US20040149209A1 - Process and apparatus for the production of carbon nanotubes - Google Patents

Process and apparatus for the production of carbon nanotubes Download PDF

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Publication number
US20040149209A1
US20040149209A1 US10/474,066 US47406604A US2004149209A1 US 20040149209 A1 US20040149209 A1 US 20040149209A1 US 47406604 A US47406604 A US 47406604A US 2004149209 A1 US2004149209 A1 US 2004149209A1
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United States
Prior art keywords
substrate
process according
reaction chamber
carbon nanotubes
pyrolysis
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Abandoned
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US10/474,066
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English (en)
Inventor
Liming Dai
Shaoming Huang
Oddvar Johansen
Albert Mau
Ernst Hammel
Xinhie Tang
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Commonwealth Scientific and Industrial Research Organization CSIRO
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Commonwealth Scientific and Industrial Research Organization CSIRO
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Assigned to COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION reassignment COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DAI, LIMING, HUANG, SHAOMING, JOHANSEN, ODDVAR, TANG, XINHE, HAMMEL, ERNST, MAU, ALBERT
Publication of US20040149209A1 publication Critical patent/US20040149209A1/en
Priority to US11/487,510 priority Critical patent/US7488455B2/en
Abandoned legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/605—Products containing multiple oriented crystallites, e.g. columnar crystallites
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/133—Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/08—Aligned nanotubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/34—Length
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
US10/474,066 2001-04-04 2002-04-04 Process and apparatus for the production of carbon nanotubes Abandoned US20040149209A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US11/487,510 US7488455B2 (en) 2001-04-04 2006-07-17 Apparatus for the production of carbon nanotubes

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AUPR4217A AUPR421701A0 (en) 2001-04-04 2001-04-04 Process and apparatus for the production of carbon nanotubes
AUPR4217 2001-04-04
PCT/AU2002/000437 WO2002081366A1 (en) 2001-04-04 2002-04-04 Process and apparatus for the production of carbon nanotubes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/487,510 Division US7488455B2 (en) 2001-04-04 2006-07-17 Apparatus for the production of carbon nanotubes

Publications (1)

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US20040149209A1 true US20040149209A1 (en) 2004-08-05

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US10/474,066 Abandoned US20040149209A1 (en) 2001-04-04 2002-04-04 Process and apparatus for the production of carbon nanotubes
US11/487,510 Expired - Fee Related US7488455B2 (en) 2001-04-04 2006-07-17 Apparatus for the production of carbon nanotubes

Family Applications After (1)

Application Number Title Priority Date Filing Date
US11/487,510 Expired - Fee Related US7488455B2 (en) 2001-04-04 2006-07-17 Apparatus for the production of carbon nanotubes

Country Status (7)

Country Link
US (2) US20040149209A1 (de)
EP (1) EP1373130B1 (de)
JP (1) JP2004523460A (de)
AT (1) ATE419222T1 (de)
AU (1) AUPR421701A0 (de)
DE (1) DE60230596D1 (de)
WO (1) WO2002081366A1 (de)

Cited By (29)

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US20040007528A1 (en) * 2002-07-03 2004-01-15 The Regents Of The University Of California Intertwined, free-standing carbon nanotube mesh for use as separation, concentration, and/or filtration medium
US20050112052A1 (en) * 2003-09-17 2005-05-26 Gang Gu Methods for producing and using catalytic substrates for carbon nanotube growth
US20050214197A1 (en) * 2003-09-17 2005-09-29 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
US20050238810A1 (en) * 2004-04-26 2005-10-27 Mainstream Engineering Corp. Nanotube/metal substrate composites and methods for producing such composites
US20060013280A1 (en) * 2002-02-04 2006-01-19 Yoshio Bando Nanotube, nano thermometer and method for producing the same
EP1652573A1 (de) 2004-11-02 2006-05-03 Korea Institute of Energy Research Herstellungsverfahren und Vorrichtung zur Herstellung eines Nanofiltermediums
US20060231946A1 (en) * 2005-04-14 2006-10-19 Molecular Nanosystems, Inc. Nanotube surface coatings for improved wettability
US7175762B1 (en) * 2002-06-06 2007-02-13 California Institute Of Technology Nanocarpets for trapping particulates, bacteria and spores
US20070035226A1 (en) * 2002-02-11 2007-02-15 Rensselaer Polytechnic Institute Carbon nanotube hybrid structures
KR100721718B1 (ko) 2005-11-29 2007-05-25 세메스 주식회사 탄소 나노 튜브 생산 설비 및 방법
EP1803834A2 (de) * 2005-12-28 2007-07-04 Samsung Electronics Co., Ltd. Verfahren zum Herstellen von Kohlenstofffasern mittels metall-organischer CVD
US7290667B1 (en) * 2002-07-03 2007-11-06 The Regents Of The University Of California Microfluidic sieve using intertwined, free-standing carbon nanotube mesh as active medium
US20080286466A1 (en) * 2004-11-19 2008-11-20 Holmes Steven J Chemical and particulate filters containing chemically modified carbon nanotube structures
US20080292835A1 (en) * 2006-08-30 2008-11-27 Lawrence Pan Methods for forming freestanding nanotube objects and objects so formed
US20080305031A1 (en) * 2005-11-29 2008-12-11 Semes Co., Ltd. System and Method For Producing Carbon Nanotubes
US20090061217A1 (en) * 2005-05-11 2009-03-05 Surrey Nanosystems Limited Nanostructure production methods and apparatus
US20090297846A1 (en) * 2005-11-25 2009-12-03 Kenji Hata Double-Walled Carbon Nanotube, Aligned Double-Walled Carbon Nanotube Bulk Structure and Process for Producing the Same
US20100062157A1 (en) * 2007-02-05 2010-03-11 Kenji Hata Manufacturing apparatus and manufacturing method for alined carbon nanotubes
US20100150815A1 (en) * 2008-12-17 2010-06-17 Alfredo Aguilar Elguezabal Method and apparatus for the continuous production of carbon nanotubes
US20100183950A1 (en) * 2008-12-19 2010-07-22 University Of Dayton Metal-free vertically-aligned nitrogen-doped carbon nanotube catalyst for fuel cell cathodes
US20100196600A1 (en) * 2008-04-16 2010-08-05 Akiyoshi Shibuya Apparatus and method for producing aligned carbon-nanotube aggregates
US20110033639A1 (en) * 2005-02-23 2011-02-10 Motorola, Inc. Apparatus and process for carbon nanotube growth
US20110142726A1 (en) * 2008-08-08 2011-06-16 Eiichi Sugiyama Nanocarbon producing apparatus
US8071906B2 (en) 2002-05-09 2011-12-06 Institut National De La Recherche Scientifique Apparatus for producing single-wall carbon nanotubes
US20140023783A1 (en) * 2011-03-17 2014-01-23 Samsung Techwin Co., Ltd. Apparatus for manufacturing graphene film and method for manufacturing graphene film
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US10988620B2 (en) * 2015-06-24 2021-04-27 Luxembourg Institute Of Science And Technology (List) Composite element comprising a biphasic silica and carbon nanotube-based material
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US20090010822A1 (en) 2009-01-08
DE60230596D1 (de) 2009-02-12
WO2002081366A1 (en) 2002-10-17
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