DE60317008T2 - Mechanismus für ein bewegliches Teil und Steuerungsverfahren für den selben - Google Patents
Mechanismus für ein bewegliches Teil und Steuerungsverfahren für den selben Download PDFInfo
- Publication number
- DE60317008T2 DE60317008T2 DE60317008T DE60317008T DE60317008T2 DE 60317008 T2 DE60317008 T2 DE 60317008T2 DE 60317008 T DE60317008 T DE 60317008T DE 60317008 T DE60317008 T DE 60317008T DE 60317008 T2 DE60317008 T2 DE 60317008T2
- Authority
- DE
- Germany
- Prior art keywords
- integrator
- output
- electromagnet
- command information
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 title claims description 43
- 238000000034 method Methods 0.000 title claims description 5
- 238000012937 correction Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000004907 flux Effects 0.000 description 42
- 235000012431 wafers Nutrition 0.000 description 10
- 230000001133 acceleration Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 9
- 230000006870 function Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41105—Coarse fine
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41118—Drift-compensation for servo, anti-hunt
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41264—Driven by two motors
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41321—Brushless DC motor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41332—Electromagnet driven core, position of core controlled
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/42—Servomotor, servo controller kind till VSS
- G05B2219/42005—Disturbance decoupling, rejection, suppression
Landscapes
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Control Of Linear Motors (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002132560 | 2002-05-08 | ||
| JP2002132560 | 2002-05-08 | ||
| JP2003128227A JP4280543B2 (ja) | 2002-05-08 | 2003-05-06 | 移動体機構および露光装置 |
| JP2003128227 | 2003-05-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60317008D1 DE60317008D1 (de) | 2007-12-06 |
| DE60317008T2 true DE60317008T2 (de) | 2008-07-24 |
Family
ID=29253672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60317008T Expired - Lifetime DE60317008T2 (de) | 2002-05-08 | 2003-05-07 | Mechanismus für ein bewegliches Teil und Steuerungsverfahren für den selben |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7154242B2 (enExample) |
| EP (1) | EP1361486B1 (enExample) |
| JP (1) | JP4280543B2 (enExample) |
| DE (1) | DE60317008T2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060061218A1 (en) * | 2004-09-21 | 2006-03-23 | Nikon Corporation | Dual force wafer table |
| JP4541849B2 (ja) | 2004-11-22 | 2010-09-08 | キヤノン株式会社 | 位置決め装置 |
| JP2006211873A (ja) | 2005-01-31 | 2006-08-10 | Canon Inc | 移動体制御装置及び移動体制御方法 |
| JP2008153546A (ja) * | 2006-12-19 | 2008-07-03 | Canon Inc | 移動体機構 |
| US8279399B2 (en) | 2007-10-22 | 2012-10-02 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| JP5308249B2 (ja) * | 2009-06-22 | 2013-10-09 | 三菱重工業株式会社 | サーボ制御装置 |
| JP5855341B2 (ja) * | 2010-12-28 | 2016-02-09 | ローム株式会社 | レンズ制御装置及びこれを用いた撮像装置 |
| JP6282256B2 (ja) * | 2015-12-09 | 2018-02-21 | ローム株式会社 | レンズ制御装置及びこれを用いた撮像装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8877A (en) * | 1852-04-13 | Improvement in seed-planters | ||
| US3015768A (en) * | 1959-01-14 | 1962-01-02 | Bailey Meter Co | Positioning motor control system |
| US4270073A (en) * | 1979-02-28 | 1981-05-26 | Persci, Inc. | Position control in disk drive system |
| US5684856A (en) * | 1991-09-18 | 1997-11-04 | Canon Kabushiki Kaisha | Stage device and pattern transfer system using the same |
| US5917580A (en) * | 1996-08-29 | 1999-06-29 | Canon Kabushiki Kaisha | Scan exposure method and apparatus |
| JP3745167B2 (ja) * | 1998-07-29 | 2006-02-15 | キヤノン株式会社 | ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法 |
| EP1014199B1 (en) * | 1998-12-24 | 2011-03-30 | Canon Kabushiki Kaisha | Stage control apparatus, exposure apparatus and method of manufacturing a semiconductor device |
| JP3720613B2 (ja) * | 1999-02-03 | 2005-11-30 | キヤノン株式会社 | 位置決め装置、露光装置およびデバイス製造方法ならびに位置決め方法 |
| US6227817B1 (en) * | 1999-09-03 | 2001-05-08 | Magnetic Moments, Llc | Magnetically-suspended centrifugal blood pump |
| JP3728180B2 (ja) * | 2000-06-01 | 2005-12-21 | キヤノン株式会社 | 干渉計搭載ステージ |
-
2003
- 2003-05-06 JP JP2003128227A patent/JP4280543B2/ja not_active Expired - Fee Related
- 2003-05-07 EP EP03252844A patent/EP1361486B1/en not_active Expired - Lifetime
- 2003-05-07 DE DE60317008T patent/DE60317008T2/de not_active Expired - Lifetime
- 2003-05-07 US US10/430,333 patent/US7154242B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP4280543B2 (ja) | 2009-06-17 |
| DE60317008D1 (de) | 2007-12-06 |
| US7154242B2 (en) | 2006-12-26 |
| EP1361486A3 (en) | 2004-02-18 |
| US20040114116A1 (en) | 2004-06-17 |
| JP2004030616A (ja) | 2004-01-29 |
| EP1361486B1 (en) | 2007-10-24 |
| EP1361486A2 (en) | 2003-11-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |