JP4280543B2 - 移動体機構および露光装置 - Google Patents

移動体機構および露光装置 Download PDF

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Publication number
JP4280543B2
JP4280543B2 JP2003128227A JP2003128227A JP4280543B2 JP 4280543 B2 JP4280543 B2 JP 4280543B2 JP 2003128227 A JP2003128227 A JP 2003128227A JP 2003128227 A JP2003128227 A JP 2003128227A JP 4280543 B2 JP4280543 B2 JP 4280543B2
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Japan
Prior art keywords
integrator
zero
electromagnet
command information
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003128227A
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English (en)
Japanese (ja)
Other versions
JP2004030616A5 (enExample
JP2004030616A (ja
Inventor
俊哉 浅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003128227A priority Critical patent/JP4280543B2/ja
Priority to DE60317008T priority patent/DE60317008T2/de
Priority to US10/430,333 priority patent/US7154242B2/en
Priority to EP03252844A priority patent/EP1361486B1/en
Publication of JP2004030616A publication Critical patent/JP2004030616A/ja
Publication of JP2004030616A5 publication Critical patent/JP2004030616A5/ja
Application granted granted Critical
Publication of JP4280543B2 publication Critical patent/JP4280543B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41105—Coarse fine
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41118—Drift-compensation for servo, anti-hunt
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41264—Driven by two motors
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41321—Brushless DC motor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41332—Electromagnet driven core, position of core controlled
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42005—Disturbance decoupling, rejection, suppression

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Control Of Linear Motors (AREA)
JP2003128227A 2002-05-08 2003-05-06 移動体機構および露光装置 Expired - Fee Related JP4280543B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003128227A JP4280543B2 (ja) 2002-05-08 2003-05-06 移動体機構および露光装置
DE60317008T DE60317008T2 (de) 2002-05-08 2003-05-07 Mechanismus für ein bewegliches Teil und Steuerungsverfahren für den selben
US10/430,333 US7154242B2 (en) 2002-05-08 2003-05-07 Moving member mechanism and control method therefor
EP03252844A EP1361486B1 (en) 2002-05-08 2003-05-07 Moving member mechanism and control method therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002132560 2002-05-08
JP2003128227A JP4280543B2 (ja) 2002-05-08 2003-05-06 移動体機構および露光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009001066A Division JP4841008B2 (ja) 2002-05-08 2009-01-06 移動体機構

Publications (3)

Publication Number Publication Date
JP2004030616A JP2004030616A (ja) 2004-01-29
JP2004030616A5 JP2004030616A5 (enExample) 2006-06-15
JP4280543B2 true JP4280543B2 (ja) 2009-06-17

Family

ID=29253672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003128227A Expired - Fee Related JP4280543B2 (ja) 2002-05-08 2003-05-06 移動体機構および露光装置

Country Status (4)

Country Link
US (1) US7154242B2 (enExample)
EP (1) EP1361486B1 (enExample)
JP (1) JP4280543B2 (enExample)
DE (1) DE60317008T2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060061218A1 (en) * 2004-09-21 2006-03-23 Nikon Corporation Dual force wafer table
JP4541849B2 (ja) 2004-11-22 2010-09-08 キヤノン株式会社 位置決め装置
JP2006211873A (ja) 2005-01-31 2006-08-10 Canon Inc 移動体制御装置及び移動体制御方法
JP2008153546A (ja) * 2006-12-19 2008-07-03 Canon Inc 移動体機構
US8279399B2 (en) 2007-10-22 2012-10-02 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JP5308249B2 (ja) * 2009-06-22 2013-10-09 三菱重工業株式会社 サーボ制御装置
JP5855341B2 (ja) * 2010-12-28 2016-02-09 ローム株式会社 レンズ制御装置及びこれを用いた撮像装置
JP6282256B2 (ja) * 2015-12-09 2018-02-21 ローム株式会社 レンズ制御装置及びこれを用いた撮像装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8877A (en) * 1852-04-13 Improvement in seed-planters
US3015768A (en) * 1959-01-14 1962-01-02 Bailey Meter Co Positioning motor control system
US4270073A (en) * 1979-02-28 1981-05-26 Persci, Inc. Position control in disk drive system
US5684856A (en) * 1991-09-18 1997-11-04 Canon Kabushiki Kaisha Stage device and pattern transfer system using the same
US5917580A (en) * 1996-08-29 1999-06-29 Canon Kabushiki Kaisha Scan exposure method and apparatus
JP3745167B2 (ja) * 1998-07-29 2006-02-15 キヤノン株式会社 ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法
EP1014199B1 (en) * 1998-12-24 2011-03-30 Canon Kabushiki Kaisha Stage control apparatus, exposure apparatus and method of manufacturing a semiconductor device
JP3720613B2 (ja) * 1999-02-03 2005-11-30 キヤノン株式会社 位置決め装置、露光装置およびデバイス製造方法ならびに位置決め方法
US6227817B1 (en) * 1999-09-03 2001-05-08 Magnetic Moments, Llc Magnetically-suspended centrifugal blood pump
JP3728180B2 (ja) * 2000-06-01 2005-12-21 キヤノン株式会社 干渉計搭載ステージ

Also Published As

Publication number Publication date
DE60317008D1 (de) 2007-12-06
US7154242B2 (en) 2006-12-26
EP1361486A3 (en) 2004-02-18
US20040114116A1 (en) 2004-06-17
DE60317008T2 (de) 2008-07-24
JP2004030616A (ja) 2004-01-29
EP1361486B1 (en) 2007-10-24
EP1361486A2 (en) 2003-11-12

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