359B2 (en) * | 2006-09-14 | 2009-06-23 | 3M Innovative Properties Company | Beam splitter apparatus and system |
KR100860018B1 (ko) * | 2007-07-04 | 2008-09-25 | 한국광기술원 | 레이저 반점 감소장치 |
KR100911738B1 (ko) * | 2007-08-30 | 2009-08-10 | 한국광기술원 | 조립식 레이저 반점 감소장치 |
CN101394061B (zh) * | 2008-09-23 | 2010-06-02 | 福州高意通讯有限公司 | 一种增加倍频激光器输出线宽的方法及其结构 |
KR101001338B1 (ko) * | 2009-08-24 | 2010-12-14 | 씨엠아이텍주식회사 | 신원 확인 장치 |
WO2011115624A1 (en) * | 2010-03-19 | 2011-09-22 | Hewlett-Packard Development Company, L.P. | Optical star coupler |
KR102267532B1 (ko) * | 2014-06-06 | 2021-06-18 | 트럼프 레이저시스템즈 포 세미컨덕터 매뉴팩처링 게엠베하 | 레이저 빔을 모니터링하는 디바이스 및 방법 |
JP6601098B2 (ja) * | 2015-09-29 | 2019-11-06 | 株式会社Jvcケンウッド | 光源装置及び画像投射装置 |
US10078049B2 (en) * | 2016-05-18 | 2018-09-18 | The Boeing Company | Apparatus, system, and method for non-destructive testing of an object using a laser beam directed out of a plurality of apertures |
JP6795811B2 (ja) * | 2017-02-16 | 2020-12-02 | 国立大学法人埼玉大学 | 剥離基板製造方法 |
CN111766711A (zh) * | 2020-07-16 | 2020-10-13 | 华中科技大学 | 基于平行平板的等能量激光平行分束装置、方法及系统 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2005A (en) * | 1841-03-16 | Improvement in the manner of constructing molds for casting butt-hinges | ||
US4362361A (en) * | 1980-09-15 | 1982-12-07 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Collimated beam manifold with the number of output beams variable at a given output angle |
JPS6019101A (ja) * | 1983-07-13 | 1985-01-31 | Hoya Corp | ビ−ムスプリツタ |
JPS60150016A (ja) * | 1984-01-17 | 1985-08-07 | Ricoh Co Ltd | レンズ系調整組立装置 |
US5165080A (en) * | 1987-09-11 | 1992-11-17 | British Telecommunications Public Limited Company | Optical distributor |
JPH01287924A (ja) * | 1988-03-30 | 1989-11-20 | Hitachi Ltd | コヒーレント制御露光装置 |
JPH0778576B2 (ja) * | 1988-05-17 | 1995-08-23 | 株式会社シンク・ラボラトリー | 光ビーム分割方法及び光ビーム分割変調方法 |
JPH0218518A (ja) * | 1988-07-07 | 1990-01-22 | Think Lab Kk | 光ビーム分割器 |
US5089711A (en) * | 1990-01-19 | 1992-02-18 | California Jamar, Incorporated | Laser plasma X-ray source |
DE4124311A1 (de) * | 1991-07-23 | 1993-01-28 | Zeiss Carl Fa | Anordnung zur kohaerenzreduktion und strahlformung eines laserstrahls |
US5224200A (en) * | 1991-11-27 | 1993-06-29 | The United States Of America As Represented By The Department Of Energy | Coherence delay augmented laser beam homogenizer |
GB9324589D0 (en) * | 1993-11-30 | 1994-01-19 | Univ Southampton | Beam shaping device |
KR100251052B1 (ko) * | 1997-07-12 | 2000-05-01 | 윤종용 | 두개의 플랫 플레이트 사이의 에어 갭 및 하이브리드 다이크로익 미러를 이용한 광분리 장치 및 방법 |
DE69819044T2 (de) * | 1998-08-20 | 2004-08-12 | Orbotech Ltd. | Laserwiederholfrequenzvervielfacher |
DE19904592C2 (de) * | 1999-02-05 | 2001-03-08 | Lavision Gmbh | Strahlteilervorrichtung |
US6819402B2 (en) * | 2001-10-18 | 2004-11-16 | Asml Holding N.V. | System and method for laser beam expansion |
US6801299B2 (en) | 2002-07-31 | 2004-10-05 | Asml Holding N.V. | System for laser beam expansion without expanding spatial coherence |
-
2002
- 2002-07-31 US US10/208,046 patent/US6801299B2/en not_active Expired - Lifetime
-
2003
- 2003-07-23 TW TW092120107A patent/TWI324843B/zh not_active IP Right Cessation
- 2003-07-25 SG SG200303906A patent/SG108927A1/en unknown
- 2003-07-29 JP JP2003203218A patent/JP3981048B2/ja not_active Expired - Fee Related
- 2003-07-30 DE DE60323303T patent/DE60323303D1/de not_active Expired - Lifetime
- 2003-07-30 EP EP08015487A patent/EP1992991A3/de not_active Withdrawn
- 2003-07-30 EP EP03017268A patent/EP1387218B1/de not_active Expired - Lifetime
- 2003-07-30 KR KR1020030052642A patent/KR100634918B1/ko not_active IP Right Cessation
- 2003-07-31 CN CNB031523811A patent/CN100524025C/zh not_active Expired - Fee Related
-
2004
- 2004-09-23 US US10/947,347 patent/US7027129B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100524025C (zh) | 2009-08-05 |
KR20040012544A (ko) | 2004-02-11 |
EP1387218A1 (de) | 2004-02-04 |
CN1487364A (zh) | 2004-04-07 |
TWI324843B (en) | 2010-05-11 |
US20050036125A1 (en) | 2005-02-17 |
EP1992991A2 (de) | 2008-11-19 |
JP2004128477A (ja) | 2004-04-22 |
TW200402917A (en) | 2004-02-16 |
EP1387218B1 (de) | 2008-09-03 |
SG108927A1 (en) | 2005-02-28 |
US7027129B2 (en) | 2006-04-11 |
US6801299B2 (en) | 2004-10-05 |
EP1992991A3 (de) | 2008-11-26 |
US20040021842A1 (en) | 2004-02-05 |
JP3981048B2 (ja) | 2007-09-26 |
KR100634918B1 (ko) | 2006-10-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |