DE60140514D1 - Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen - Google Patents

Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen

Info

Publication number
DE60140514D1
DE60140514D1 DE60140514T DE60140514T DE60140514D1 DE 60140514 D1 DE60140514 D1 DE 60140514D1 DE 60140514 T DE60140514 T DE 60140514T DE 60140514 T DE60140514 T DE 60140514T DE 60140514 D1 DE60140514 D1 DE 60140514D1
Authority
DE
Germany
Prior art keywords
perfluorocompounds
removing perfluorocompounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60140514T
Other languages
English (en)
Inventor
Shin Tamata
Ri Koukun
Kazuyoshi Irie
Yoshiki Shibano
Shuichi Kanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE60140514D1 publication Critical patent/DE60140514D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8659—Removing halogens or halogen compounds
    • B01D53/8662—Organic halogen compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DE60140514T 2001-03-16 2001-08-27 Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen Expired - Lifetime DE60140514D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001075241A JP4211227B2 (ja) 2001-03-16 2001-03-16 過弗化物の処理方法及びその処理装置

Publications (1)

Publication Number Publication Date
DE60140514D1 true DE60140514D1 (de) 2009-12-31

Family

ID=18932352

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60140514T Expired - Lifetime DE60140514D1 (de) 2001-03-16 2001-08-27 Verfahren und Vorrichtung zur Beseitigung von Perfluorverbindungen

Country Status (6)

Country Link
US (2) US20020131912A1 (de)
EP (1) EP1240937B1 (de)
JP (1) JP4211227B2 (de)
KR (1) KR100806011B1 (de)
DE (1) DE60140514D1 (de)
TW (1) TWI292721B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010001652A1 (en) * 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
JP3994605B2 (ja) * 1999-11-26 2007-10-24 株式会社日立製作所 Ｐｆｃガスの処理方法及び処理装置
JP4218618B2 (ja) * 2004-09-10 2009-02-04 株式会社日立製作所 排ガス分解処理装置
US7138551B2 (en) * 2004-11-05 2006-11-21 E. I. Du Pont De Nemours And Company Purification of fluorinated alcohols
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP2008546525A (ja) * 2005-06-13 2008-12-25 アプライド マテリアルズ インコーポレイテッド 処理を除害する方法および装置
JP4966521B2 (ja) * 2005-07-22 2012-07-04 昭和電工株式会社 過弗化物含有排ガスの処理方法及び処理装置
EP1954926A2 (de) 2005-10-31 2008-08-13 Applied Materials, Inc. Prozessunterdrückungsreaktor
WO2007095150A2 (en) * 2006-02-11 2007-08-23 Applied Materials, Inc. Methods and apparatus for pfc abatement using a cdo chamber
KR100743399B1 (ko) * 2006-06-15 2007-07-27 주식회사 에코프로 반도체 제조공정에서 발생하는 염소가스와 과불화물의처리장치
TWI355964B (en) * 2007-12-05 2012-01-11 Ind Tech Res Inst Method for catalytic treating perfluorocompound ga
US8673212B2 (en) * 2010-05-28 2014-03-18 Steris Corporation Apparatus to decontaminate equipment containing internal channels
CN104755770B (zh) 2012-10-18 2016-11-09 日立建机株式会社 作业机械
US9051196B2 (en) * 2013-03-15 2015-06-09 Clack Corporation Baffle plate for a water treatment device
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
KR101638325B1 (ko) 2014-09-03 2016-07-12 노영석 분리막시스템과 스크러버가 일체로 이루어지는 과불화화합물 분리시스템
US10375901B2 (en) 2014-12-09 2019-08-13 Mtd Products Inc Blower/vacuum
US10065197B2 (en) * 2016-07-12 2018-09-04 John Richmond Hydraulic particle separation apparatus for placer mining
KR101825825B1 (ko) * 2016-08-02 2018-02-06 주식회사 에코프로 질소산화물, 염화불화탄소류, 수소염화불화탄소류, 수소불화탄소류 및 과불화화합물을 포함하는 복합 폐가스의 통합 처리 시스템
CN111237786B (zh) 2017-07-07 2022-04-29 鉴锋国际股份有限公司 用于控制气体污染物分解氧化的装置及系统
EP3680364B1 (de) * 2017-09-07 2022-01-05 De Nora Permelec Ltd Elektrolysevorrichtung
CN107638794A (zh) * 2017-10-18 2018-01-30 四川西丹孚能源科技有限公司 一种新型电解液废气零排放环保系统
CN108295633B (zh) * 2018-03-13 2023-09-05 中国华电科工集团有限公司 一种用于火电厂脱硫塔循环浆液冷却消白烟的装置和方法
CN109107322A (zh) * 2018-10-08 2019-01-01 绍兴市锐新环境设备有限公司 一种简单高效的烟雾净化器
KR102332213B1 (ko) * 2019-08-22 2021-12-01 한국전력공사 플라즈마를 이용한 고농도 육불화황(sf6)의 분해 및 후처리 시스템
CN110585906A (zh) * 2019-09-11 2019-12-20 肖涛 一种危废高温烟气处理工艺
CN113247870B (zh) * 2021-04-03 2022-05-10 中船(邯郸)派瑞特种气体股份有限公司 一种制备高纯三氟化氮气体的方法及装置
CN115557471B (zh) * 2022-01-29 2024-02-20 宁德时代新能源科技股份有限公司 一种制备硫酰氟的方法及硫酰氟

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4057404A (en) * 1976-02-23 1977-11-08 E. I. Du Pont De Nemours And Company Method for separating immiscible fluids of different density
US4980090A (en) * 1988-02-26 1990-12-25 Manchak Frank Process of isolating hazardous waste by centrifugal casting and product
JPH07284642A (ja) * 1994-04-19 1995-10-31 Hisao Kojima ミキシングエレメント及びその製造方法
US5785741A (en) * 1995-07-17 1998-07-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude Process and system for separation and recovery of perfluorocompound gases
US6069291A (en) * 1996-06-12 2000-05-30 Guild Associates, Inc. Catalytic process for the decomposition of perfluoroalkanes
IE80909B1 (en) * 1996-06-14 1999-06-16 Air Liquide An improved process and system for separation and recovery of perfluorocompound gases
US20010001652A1 (en) * 1997-01-14 2001-05-24 Shuichi Kanno Process for treating flourine compound-containing gas
JPH10286434A (ja) * 1997-04-15 1998-10-27 Ube Ind Ltd フッ素含有化合物の分解方法
EP0885648B1 (de) * 1997-06-20 2004-01-07 Hitachi, Ltd. Verfahren, Vorrichtung und Verwendung eines Katalysators zur Zersetzung fluorierter Verbindungen
JP3269456B2 (ja) 1997-06-20 2002-03-25 株式会社日立製作所 フッ素含有化合物の分解処理方法、触媒及び分解処理装置
DE69833030T2 (de) * 1997-10-17 2006-08-24 Ebara Corp. Verfahren und vorrichtung zur behandlung von abgasen aus der halbleiterherstellung
TW550112B (en) * 1997-11-14 2003-09-01 Hitachi Ltd Method for processing perfluorocarbon, and apparatus therefor
JP3217034B2 (ja) 1997-11-14 2001-10-09 株式会社日立製作所 過弗化物の処理方法及びその処理装置
US8231851B2 (en) * 1997-11-14 2012-07-31 Hitachi, Ltd. Method for processing perfluorocarbon, and apparatus therefor
US6126906A (en) * 1998-06-18 2000-10-03 Kanken Techno Co., Ltd. Apparatus for removing harmful components in a semiconductor exhaust gas
US6630421B1 (en) * 1999-04-28 2003-10-07 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing fluorine compounds and use thereof
JP3976459B2 (ja) * 1999-11-18 2007-09-19 株式会社荏原製作所 フッ素含有化合物を含む排ガスの処理方法及び装置
JP2001293335A (ja) * 2000-04-12 2001-10-23 Ebara Corp フッ素含有化合物を含む排ガスの処理方法
JP4214717B2 (ja) * 2002-05-31 2009-01-28 株式会社日立製作所 過弗化物処理装置

Also Published As

Publication number Publication date
JP2002273172A (ja) 2002-09-24
KR100806011B1 (ko) 2008-02-26
EP1240937A1 (de) 2002-09-18
TWI292721B (de) 2008-01-21
US7128882B2 (en) 2006-10-31
US20020131913A1 (en) 2002-09-19
KR20020074048A (ko) 2002-09-28
JP4211227B2 (ja) 2009-01-21
EP1240937B1 (de) 2009-11-18
US20020131912A1 (en) 2002-09-19

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