DE60229674D1 - Optischer Wellenleiter und Herstellungsverfahren dafür - Google Patents

Optischer Wellenleiter und Herstellungsverfahren dafür

Info

Publication number
DE60229674D1
DE60229674D1 DE60229674T DE60229674T DE60229674D1 DE 60229674 D1 DE60229674 D1 DE 60229674D1 DE 60229674 T DE60229674 T DE 60229674T DE 60229674 T DE60229674 T DE 60229674T DE 60229674 D1 DE60229674 D1 DE 60229674D1
Authority
DE
Germany
Prior art keywords
layer
waveguide
optical waveguide
manufacturing
undercladding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60229674T
Other languages
English (en)
Inventor
Masahiro Sasaura
Kazuo Fujiura
Koji Enbutsu
Tadayuki Imai
Shogo Yagi
Takashi Kurihara
Makoto Abe
Seiji Toyoda
Eishi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001165283A external-priority patent/JP2002363749A/ja
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of DE60229674D1 publication Critical patent/DE60229674D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/355—Non-linear optics characterised by the materials used
    • G02F1/3551—Crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12109—Filter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12142—Modulator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12164—Multiplexing; Demultiplexing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12178—Epitaxial growth
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/1218—Diffusion
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G02F1/0018—Electro-optical materials
    • G02F1/0027—Ferro-electric materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/918—Single-crystal waveguide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49016—Antenna or wave energy "plumbing" making

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Glass Compositions (AREA)
DE60229674T 2001-05-14 2002-05-14 Optischer Wellenleiter und Herstellungsverfahren dafür Expired - Lifetime DE60229674D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001143570 2001-05-14
JP2001143571 2001-05-14
JP2001146560 2001-05-16
JP2001165283A JP2002363749A (ja) 2001-05-31 2001-05-31 結晶膜の製造方法

Publications (1)

Publication Number Publication Date
DE60229674D1 true DE60229674D1 (de) 2008-12-11

Family

ID=27482268

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60229674T Expired - Lifetime DE60229674D1 (de) 2001-05-14 2002-05-14 Optischer Wellenleiter und Herstellungsverfahren dafür

Country Status (4)

Country Link
US (4) US6792189B2 (de)
EP (2) EP1698921B1 (de)
AT (1) ATE412921T1 (de)
DE (1) DE60229674D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6705124B2 (en) * 2001-06-04 2004-03-16 Lightwave Microsystems Corporation High-density plasma deposition process for fabricating a top clad for planar lightwave circuit devices
US20030033834A1 (en) * 2001-08-17 2003-02-20 Michael Bazylenko Method of depositing a cladding layer
US20030219187A1 (en) * 2002-05-21 2003-11-27 Agere Systems Inc. Ladder electrode optical modulator and method of manufacture thereof
US20040101264A1 (en) * 2002-11-27 2004-05-27 Mcalexander William Ian Programmable integrated-optical device and a method for making and using the same
KR100888297B1 (ko) * 2003-03-19 2009-03-11 니폰덴신뎅와 가부시키가이샤 파장가변 필터
JP3896145B2 (ja) * 2003-07-16 2007-03-22 日本電信電話株式会社 光導波路材料および光導波路
JP2005128419A (ja) * 2003-10-27 2005-05-19 Nec Corp 光導波路構造およびその作製方法
JP4781648B2 (ja) * 2004-04-14 2011-09-28 株式会社 光コム 光共振器
WO2006106524A2 (en) * 2005-04-07 2006-10-12 Yissum Research Development Company Of The Hebrew University Of Jerusalem Amorphous and crystalline potassium lithium tantalate niobate (kltn) structures for optical and electro-optic devices
JP2009511982A (ja) * 2005-10-11 2009-03-19 イッサム リサーチ ディベロップメント カンパニー オブ ザ ヘブライ ユニバーシティー オブ エルサレム 光学的ルーティングおよびトランスポートアクセラレータ（ｏｒｔａ）
US8198606B2 (en) * 2006-04-10 2012-06-12 Yissum Research Development Company Of The Hebrew University Of Jerusalem Concurrent monitoring of a plurality of samples by an array of biosensing elements
FR2918506B1 (fr) * 2007-07-06 2010-10-22 Thales Sa Antenne comportant un guide d'alimentation serpentin couple parallelement a une pluralite de guides rayonnants et procede de fabrication d'une telle antenne
US10114269B2 (en) 2015-02-11 2018-10-30 The Regents Of The University Of California Heterogeneous waveguides and methods of manufacture
EP3323008B1 (de) 2015-07-16 2021-09-08 CommScope Connectivity Belgium BVBA Optische faser und wellenleitervorrichtungen mit erweiterter strahlkopplung
RU2594987C1 (ru) * 2015-07-29 2016-08-20 Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук Интегрально-оптический элемент
WO2017051747A1 (ja) * 2015-09-26 2017-03-30 信越化学工業株式会社 接合基板及びその製造方法とこの接合基板を用いた弾性表面波デバイス
RU2629891C1 (ru) * 2016-04-29 2017-09-04 Общество с ограниченной ответственностью "Малое инновационное предприятие "Пермские нанотехнологии" Способ создания функциональных элементов интегральных оптических схем
US11852953B2 (en) * 2019-12-03 2023-12-26 Nippon Telegraph And Telephone Corporation Optical element and manufacturing method thereof

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400052A (en) * 1981-03-19 1983-08-23 Bell Telephone Laboratories, Incorporated Method for manufacturing birefringent integrated optics devices
JPS60114811A (ja) * 1983-11-28 1985-06-21 Hitachi Ltd 光導波路およびその製造方法
US5180470A (en) * 1989-06-05 1993-01-19 The Regents Of The University Of California Deposition of highly-oriented PTFE films and uses therefor
CA2042083A1 (en) * 1990-06-04 1991-12-05 Adolph L. Micheli Formation of potassium tantalate niobate thin films by metalorganic deposition
US5473722A (en) * 1991-02-01 1995-12-05 Pirelli Cavi S.P.A. Rare-earth-doped lithium niobate waveguide structures
US5271957A (en) * 1992-06-18 1993-12-21 Eastman Kodak Company Chemical vapor deposition of niobium and tantalum oxide films
US5295218A (en) * 1992-09-29 1994-03-15 Eastman Kodak Company Frequency conversion in inorganic thin film waveguides by quasi-phase-matching
US5476720A (en) * 1992-12-18 1995-12-19 Guenter; Peter Films of KTN and KTAO3
US5614129A (en) * 1993-04-21 1997-03-25 California Institute Of Technology Potassium lithium tantalate niobate photorefractive crystals
JP3462265B2 (ja) * 1994-06-21 2003-11-05 パイオニア株式会社 波長変換素子
JPH08339002A (ja) * 1995-04-10 1996-12-24 Ngk Insulators Ltd 第二高調波発生素子およびその製造方法
DE69613772D1 (de) * 1995-07-28 2001-08-16 Nihon Yamamura Glass Co Ltd Dünner Kaliumniobatfilm, Verfahren zu dessen Herstellung sowie seine Anwendung in einer optischen Vorrichtung
JPH0987085A (ja) * 1995-09-22 1997-03-31 Ngk Insulators Ltd 光学単結晶品および光学素子
JP3052842B2 (ja) * 1996-06-07 2000-06-19 富士ゼロックス株式会社 強誘電体薄膜素子の製造方法
US6069394A (en) * 1997-04-09 2000-05-30 Matsushita Electronics Corporation Semiconductor substrate, semiconductor device and method of manufacturing the same
JP4204108B2 (ja) * 1997-11-06 2009-01-07 エピフォトニクス株式会社 光導波路素子およびその製造方法
JP3863277B2 (ja) * 1998-02-17 2006-12-27 日本碍子株式会社 強誘電体結晶基板の加工方法
JP3967455B2 (ja) * 1998-03-30 2007-08-29 Ｄｏｗａホールディングス株式会社 カリウム含有薄膜及びその製法
JPH11335199A (ja) * 1998-05-27 1999-12-07 Ngk Insulators Ltd 単結晶膜の製造方法
US6181462B1 (en) * 1998-05-27 2001-01-30 Ngk Insulators, Ltd. Second harmonic wave-generation device
JP2000066254A (ja) * 1998-08-18 2000-03-03 Matsushita Electric Ind Co Ltd 分極反転構造の形成方法
US6513226B2 (en) * 2000-03-28 2003-02-04 Ngk Insulators, Ltd. Method of manufacturing film structure, method of manufacturing optical waveguide substrate and method of manufacturing second harmonic generation device

Also Published As

Publication number Publication date
US7110652B2 (en) 2006-09-19
US20060018617A1 (en) 2006-01-26
EP1698921B1 (de) 2008-10-29
EP1260839B1 (de) 2014-09-24
EP1698921A2 (de) 2006-09-06
EP1698921A3 (de) 2006-09-20
US20050008318A1 (en) 2005-01-13
US6996321B2 (en) 2006-02-07
ATE412921T1 (de) 2008-11-15
EP1260839A3 (de) 2005-04-20
US20030072550A1 (en) 2003-04-17
US20060018616A1 (en) 2006-01-26
US6792189B2 (en) 2004-09-14
EP1260839A2 (de) 2002-11-27

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