DE60236358D1 - Verfahren und vorrichtung zur reinigung von luft - Google Patents

Verfahren und vorrichtung zur reinigung von luft

Info

Publication number
DE60236358D1
DE60236358D1 DE60236358T DE60236358T DE60236358D1 DE 60236358 D1 DE60236358 D1 DE 60236358D1 DE 60236358 T DE60236358 T DE 60236358T DE 60236358 T DE60236358 T DE 60236358T DE 60236358 D1 DE60236358 D1 DE 60236358D1
Authority
DE
Germany
Prior art keywords
cleaning air
cleaning
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60236358T
Other languages
English (en)
Inventor
Isao Terada
Minoru Tanaka
Yuji Matumura
Sadao Kobayashi
Naoki Mori
Hiromu Itoh
Yoshihide Wakayama
Osamu Suenaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Nichias Corp
Original Assignee
Tokyo Electron Ltd
Nichias Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Nichias Corp filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE60236358D1 publication Critical patent/DE60236358D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/117—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using wet filtering
    • F24F8/125—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using wet filtering using wet filter elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
    • F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
    • F24F8/117—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using wet filtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Gas Separation By Absorption (AREA)
  • Air Humidification (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
DE60236358T 2001-06-26 2002-06-26 Verfahren und vorrichtung zur reinigung von luft Expired - Lifetime DE60236358D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001192517 2001-06-26
JP2001192518 2001-06-26
PCT/JP2002/006374 WO2003001122A1 (fr) 2001-06-26 2002-06-26 Procede et appareil d'epuration de l'air

Publications (1)

Publication Number Publication Date
DE60236358D1 true DE60236358D1 (de) 2010-06-24

Family

ID=26617549

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60236358T Expired - Lifetime DE60236358D1 (de) 2001-06-26 2002-06-26 Verfahren und vorrichtung zur reinigung von luft

Country Status (8)

Country Link
US (1) US7160362B2 (de)
EP (1) EP1400761B1 (de)
JP (1) JPWO2003001122A1 (de)
KR (1) KR100568093B1 (de)
CN (1) CN1279320C (de)
DE (1) DE60236358D1 (de)
TW (1) TW541201B (de)
WO (1) WO2003001122A1 (de)

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WO2003011452A1 (en) * 2001-07-30 2003-02-13 Ngk Insulators,Ltd. Liquid-gas contact apparatus
JP2005037076A (ja) * 2003-07-16 2005-02-10 Kureha Ltd 気化フィルター用不織布集合体
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP4693422B2 (ja) * 2005-01-14 2011-06-01 国立大学法人東北大学 空気殺菌脱臭システム
JP5102217B2 (ja) 2005-10-31 2012-12-19 アプライド マテリアルズ インコーポレイテッド プロセス削減反応器
US20080003151A1 (en) * 2006-02-11 2008-01-03 Applied Materials, Inc. Methods and apparatus for pfc abatement using a cdo chamber
JP4812633B2 (ja) * 2007-01-12 2011-11-09 三洋電機株式会社 空気除菌装置
JP4885115B2 (ja) * 2007-11-26 2012-02-29 伸和コントロールズ株式会社 レジスト処理工程排気の清浄化方法
EP2340100B1 (de) 2008-04-03 2012-10-24 Povl Kaas Filtereinheit mit filterbank
JP4502054B2 (ja) * 2008-09-09 2010-07-14 ダイキン工業株式会社 空気調和機
EP2379153A1 (de) * 2008-12-22 2011-10-26 Koninklijke Philips Electronics N.V. Verfahren zur befeuchtung eines gasstroms und anordnung dafür
WO2010141872A1 (en) 2009-06-04 2010-12-09 Rotation Medical, Inc. Apparatus for fixing sheet-like materials to a target tissue
US9791161B2 (en) * 2010-02-15 2017-10-17 Koken Ltd. Local clean zone forming apparatus
JP5302931B2 (ja) * 2010-05-24 2013-10-02 株式会社大気社 空気浄化加湿装置
JP2012102918A (ja) * 2010-11-09 2012-05-31 Sekisui Chem Co Ltd 空調システム及び建物
CN102242655A (zh) * 2010-12-08 2011-11-16 上海市黄浦区新凌小学 一种汽车尾气净化过滤装置
US9021948B2 (en) * 2011-04-27 2015-05-05 Xerox Corporation Environmental control subsystem for a variable data lithographic apparatus
CN103245015B (zh) * 2012-02-06 2017-04-05 中国计量大学 利用水冷制冷系统中冷除湿与热升温的水淋空气净化方法
CN103894034A (zh) * 2012-12-28 2014-07-02 承源环境科技企业有限公司 低耗能净化装置
CN103505967A (zh) * 2013-07-13 2014-01-15 张鸿东 一种水清洁空气的方法和装置
US11311831B1 (en) 2015-01-28 2022-04-26 Pui King Chan Air purification method based on cloud physics
CN105352072B (zh) * 2015-12-10 2018-11-27 浙江国正安全技术有限公司 一种双通道空气净化器
US20180001249A1 (en) * 2016-06-19 2018-01-04 Abe M. Sher Methods Apparatuses Assemblies Devices and Systems for Conditioning and Purifying Air
CN107543276A (zh) * 2016-06-28 2018-01-05 宁夏赛文技术股份有限公司 水效除霾新风系统
CN106382697A (zh) * 2016-10-19 2017-02-08 广东美的制冷设备有限公司 空气净化器
CN108731139A (zh) * 2017-04-20 2018-11-02 华北电力大学（保定） 一种兼具除尘和智能湿度控制功能的新风换气机
CN107514700A (zh) * 2017-08-11 2017-12-26 成都新力佳科技有限公司 一种室内雾霾净化装置
CN113623750A (zh) * 2020-05-06 2021-11-09 青岛海尔空调器有限总公司 水净化模块及空调
CN112066507A (zh) * 2020-09-07 2020-12-11 重庆工程职业技术学院 一种智能建筑的通风系统
US11725835B2 (en) * 2021-01-02 2023-08-15 Vempati Venkata Sundereswar Rao Energy efficient and refrigerant-free air cooler
JP7443275B2 (ja) * 2021-02-19 2024-03-05 ダイキン工業株式会社 空気処理装置
KR20240007761A (ko) * 2021-06-14 2024-01-16 코크-글리취 엘피 구조화된 패킹 및 이를 이용하는 교차 유동 접촉기
KR20230124240A (ko) * 2022-02-18 2023-08-25 삼성전자주식회사 가습 모듈 및 이를 포함하는 전자 장치

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JPS5222944A (en) 1975-08-15 1977-02-21 Tokyo Keiki Co Ltd Thickness gauge using ultrasonic waves
US4031180A (en) * 1976-06-22 1977-06-21 Acme Eng. & Mfg. Corporation Cooling pad system
JPS5422944A (en) * 1977-07-22 1979-02-21 Takasago Thermal Eng Co Lts Dehumidifier capable of cleaning up intake air
ES485722A1 (es) 1978-11-07 1980-07-01 Mitsubishi Electric Corp Un aparato simplificado de acondicionamiento del aire
US4670197A (en) * 1986-08-29 1987-06-02 Custodis-Ecodyne Gas/liquid contact apparatus
JPS63270521A (ja) * 1987-04-30 1988-11-08 Nippon Light Metal Co Ltd 湿式空気清浄装置
DE4128675C2 (de) * 1991-08-29 1994-12-15 Schott Glaswerke Verfahren zum Verbinden von Glaswellplatten aus Borosilikatglas und Verwendung des Verbundes als Kolonnentragrost
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JP3202048B2 (ja) * 1991-10-31 2001-08-27 忠彦 射場本 空調機および熱交換器
US5320651A (en) * 1993-06-28 1994-06-14 Munters Corporation Cross-flow film fill media with intergral drift eliminator
JP3372602B2 (ja) * 1993-08-23 2003-02-04 高砂熱学工業株式会社 空気中不純物の除去装置及び除去方法
US5620503A (en) * 1993-11-04 1997-04-15 Tom Miller, Inc. Humidifier and method for humidifying air
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JPH08178350A (ja) 1994-12-28 1996-07-12 Matsushita Electric Ind Co Ltd 調湿装置および調湿機能付空気調和機
DE69631111T2 (de) * 1995-11-07 2004-08-26 Kabushiki Kaisha Seibu Giken Verfahren und Vorrichtung zum Kühlen eines Fluidstromes und trocknende Gaskühlung
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Also Published As

Publication number Publication date
WO2003001122A1 (fr) 2003-01-03
EP1400761A1 (de) 2004-03-24
EP1400761B1 (de) 2010-05-12
EP1400761A4 (de) 2006-05-24
CN1279320C (zh) 2006-10-11
US7160362B2 (en) 2007-01-09
JPWO2003001122A1 (ja) 2004-10-14
CN1520503A (zh) 2004-08-11
EP1400761A8 (de) 2004-06-02
KR100568093B1 (ko) 2006-04-05
US20040237781A1 (en) 2004-12-02
KR20040016890A (ko) 2004-02-25
TW541201B (en) 2003-07-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition