DE60230596D1 - Verfahren und vorrichtung zur herstellung von kohlenstoffnanoröhren - Google Patents
Verfahren und vorrichtung zur herstellung von kohlenstoffnanoröhrenInfo
- Publication number
- DE60230596D1 DE60230596D1 DE60230596T DE60230596T DE60230596D1 DE 60230596 D1 DE60230596 D1 DE 60230596D1 DE 60230596 T DE60230596 T DE 60230596T DE 60230596 T DE60230596 T DE 60230596T DE 60230596 D1 DE60230596 D1 DE 60230596D1
- Authority
- DE
- Germany
- Prior art keywords
- reaction chamber
- substrate
- carbon nanotubes
- producing carbon
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
- D01F9/133—Apparatus therefor
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/08—Aligned nanotubes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/34—Length
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Textile Engineering (AREA)
- Inorganic Chemistry (AREA)
- Thermal Sciences (AREA)
- General Physics & Mathematics (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPR4217A AUPR421701A0 (en) | 2001-04-04 | 2001-04-04 | Process and apparatus for the production of carbon nanotubes |
PCT/AU2002/000437 WO2002081366A1 (en) | 2001-04-04 | 2002-04-04 | Process and apparatus for the production of carbon nanotubes |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60230596D1 true DE60230596D1 (de) | 2009-02-12 |
Family
ID=3828217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60230596T Expired - Fee Related DE60230596D1 (de) | 2001-04-04 | 2002-04-04 | Verfahren und vorrichtung zur herstellung von kohlenstoffnanoröhren |
Country Status (7)
Country | Link |
---|---|
US (2) | US20040149209A1 (de) |
EP (1) | EP1373130B1 (de) |
JP (1) | JP2004523460A (de) |
AT (1) | ATE419222T1 (de) |
AU (1) | AUPR421701A0 (de) |
DE (1) | DE60230596D1 (de) |
WO (1) | WO2002081366A1 (de) |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3686941B2 (ja) * | 2002-02-04 | 2005-08-24 | 独立行政法人物質・材料研究機構 | ナノ温度計およびその製造方法 |
US20070035226A1 (en) * | 2002-02-11 | 2007-02-15 | Rensselaer Polytechnic Institute | Carbon nanotube hybrid structures |
CA2385802C (en) | 2002-05-09 | 2008-09-02 | Institut National De La Recherche Scientifique | Method and apparatus for producing single-wall carbon nanotubes |
WO2005001021A2 (en) * | 2002-06-06 | 2005-01-06 | California Institute Of Technology | Nanocarpets for trapping particulates, bacteria and spores |
US20040007528A1 (en) * | 2002-07-03 | 2004-01-15 | The Regents Of The University Of California | Intertwined, free-standing carbon nanotube mesh for use as separation, concentration, and/or filtration medium |
US7290667B1 (en) * | 2002-07-03 | 2007-11-06 | The Regents Of The University Of California | Microfluidic sieve using intertwined, free-standing carbon nanotube mesh as active medium |
DE10314173A1 (de) * | 2002-12-03 | 2004-06-24 | Futurecarbon Gmbh | Vorrichtung und Verfahren zum Zuführen von Katalysatormaterial in einen Reaktor sowie Einrichtung zum Herstellen von Kohlenstoff-Nanomaterial |
US7157848B2 (en) * | 2003-06-06 | 2007-01-02 | Electrovac Fabrikation Elektrotechnischer Spezialartikel Gmbh | Field emission backlight for liquid crystal television |
US7202596B2 (en) | 2003-06-06 | 2007-04-10 | Electrovac Ag | Electron emitter and process of fabrication |
JP4301362B2 (ja) * | 2003-08-12 | 2009-07-22 | 株式会社日本製鋼所 | 低級炭化水素直接分解反応用触媒および低級炭化水素直接分解反応器ならびに低級炭化水素直接分解反応装置 |
CN1868030A (zh) * | 2003-09-12 | 2006-11-22 | 哥本哈根大学 | 包含延长纳米级元件的器件及制造方法 |
US20050214197A1 (en) * | 2003-09-17 | 2005-09-29 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
US7235159B2 (en) * | 2003-09-17 | 2007-06-26 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
WO2005061382A1 (en) * | 2003-12-24 | 2005-07-07 | Nanometrix Inc. | Continuous production of carbon nanotubes |
AU2005230961B2 (en) * | 2004-01-15 | 2010-11-11 | Nanocomp Technologies, Inc. | Systems and methods for synthesis of extended length nanostructures |
US20050238810A1 (en) * | 2004-04-26 | 2005-10-27 | Mainstream Engineering Corp. | Nanotube/metal substrate composites and methods for producing such composites |
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KR100656985B1 (ko) | 2004-11-02 | 2006-12-13 | 한국에너지기술연구원 | 나노필터 여재 제조 방법과 제조 장치 |
DE102004054959A1 (de) * | 2004-11-13 | 2006-05-18 | Bayer Technology Services Gmbh | Katalysator zur Herstellung von Kohlenstoffnanoröhrchen durch Zersetzung von gas-förmigen Kohlenverbindungen an einem heterogenen Katalysator |
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KR100721718B1 (ko) | 2005-11-29 | 2007-05-25 | 세메스 주식회사 | 탄소 나노 튜브 생산 설비 및 방법 |
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KR101124505B1 (ko) | 2005-12-28 | 2012-03-15 | 삼성전자주식회사 | 유기금속 화학증착법에 의한 카본파이버의 제조방법 |
JP4973208B2 (ja) * | 2006-03-29 | 2012-07-11 | 東レ株式会社 | 気相反応装置 |
JP2007314908A (ja) * | 2006-05-25 | 2007-12-06 | Ulvac Japan Ltd | グラファイトナノファイバの生成方法、電界電子放出型表示装置の製造方法及びカーボンナノチューブの生成方法 |
US20080292835A1 (en) * | 2006-08-30 | 2008-11-27 | Lawrence Pan | Methods for forming freestanding nanotube objects and objects so formed |
US8617650B2 (en) * | 2006-09-28 | 2013-12-31 | The Hong Kong University Of Science And Technology | Synthesis of aligned carbon nanotubes on double-sided metallic substrate by chemical vapor depositon |
US20120189846A1 (en) * | 2007-01-03 | 2012-07-26 | Lockheed Martin Corporation | Cnt-infused ceramic fiber materials and process therefor |
US8951632B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
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US8158217B2 (en) * | 2007-01-03 | 2012-04-17 | Applied Nanostructured Solutions, Llc | CNT-infused fiber and method therefor |
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WO2008096699A1 (ja) * | 2007-02-05 | 2008-08-14 | National Institute Of Advanced Industrial Science And Technology | 配向カーボンナノチューブの製造装置および製造方法 |
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JP5019537B2 (ja) * | 2008-02-29 | 2012-09-05 | 独立行政法人産業技術総合研究所 | 配向カーボンナノチューブ集合体の製造方法及び製造装置 |
WO2009126602A1 (en) * | 2008-04-09 | 2009-10-15 | Riehl Bill L | Method for production of carbon nanostructures |
EP2263974B1 (de) * | 2008-04-16 | 2014-06-18 | Zeon Corporation | Vorrichtung und verfahren zur herstellung ausgerichteter kohlenstoffnanoröhrchenaggregate |
KR101239168B1 (ko) * | 2008-08-08 | 2013-03-05 | 가부시끼가이샤 도시바 | 나노카본 생성 장치 |
US8119074B2 (en) * | 2008-12-17 | 2012-02-21 | Centro de Investigacion en Materiales Avanzados, S.C | Method and apparatus for the continuous production of carbon nanotubes |
US8221937B2 (en) * | 2008-12-19 | 2012-07-17 | University Of Dayton | Metal-free vertically-aligned nitrogen-doped carbon nanotube catalyst for fuel cell cathodes |
US8585934B2 (en) * | 2009-02-17 | 2013-11-19 | Applied Nanostructured Solutions, Llc | Composites comprising carbon nanotubes on fiber |
CN102333906B (zh) * | 2009-02-27 | 2015-03-11 | 应用纳米结构方案公司 | 使用气体预热法的低温cnt生长 |
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BRPI1014162A2 (pt) * | 2009-04-10 | 2016-04-26 | Applied Nanostructured Sols | método e aparelho para uso de um forno vertical para infundir nanotubos de carbono á fibra |
JP5629756B2 (ja) * | 2009-04-10 | 2014-11-26 | アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーApplied Nanostructuredsolutions, Llc | 連続的に移動する基材上においてカーボン・ナノチューブを製造する装置及び方法 |
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BR112012010329A2 (pt) * | 2009-11-02 | 2019-09-24 | Applied Nanostructured Sols | materiais de fribras de aramida com cnts infludidos |
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CN102596564B (zh) * | 2009-11-23 | 2014-11-12 | 应用纳米结构方案公司 | 含有碳纳米管并入的纤维材料的陶瓷复合材料及其制备方法 |
US20110123735A1 (en) * | 2009-11-23 | 2011-05-26 | Applied Nanostructured Solutions, Llc | Cnt-infused fibers in thermoset matrices |
CN103079805B (zh) * | 2009-12-14 | 2015-02-11 | 应用纳米结构方案公司 | 含有碳纳米管并入的纤维材料的防火复合材料和制品 |
TWI466816B (zh) * | 2009-12-30 | 2015-01-01 | Univ Tunghai | 筆直直立奈米線陣列結構及其製造方法 |
US9167736B2 (en) * | 2010-01-15 | 2015-10-20 | Applied Nanostructured Solutions, Llc | CNT-infused fiber as a self shielding wire for enhanced power transmission line |
KR101906262B1 (ko) * | 2010-02-02 | 2018-10-10 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | 평행하게-정렬된 카본 나노튜브를 포함하는 섬유 |
KR101818640B1 (ko) * | 2010-03-02 | 2018-01-15 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | 카본 나노튜브 주입된 섬유를 포함하는 전기 장치 및 그의 제조 방법 |
CN102934267A (zh) | 2010-03-02 | 2013-02-13 | 应用奈米结构公司 | 具注入碳纳米管电极材料螺旋缠绕式电气装置及其制造方法及装置 |
JP2011195397A (ja) * | 2010-03-23 | 2011-10-06 | Hitachi Zosen Corp | カーボンナノチューブ形成用のcvd装置 |
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US93693A (en) * | 1869-08-17 | Improvement in fruit-crates | ||
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AUPQ065099A0 (en) * | 1999-05-28 | 1999-06-24 | Commonwealth Scientific And Industrial Research Organisation | Substrate-supported aligned carbon nanotube films |
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US6361861B2 (en) * | 1999-06-14 | 2002-03-26 | Battelle Memorial Institute | Carbon nanotubes on a substrate |
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AT407754B (de) * | 1999-09-29 | 2001-06-25 | Electrovac | Verfahren und vorrichtung zur herstellung einer nanotube-schicht auf einem substrat |
EP1149932A3 (de) * | 2000-01-26 | 2003-09-10 | Iljin Nanotech Co., Ltd. | Thermische CVD Vorrichtung und Methode zur Herstellung von Kohlenstoff-Nanoröhren mittels dieser Vorrichtung |
WO2001085612A2 (en) * | 2000-05-11 | 2001-11-15 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence | Process for preparing carbon nanotubes |
TW593730B (en) * | 2002-03-25 | 2004-06-21 | Ind Tech Res Inst | Process of direct low-temperature growth of carbon nanotubes on a substrate |
US6887451B2 (en) * | 2002-04-30 | 2005-05-03 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Of Her Majesty's Canadian Government | Process for preparing carbon nanotubes |
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US20090010822A1 (en) | 2009-01-08 |
EP1373130B1 (de) | 2008-12-31 |
JP2004523460A (ja) | 2004-08-05 |
US7488455B2 (en) | 2009-02-10 |
AUPR421701A0 (en) | 2001-05-17 |
EP1373130A4 (de) | 2004-11-10 |
EP1373130A1 (de) | 2004-01-02 |
US20040149209A1 (en) | 2004-08-05 |
WO2002081366A1 (en) | 2002-10-17 |
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